公开(公告)号：US20020009256A1

公开(公告)日：2002-01-24

申请号：US09802929

申请日：2001-03-12

Applicant: MEMLINK LTD.

Inventor： Igal Chertkow ,  Anatoly Patlakh ,  Avi Messica

IPC: G02B006/35

CPC classification number: G02B6/3514 ,  B81B3/0021 ,  B81B2201/032 ,  B81B2201/045 ,  B81B2203/051 ,  B81B2203/056 ,  G02B6/266 ,  G02B6/353 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3594 ,  G02B6/423 ,  G02B26/0841 ,  H01H2001/0084 ,  H04Q11/0005 ,  H04Q2011/0026 ,  H04Q2011/003 ,  H04Q2011/0056 ,  H04Q2011/0058

Abstract: A microelectromechanical (MEMS) device has a substrate, and at least one, generally planar moving element, such as an absorber or a mirror, disposed in parallel to the surface of the substrate. An actuator is operatively engageable with the moving element for selectively actuating the moving element between a series of successive, closely spaced positions in a plane horizontal to the surface of the substrate. The MEMS device may be effectively used as a variable attenuator and beam splitter. Various different actuators can be used. Preferably, the device is fabricated using a surface micromachining process.

Abstract translation: 微机电（MEMS）装置具有基板，以及平行于基板的表面设置的至少一个大致平面的移动元件，例如吸收体或反射镜。 致动器可操作地与所述移动元件接合，用于在与衬底的表面水平的平面中的一系列连续紧密间隔的位置之间选择性地致动所述移动元件。 MEMS器件可以有效地用作可变衰减器和分束器。 可以使用各种不同的致动器。 优选地，使用表面微加工工艺制造该装置。