Abstract:
An optical probe includes a probe cover, within which is installed an optical system having an illuminating optical system and a receiving optical system. An emitting region and an incidence region through which light passes are provided to a bottom surface of the probe cover, the bottom surface forming an opposing region opposite a work piece. In addition, a light reflection prevention structure or a diffusion structure is provided to the bottom surface of the probe cover. Light reflected from the work piece is prevented from reflecting off the bottom surface by the reflection prevention structure, or the reflected light is diffused by the diffusion structure. Accordingly, an occurrence of an erroneous value in received light distribution due to second order reflected light can be inhibited.
Abstract:
An optical probe includes a probe cover, within which is installed an optical system having an illuminating optical system and a receiving optical system. An emitting region and an incidence region through which light passes are provided to a bottom surface of the probe cover, the bottom surface forming an opposing region opposite a work piece. The bottom surface forms a surface where, of the light reflected from the work piece, light following a direct reflection direction is reflected in a direction moving away from the incidence region, from a position where light emitted from the emitting region is emitted at the work piece. Accordingly, an amount of second order reflected light striking the incidence region can be suppressed and, therefore, an occurrence of an erroneous value in received light distribution can be suppressed.
Abstract:
An illumination apparatus according to the present invention includes a light source, a reflecting mirror, an optical system, and a calculator. The reflecting mirror includes a first reflector and a second reflector, and is capable, while changing a reflection angle, of reflecting and directing at an object a first divided light, the first divided light being a portion of light from the light source emitted at the first reflector. The optical system divides the light from the light source into the first divided light and a second divided light, and guides the second divided light to the second reflector. The calculator is capable of calculating the reflection angle of the reflecting mirror by receiving the second divided light reflected by the second reflector.
Abstract:
Coordinate measuring apparatus includes a probe having an optical system emitting light along a plane at a workpiece, an image capture apparatus having image capture elements arranged on an image capture plane and capturing an image of the workpiece from a position different from that of the predetermined plane, and a controller controlling the emitting optical system. The controller determines whether the image capture elements arranged in an image capture region on the image capture plane detect light incident on the workpiece due to the light from the emitting optical system, turns on the light emitted from the emitting optical system when the image capture elements arranged within the image capture region detect the incident light, and blinks the light emitted from the emitting optical system at a predetermined periodicity when the image capture elements arranged within the image capture region do not detect the incident light.
Abstract:
A shape measuring apparatus includes: an irradiating part configured to irradiate work with a linear line laser, the irradiating part including: a light source configured to produce laser light; a first optical member configured to linearly spread the laser light from the light source and generate the line laser; and a second optical member, provided between the light source and the first optical member, configured to adjust an area of irradiation with a line laser on the work; a first sensor configured to receive a line laser reflected by the work and capture an image of the work; a lens configured to form an image of a line laser reflected by the work on an imaging surface of the first sensor; and a control part configured to control adjustment of the area of irradiation with the line laser on the work by the second optical member.
Abstract:
An inspection method includes an image-data acquisition step of acquiring data about an image of a disk-shaped graduation plate as disk-shaped graduation-plate image data, and a polar-coordinate transformation step of transforming the disk-shaped graduation-plate image data into polar coordinates using a center of the disk-shaped graduation plate as a reference to generate polar-coordinate graduation image data. A defect detection step includes a processing-region setting step of setting a processing region for each of graduation line on a polar-coordinate angle display axis, a center-of-gravity calculation step of calculating a center of gravity for each processing region, and a center-of-gravity pitch calculation step of calculating a pitch of the center of gravity calculated in the center-of-gravity calculation step. the defect detection is executed by comparing a pitch of graduations in the polar-coordinate graduation image data with a predetermined reference value
Abstract:
An indicator inspection machine inspects the accuracy of an indicator based on a value displayed by the indicator when a spindle changes position. The indicator inspection machine includes a measurement spindle provided so as to be freely raised and lowered in order to displace the spindle of the indicator; a contact point provided to a distalmost end of the measurement spindle, the contact point making contact with an indicator contact point provided to a distalmost end of the spindle of the indicator; a drive mechanism driving the measurement spindle; and a controller controlling the drive mechanism so as to bring the contact point into contact with the indicator contact point while changing a speed of the measurement spindle at a predetermined periodicity.
Abstract:
A jig includes three columnar members, a stylus head receiving member, and a jig fixation portion. The second columnar member extends in a Z direction. The first columnar member extends in an X direction and is configured as a cantilever beam protruding in the X direction by having a first end of the first columnar member joined to a first end of the second columnar member. The third columnar member extends in the X direction and is configured as a cantilever beam protruding in the same direction as the first columnar member by having a first end of the third columnar member joined to a second end of the second columnar member. The stylus head receiving member is joined to the third columnar member such that a surface where a stylus head at a forefront end of a spindle of a gauge makes contact faces the first columnar member. The jig fixation portion is provided to the first columnar member so as to be attachable to a measurement spindle of the gauge inspection machine.
Abstract:
An illumination device has a light source unit, a lens unit, and a filter unit An imaging device receives object light, generated by the illumination light, from the measurement object at a predetermined observation solid angle, and pixels of the imaging device can each identify the different light wavelength ranges. A processing device includes an arithmetic unit configured to obtain a normal vector at each point of the measurement object corresponding to each pixel from inclusion relation between the plurality of solid angle regions, constituting the object light, and the predetermined observation solid angle, and a shape reconstruction unit configured to reconstruct the shape of the measurement object.
Abstract:
There is provided an inspection method of inspecting a disk-shaped graduation plate accurately and efficiently. An inspection method includes an image-data acquisition step of acquiring data about an image of a disk-shaped graduation plate as disk-shaped graduation-plate image data, and a polar-coordinate transformation step of transforming the disk-shaped graduation-plate image data into polar coordinates using a center of the disk-shaped graduation plate as a reference to generate polar-coordinate graduation image data. A defect detection step includes a processing-region setting step of setting a processing region on a polar-coordinate angle display axis, a center-of-gravity calculation step of calculating a center of gravity for each processing region, and a center-of-gravity pitch calculation step of calculating a pitch of the center of gravity calculated in the center-of-gravity calculation step.