公开(公告)号：US20040255847A1

公开(公告)日：2004-12-23

申请号：US10465528

申请日：2003-06-19

申请人： MEMC Electronic Materials, Inc.

发明人： Carl F. Cherko ,  Robert D. Cook

IPC分类号： C30B035/00 ,  C30B015/00 ,  C30B021/06 ,  C30B027/02 ,  C30B028/10 ,  C30B030/04 ,  C30B013/00 ,  C30B021/04 ,  C30B028/08

CPC分类号： C30B15/00 ,  C30B35/00 ,  Y10T117/1032 ,  Y10T117/106 ,  Y10T117/1068 ,  Y10T117/1072 ,  Y10T117/1088

摘要： A fluid sealing system is provided for use in a crystal puller for growing a monocrystalline ingot. The crystal puller has a housing, a fluid flow path contained in the housing, and a fluid passage through a wall of the housing for passage of fluid. The fluid sealing system includes a fluid connector head adapted for connection to the fluid passage and to the fluid flow path to establish fluid communication between the fluid flow path and the outside of the housing. The head has a port adapted for fluid communication with the fluid passage through the wall of the housing. First and second seals around the port are adapted for sealing engagement with the head. A space is defined generally between the first and second seals, and a leak detector is arranged to monitor the space for detecting fluid leakage past at least one of the seals.

摘要翻译： 提供流体密封系统用于晶体拉出器中用于生长单晶锭。 晶体拉出器具有壳体，容纳在壳体中的流体流路，以及通过壳体的壁的流体通道，用于流体流通。 流体密封系统包括适于连接到流体通道和流体流动路径的流体连接器头，以在流体流动路径和壳体的外部之间建立流体连通。 头部具有适于与通过壳体的壁的流体通道流体连通的端口。 端口周围的第一和第二密封件适于与头部进行密封接合。 通常在第一和第二密封件之间限定空间，并且设置泄漏检测器以监测用于检测通过至少一个密封件的流体泄漏的空间。