OPTICAL PROBE, ATTACHABLE COVER, AND SHAPE MEASURING APPARATUS
    1.
    发明申请
    OPTICAL PROBE, ATTACHABLE COVER, AND SHAPE MEASURING APPARATUS 审中-公开
    光学探头,连接盖和形状测量装置

    公开(公告)号:US20150226544A1

    公开(公告)日:2015-08-13

    申请号:US14612480

    申请日:2015-02-03

    CPC classification number: G01B11/24 G01B11/026 G02B1/11 G02B5/0278

    Abstract: An optical probe includes a probe cover, within which is installed an optical system having an illuminating optical system and a receiving optical system. An emitting region and an incidence region through which light passes are provided to a bottom surface of the probe cover, the bottom surface forming an opposing region opposite a work piece. In addition, a light reflection prevention structure or a diffusion structure is provided to the bottom surface of the probe cover. Light reflected from the work piece is prevented from reflecting off the bottom surface by the reflection prevention structure, or the reflected light is diffused by the diffusion structure. Accordingly, an occurrence of an erroneous value in received light distribution due to second order reflected light can be inhibited.

    Abstract translation: 光探头包括探针盖,在其中安装有具有照明光学系统和接收光学系统的光学系统。 发光区域和光通过的入射区域被提供到探针盖的底表面,底面形成与工件相对的相对区域。 此外,在探针盖的底面设置有光反射防止结构或扩散结构。 通过防反射结构防止从工件反射的光从底面反射,或者反射光被扩散结构扩散。 因此,可以抑制由于二次反射光引起的接收光分布中的错误值的发生。

    OPTICAL PROBE, ATTACHABLE COVER, AND SHAPE MEASURING APPARATUS
    2.
    发明申请
    OPTICAL PROBE, ATTACHABLE COVER, AND SHAPE MEASURING APPARATUS 有权
    光学探头,连接盖和形状测量装置

    公开(公告)号:US20150226543A1

    公开(公告)日:2015-08-13

    申请号:US14612467

    申请日:2015-02-03

    Abstract: An optical probe includes a probe cover, within which is installed an optical system having an illuminating optical system and a receiving optical system. An emitting region and an incidence region through which light passes are provided to a bottom surface of the probe cover, the bottom surface forming an opposing region opposite a work piece. The bottom surface forms a surface where, of the light reflected from the work piece, light following a direct reflection direction is reflected in a direction moving away from the incidence region, from a position where light emitted from the emitting region is emitted at the work piece. Accordingly, an amount of second order reflected light striking the incidence region can be suppressed and, therefore, an occurrence of an erroneous value in received light distribution can be suppressed.

    Abstract translation: 光探头包括探针盖,在其中安装有具有照明光学系统和接收光学系统的光学系统。 发光区域和光通过的入射区域被提供到探针盖的底表面,底面形成与工件相对的相对区域。 底表面形成一个表面,其中从工件反射的光,沿着直接反射方向的光沿着从入射区域移开的方向从在发光区域发射的光在工作中发射的位置被反射 片。 因此,可以抑制入射入射区域的二次反射光的量,因此能够抑制接收光分布中的错误值的发生。

    ILLUMINATION APPARATUS, ILLUMINATION METHOD, MEASURING APPARATUS, AND MEASURING METHOD
    3.
    发明申请
    ILLUMINATION APPARATUS, ILLUMINATION METHOD, MEASURING APPARATUS, AND MEASURING METHOD 有权
    照明装置,照明方法,测量装置和测量方法

    公开(公告)号:US20150211842A1

    公开(公告)日:2015-07-30

    申请号:US14601280

    申请日:2015-01-21

    CPC classification number: G01B11/24 G01B11/25

    Abstract: An illumination apparatus according to the present invention includes a light source, a reflecting mirror, an optical system, and a calculator. The reflecting mirror includes a first reflector and a second reflector, and is capable, while changing a reflection angle, of reflecting and directing at an object a first divided light, the first divided light being a portion of light from the light source emitted at the first reflector. The optical system divides the light from the light source into the first divided light and a second divided light, and guides the second divided light to the second reflector. The calculator is capable of calculating the reflection angle of the reflecting mirror by receiving the second divided light reflected by the second reflector.

