ILLUMINATION APPARATUS, ILLUMINATION METHOD, MEASURING APPARATUS, AND MEASURING METHOD
    1.
    发明申请
    ILLUMINATION APPARATUS, ILLUMINATION METHOD, MEASURING APPARATUS, AND MEASURING METHOD 有权
    照明装置,照明方法,测量装置和测量方法

    公开(公告)号:US20150211842A1

    公开(公告)日:2015-07-30

    申请号:US14601280

    申请日:2015-01-21

    CPC classification number: G01B11/24 G01B11/25

    Abstract: An illumination apparatus according to the present invention includes a light source, a reflecting mirror, an optical system, and a calculator. The reflecting mirror includes a first reflector and a second reflector, and is capable, while changing a reflection angle, of reflecting and directing at an object a first divided light, the first divided light being a portion of light from the light source emitted at the first reflector. The optical system divides the light from the light source into the first divided light and a second divided light, and guides the second divided light to the second reflector. The calculator is capable of calculating the reflection angle of the reflecting mirror by receiving the second divided light reflected by the second reflector.

    Abstract translation: 根据本发明的照明装置包括光源,反射镜,光学系统和计算器。 反射镜包括第一反射器和第二反射器,并且能够在改变反射角的同时将物体反射并引导到第一分开的光,所述第一分割光是来自所述光源的光的一部分 第一反射器 光学系统将来自光源的光分成第一分割光和第二分光,并将第二分光引导到第二反射器。 计算器能够通过接收由第二反射器反射的第二分割光来计算反射镜的反射角。

    NON-CONTACT PROBE
    2.
    发明公开
    NON-CONTACT PROBE 审中-公开

    公开(公告)号:US20240230327A1

    公开(公告)日:2024-07-11

    申请号:US18403224

    申请日:2024-01-03

    CPC classification number: G01C3/02 G01C25/00

    Abstract: A non-contact probe includes: a light irradiating section that scans a measurement target object with spot-like laser beam; an image-capturing section that captures an image of the laser beam reflected by the measurement target object by using a plurality of pixel columns selected from a light-reception surface including a plurality of pixel columns, and generates a captured image; a position sensing section that senses an image-formation position of the laser beam on the captured image; and a pixel column changing section that selects a different plurality of pixel columns such that the image-formation position is included in the selected plurality of pixel columns.

    NON-CONTACT PROBE AND PROFILE MEASUREMENT APPARATUS

    公开(公告)号:US20230139573A1

    公开(公告)日:2023-05-04

    申请号:US17974224

    申请日:2022-10-26

    Inventor: Toshihisa TAKAI

    Abstract: A non-contact probe includes an irradiating part that radiates a laser beam, an irradiating mirror that reflects the laser beam from the irradiating part toward a workpiece, a light-receiving mirror that reflects the reflected light from the workpiece, and a galvano motor capable of swinging both the irradiating mirror and the light-receiving mirror. The irradiating mirror is provided at one axial end of the motor shaft that extends on both ends of the galvano motor, and the light-receiving mirror is provided at the other axial end of the motor shaft.

    POSITION MEASURING DEVICE
    4.
    发明申请
    POSITION MEASURING DEVICE 有权
    位置测量装置

    公开(公告)号:US20160076877A1

    公开(公告)日:2016-03-17

    申请号:US14837722

    申请日:2015-08-27

    Inventor: Toshihisa TAKAI

    CPC classification number: G01B11/002

    Abstract: A position measuring device of the invention includes a light emitter configured to emit a laser light, a hologram configured to generate a reconstructed image of an inclined surface relative to an optical axis, a light receiver disposed on a reconstructed image forming surface of the hologram, and a measurement unit configured to measure a position of an object based on a position of light received by the light receiver. In the position measuring device of the invention, the light emitter may emit a linear laser light and the light receiver may include an image sensor having a two-dimensional array of pixels.

    Abstract translation: 本发明的位置测量装置包括配置成发射激光的光发射器,配置成产生相对于光轴的倾斜表面的重建图像的全息图,设置在全息图的重建图像形成表面上的光接收器, 以及测量单元,被配置为基于由所述光接收器接收的光的位置来测量对象的位置。 在本发明的位置测量装置中,光发射器可以发射线性激光,并且光接收器可以包括具有二维像素阵列的图像传感器。

    POSITION MEASURING DEVICE AND POSITION MEASURING METHOD
    5.
    发明申请
    POSITION MEASURING DEVICE AND POSITION MEASURING METHOD 有权
    位置测量装置和位置测量方法

    公开(公告)号:US20150226852A1

    公开(公告)日:2015-08-13

    申请号:US14617168

    申请日:2015-02-09

    Abstract: A position measuring device includes a light emitter, an image capturer, a first beam splitter, a first light receiver, a second light receiver, a calculator, and a controller. The first light receiver receives light that propagates along a first optical axis toward the light emitter and is reflected by the first beam splitter, and outputs a first signal. The second light receiver outputs a second signal corresponding to an intensity of light propagating along a second optical axis toward the image capturer. The controller controls the intensity of the laser light based on the second signal when a difference between the first signal and the second signal is smaller than a predetermined threshold, and performs control so that the laser light has a predetermined intensity when the difference between the first signal and the second signal is equal to or greater than the threshold.

    Abstract translation: 位置测量装置包括光发射器,图像捕获器,第一分束器,第一光接收器,第二光接收器,计算器和控制器。 第一光接收器接收沿着第一光轴朝向光发射器传播并被第一分束器反射并且输出第一信号的光。 第二光接收器输出对应于沿着第二光轴向着图像捕获器传播的光的强度的第二信号。 当第一信号和第二信号之间的差小于预定阈值时,控制器基于第二信号控制激光的强度,并且当第一信号与第二信号之间的差值小于预定阈值时执行控制,使得激光具有预定的强度 信号,第二信号等于或大于阈值。

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