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1.发明申请公开(公告)号：US20190064089A1
公开(公告)日：2019-02-28
申请号：US16040779
申请日：2018-07-20
Applicant: MITUTOYO CORPORATION
Inventor： Yuichiro YOKOYAMA , Takeshi HAGINO
Abstract: A coefficient-of-thermal-expansion measuring device includes: a temperature detector detecting an object's temperature; an optical interferometer measuring an object's length using single-wavelength light; an actual data acquiring unit changing the object's temperature to temperatures and acquiring actual data of the length measured by the optical interferometer at each temperature; a data set generating unit generating pieces of verification data for each actual data by setting an order of interference within a predetermined range, selecting one piece of verification data at each temperature, and generating data sets each containing the selected piece of verification data, the data sets having different combinations of selection of the pieces of verification data; and a judging unit calculating a linear approximation function for each data set, and judging, using an evaluation index value based on differences of the verification data in each data set from the linear approximation function, applicability of each data set.
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公开(公告)号：US20150003494A1
公开(公告)日：2015-01-01
申请号：US14295781
申请日：2014-06-04
Applicant: MITUTOYO CORPORATION
Inventor： Yuichiro YOKOYAMA , Takeshi HAGINO
Abstract: A temperature-controlled bath capable of swiftly changing the temperature of a sample to a target temperature and maintaining the temperature of the sample at a fixed temperature after the temperature change is provided. A temperature-controlled bath includes a temperature changing means, a temperature-controlled chamber, a sample holding chamber, and connection cut-off means. The temperature changing means is disposed in the temperature-controlled chamber, and the temperature of the temperature-controlled chamber is adjusted by the temperature changing means. The sample holding chamber is separated from the temperature-controlled chamber by a thermally conducive wall, and contains a sample therein. The connection cut-off means change a connection between the temperature-controlled chamber and the sample holding chamber to a connected state or a cut-off state.
Abstract translation: 提供能够迅速将样品温度改变到目标温度并且在温度变化之后将样品温度保持在固定温度的温度控制浴。 温度控制浴包括温度改变装置，温度控制室，样品保持室和连接切断装置。 温度调节装置设置在温度控制室中，温度控制室的温度由温度变化装置调节。 样品保持室通过热导壁从温度控制室分离，并在其中包含样品。 连接切断装置将温度控制室和样品保持室之间的连接改变为连接状态或截止状态。
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Patent Agency Ranking
公开(公告)号：US20210293523A1
公开(公告)日：2021-09-23
申请号：US17197349
申请日：2021-03-10
Applicant: MITUTOYO CORPORATION
Inventor： Yuichiro YOKOYAMA
Abstract: A laser interference device includes a measurement laser that outputs a laser beam, a beam splitter that divides the laser beam into a measurement laser beam and a frequency monitor laser beam, a reference laser that outputs a reference laser beam, a frequency detector that detects a beat frequency resulting from interference between the reference laser beam and the frequency monitor laser beam, a wavelength calculator that calculates a wavelength of the frequency monitor laser beam (a wavelength measurement value) on the basis of the beat frequency, a light detector that detects an interference light of the measurement light and the reference light of the measurement laser beam and outputs a light detection signal, and a displacement calculator that calculates a displacement of the measurement mirror by performing an arithmetic process based on the wavelength measurement value and the light detection signal.
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公开(公告)号：US20210247176A1
公开(公告)日：2021-08-12
申请号：US17160992
申请日：2021-01-28
Applicant: MITUTOYO CORPORATION
Inventor： Yuichiro YOKOYAMA
Abstract: A laser interference device includes: a measurement mirror being movable in an X direction; a reference mirror disposed at a position different from a position of the measurement mirror in a Y direction; a beam splitter having a splitting surface that divides a laser beam into a measurement light and a reference light; a first light guide configured to guide the measurement light incident from the beam splitter and emit the measurement light toward the measurement mirror; and a second light guide configured to guide the reference light incident from the beam splitter and emit the reference light toward the reference mirror, in which a first distribution path formed by the first light guide and a second distribution path formed by the second light guide are mutually equal in a mechanical path length and an optical path length.
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5.发明申请公开(公告)号：US20190064090A1
公开(公告)日：2019-02-28
申请号：US16040946
申请日：2018-07-20
Applicant: MITUTOYO CORPORATION
Inventor： Yuichiro YOKOYAMA , Takeshi HAGINO
IPC: G01N25/16
Abstract: A coefficient-of-thermal-expansion measuring device includes temperature control device, optical interferometer, and control device including: an actual data acquiring unit sequentially changing an object's temperature and acquiring actual data measured by the optical interferometer at each temperature; a data set generating unit generating pieces of verification data by setting an order of interference of the actual data within a predetermined range, selecting one piece of verification data at each temperature, and generating data sets each containing the selected piece of verification data at each temperature; and a judging unit deriving approximation functions with different orders from each data set, determining an evaluation index value based on differences of verification data from each approximation function, selecting a candidate data set with the smallest evaluation index value for each approximation function, and determining whether the candidate data set is the same for each approximation function to judge applicability of the candidate data set.
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6.发明申请公开(公告)号：US20180180396A1
公开(公告)日：2018-06-28
申请号：US15827589
申请日：2017-11-30
Applicant: MITUTOYO CORPORATION
Inventor： Takeshi HAGINO , Yuichiro YOKOYAMA
CPC classification number: G01B5/0014 , G01B5/0009 , G01B5/008 , G01B5/28 , G01B7/34 , G01N25/16
Abstract: A step gauge and a reference gauge block are placed in a temperature-controlled chamber in parallel with each other. A temperature of the step gauge is changed to a first temperature and a second temperature using a measurement-target temperature adjuster and the temperature-controlled chamber. A distance between a first surface and a second surface of the step gauge is relatively measured at each of the first and second temperatures with reference to a distance between a first reference surface and a second reference surface of the reference gauge block. A coefficient of thermal expansion of the measurement target is calculated from the length of the measurement target at the first temperature and the length of the measurement target at the second temperature.
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公开(公告)号：US20170089683A1
公开(公告)日：2017-03-30
申请号：US15271593
申请日：2016-09-21
Applicant: MITUTOYO CORPORATION
Inventor： Yuichiro YOKOYAMA , Takeshi HAGINO , Yutaka KURIYAMA
IPC: G01B5/008
Abstract: A measurement target and a reference gauge are placed in parallel in an inside of a temperature-controlled chamber. After an interior temperature of the temperature-controlled chamber is set at a first temperature, a relative measurement of a length from a first surface to a second surface of the measurement target is performed with reference to a length from a first reference surface to a second reference surface of the reference gauge. Then, the interior temperature of the temperature-controlled chamber is set at a second temperature and a relative measurement of the length from the first surface to the second surface is similarly performed with reference to the length from the first reference surface to the second reference surface. A CTE of the measurement target is calculated based on the length of the measurement target at the first temperature and the length of the measurement target at the second temperature.
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