    Abstract translation: 根据本发明的照明装置包括光源,反射镜,光学系统和计算器。 反射镜包括第一反射器和第二反射器,并且能够在改变反射角的同时将物体反射并引导到第一分开的光,所述第一分割光是来自所述光源的光的一部分 第一反射器 光学系统将来自光源的光分成第一分割光和第二分光,并将第二分光引导到第二反射器。 计算器能够通过接收由第二反射器反射的第二分割光来计算反射镜的反射角。

    COORDINATE MEASURING APPARATUS
    4.
    发明申请
    COORDINATE MEASURING APPARATUS 有权
    坐标测量装置

    公开(公告)号:US20150077761A1

    公开(公告)日:2015-03-19

    申请号:US14483723

    申请日:2014-09-11

    Inventor: Masaoki YAMAGATA

    CPC classification number: G01B11/005 G01B11/24 G01B11/25

    Abstract: Coordinate measuring apparatus includes a probe having an optical system emitting light along a plane at a workpiece, an image capture apparatus having image capture elements arranged on an image capture plane and capturing an image of the workpiece from a position different from that of the predetermined plane, and a controller controlling the emitting optical system. The controller determines whether the image capture elements arranged in an image capture region on the image capture plane detect light incident on the workpiece due to the light from the emitting optical system, turns on the light emitted from the emitting optical system when the image capture elements arranged within the image capture region detect the incident light, and blinks the light emitted from the emitting optical system at a predetermined periodicity when the image capture elements arranged within the image capture region do not detect the incident light.

    Abstract translation: 坐标测量装置包括具有沿着工件的平面发光的光学系统的探针,具有布置在图像捕获平面上的图像捕获元件并从与预定平面不同的位置捕获工件的图像的图像捕获装置 ,以及控制发光光学系统的控制器。 控制器确定布置在图像捕获平面上的图像捕获区域中的图像捕获元件是否由于来自发射光学系统的光而检测入射在工件上的光,当图像捕获元件 布置在图像拍摄区域内的图像捕获区域检测入射光,并且当布置在图像捕获区域内的图像捕获元件不检测入射光时,以预定的周期闪烁从发射光学系统发射的光。

    SHAPE MEASURING APPARATUS
    5.
    发明申请
    SHAPE MEASURING APPARATUS 有权
    形状测量装置

    公开(公告)号:US20140253724A1

    公开(公告)日:2014-09-11

    申请号:US14197715

    申请日:2014-03-05

    CPC classification number: G01B11/24 G01B11/005 G01B11/25

    Abstract: A shape measuring apparatus includes: an irradiating part configured to irradiate work with a linear line laser, the irradiating part including: a light source configured to produce laser light; a first optical member configured to linearly spread the laser light from the light source and generate the line laser; and a second optical member, provided between the light source and the first optical member, configured to adjust an area of irradiation with a line laser on the work; a first sensor configured to receive a line laser reflected by the work and capture an image of the work; a lens configured to form an image of a line laser reflected by the work on an imaging surface of the first sensor; and a control part configured to control adjustment of the area of irradiation with the line laser on the work by the second optical member.

    Abstract translation: 一种形状测量装置,包括:被配置为用线性激光照射加工的照射部,所述照射部包括:被配置为产生激光的光源; 第一光学构件,其被配置为从所述光源线性地扩展所述激光并产生所述线激光; 以及第二光学构件,设置在所述光源和所述第一光学构件之间,被配置为调节所述工件上的线激光的照射面积; 第一传感器,被配置为接收由所述工件反射的线激光并捕获所述工件的图像; 配置为在第一传感器的成像表面上形成由工件反射的线激光的图像的透镜; 以及控制部,被配置为控制由所述线激光对所述第二光学部件的作业的照射区域的调整。

