MEMORY CELLS AND MEMORY ARRAY STRUCTURES AND METHODS OF THEIR FABRICATION

    公开(公告)号:US20240194264A1

    公开(公告)日:2024-06-13

    申请号:US18515906

    申请日:2023-11-21

    Abstract: Memory cells, and memories and memory array structures containing such memory cells, might include a control gate, a channel, a gate dielectric between the channel and the control gate, a charge-storage node between the gate dielectric and the control gate, a charge-blocking material between the charge-storage node and the control gate, a laminated dielectric between the charge-blocking material and the control gate, and a high-K dielectric between the laminated dielectric and the control gate, wherein the laminated dielectric comprises an instance of a first dielectric material between the charge-blocking material and the high-K dielectric and an instance of a second dielectric material between the instance of the first dielectric material and the high-K dielectric, and wherein the instance of the first dielectric material has a higher oxygen areal density than an oxygen areal density of the instance of the second dielectric material.

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