    INSPECTION METHOD, INSPECTION APPARATUS, AND INSPECTION PROGRAM FOR DISK-SHAPED GRADUATION PLATE

    公开(公告)号:US20240212129A1

    公开(公告)日:2024-06-27

    申请号:US18394714

    申请日:2023-12-22

    CPC classification number: G06T7/001 G06T2207/20168 G06T2207/30164

    Abstract: An inspection method includes an image-data acquisition step of acquiring data about an image of a disk-shaped graduation plate as disk-shaped graduation-plate image data, and a polar-coordinate transformation step of transforming the disk-shaped graduation-plate image data into polar coordinates using a center of the disk-shaped graduation plate as a reference to generate polar-coordinate graduation image data. A defect detection step includes a processing-region setting step of setting a processing region for each of graduation line on a polar-coordinate angle display axis, a center-of-gravity calculation step of calculating a center of gravity for each processing region, and a center-of-gravity pitch calculation step of calculating a pitch of the center of gravity calculated in the center-of-gravity calculation step. the defect detection is executed by comparing a pitch of graduations in the polar-coordinate graduation image data with a predetermined reference value

    INDICATOR INSPECTION MACHINE, INSPECTION METHOD, AND INSPECTION PROGRAM

    公开(公告)号:US20180364019A1

    公开(公告)日:2018-12-20

    申请号:US16008160

    申请日:2018-06-14

    CPC classification number: G01B3/22 G01B21/042

    Abstract: An indicator inspection machine inspects the accuracy of an indicator based on a value displayed by the indicator when a spindle changes position. The indicator inspection machine includes a measurement spindle provided so as to be freely raised and lowered in order to displace the spindle of the indicator; a contact point provided to a distalmost end of the measurement spindle, the contact point making contact with an indicator contact point provided to a distalmost end of the spindle of the indicator; a drive mechanism driving the measurement spindle; and a controller controlling the drive mechanism so as to bring the contact point into contact with the indicator contact point while changing a speed of the measurement spindle at a predetermined periodicity.

    INSPECTION MACHINE AND ATTACHMENT JIG THEREFOR

    公开(公告)号:US20170115141A1

    公开(公告)日:2017-04-27

    申请号:US15298639

    申请日:2016-10-20

    Abstract: A jig includes three columnar members, a stylus head receiving member, and a jig fixation portion. The second columnar member extends in a Z direction. The first columnar member extends in an X direction and is configured as a cantilever beam protruding in the X direction by having a first end of the first columnar member joined to a first end of the second columnar member. The third columnar member extends in the X direction and is configured as a cantilever beam protruding in the same direction as the first columnar member by having a first end of the third columnar member joined to a second end of the second columnar member. The stylus head receiving member is joined to the third columnar member such that a surface where a stylus head at a forefront end of a spindle of a gauge makes contact faces the first columnar member. The jig fixation portion is provided to the first columnar member so as to be attachable to a measurement spindle of the gauge inspection machine.

    SHAPE RECONSTRUCTION METHOD AND IMAGE MEASUREMENT DEVICE

    公开(公告)号:US20220412727A1

    公开(公告)日:2022-12-29

    申请号:US17780735

    申请日:2020-11-26

    Abstract: An illumination device has a light source unit, a lens unit, and a filter unit An imaging device receives object light, generated by the illumination light, from the measurement object at a predetermined observation solid angle, and pixels of the imaging device can each identify the different light wavelength ranges. A processing device includes an arithmetic unit configured to obtain a normal vector at each point of the measurement object corresponding to each pixel from inclusion relation between the plurality of solid angle regions, constituting the object light, and the predetermined observation solid angle, and a shape reconstruction unit configured to reconstruct the shape of the measurement object.

    INSPECTION METHOD, INSPECTION APPARATUS, AND INSPECTION PROGRAM FOR DISK-SHAPED GRADUATION PLATE

    公开(公告)号:US20240212126A1

    公开(公告)日:2024-06-27

    申请号:US18394612

    申请日:2023-12-22

    CPC classification number: G06T7/0006 G01D18/00 G06T7/60 G06T2207/30108

    Abstract: There is provided an inspection method of inspecting a disk-shaped graduation plate accurately and efficiently. An inspection method includes an image-data acquisition step of acquiring data about an image of a disk-shaped graduation plate as disk-shaped graduation-plate image data, and a polar-coordinate transformation step of transforming the disk-shaped graduation-plate image data into polar coordinates using a center of the disk-shaped graduation plate as a reference to generate polar-coordinate graduation image data. A defect detection step includes a processing-region setting step of setting a processing region on a polar-coordinate angle display axis, a center-of-gravity calculation step of calculating a center of gravity for each processing region, and a center-of-gravity pitch calculation step of calculating a pitch of the center of gravity calculated in the center-of-gravity calculation step.

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