公开(公告)号：US20140118031A1

公开(公告)日：2014-05-01

申请号：US13663574

申请日：2012-10-30

Applicant: MKS INSTRUMENTS, INC.

Inventor： Amish RUGHOONUNDON ,  Larry J. FISK, II ,  Aaron T. RADOMSKI

IPC: H03K5/01

CPC classification number: H03K4/026 ,  H03K5/00006

Abstract: A radio frequency (RF) generation module includes a power control module that receives first and second desired amplitudes of an output of the RF generation module in first and second respective states, and that outputs, based on the first and second desired amplitudes, input power setpoints corresponding to a transition from the first state to the second state. A frequency control module receives the input power setpoints and outputs frequency setpoints corresponding to the input power setpoints. A pulse shaping module receives the input power setpoints, the frequency setpoints, and an indication of when to transition from the first state to the second state, and transitions the output of the RF generation module from the first state to the second state based on the input power setpoints, the frequency setpoints, and the indication.

Abstract translation: 射频（RF）生成模块包括功率控制模块，其在第一和第二相应状态下接收RF产生模块的输出的第一和第二期望幅度，并且基于第一和第二期望幅度输出输入功率 设定值对应于从第一状态到第二状态的转变。 频率控制模块接收输入功率设定点并输出与输入功率设定值对应的频率设定值。 脉冲整形模块接收输入功率设定点，频率设定点以及何时从第一状态转换到第二状态的指示，并且基于该第一状态将RF产生模块的输出从第一状态转换到第二状态 输入功率设定值，频率设定值和指示。

公开(公告)号：US20180330921A1

公开(公告)日：2018-11-15

申请号：US15974947

申请日：2018-05-09

Applicant: MKS Instruments, Inc.

Inventor： Aaron T. RADOMSKI ,  Ky LUU ,  Larry J. FISK, II ,  Ross REINHARDT ,  Matthew G. HARRINGTON ,  Amish RUGHOONUNDON ,  Jesse N. KLEIN ,  Aaron M. BURRY

IPC: H01J37/32 ,  H05H1/46 ,  H01L21/3065

Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.

公开(公告)号：US20140097908A1

公开(公告)日：2014-04-10

申请号：US13803170

申请日：2013-03-14

Applicant: MKS INSTRUMENTS, INC.

Inventor： Larry J. FISK, II ,  Amish RUGHOONUNDON

IPC: H03B5/12

CPC classification number: H03B5/1237 ,  H01J37/32082 ,  H01J37/32174 ,  H03F3/20 ,  H03K3/55

Abstract: A radio frequency generator includes a power control module, a frequency control module and a pulse generating module. The power control module is configured to generate a power signal indicating power levels for target states of a power amplifier. The frequency control module is configured to generate a frequency signal indicating frequencies for the target states of the power amplifier. The pulse generating module is configured to (i) supply an output signal to the power amplifier, (ii) recall at least one of a latest power level or a latest frequency for one of the target states of the power amplifier, and (iii) adjust a current power level and a current frequency of the output signal from a first state to a second state based on the power signal, the frequency signal, and at least one of the latest power level and the latest frequency of the power amplifier.

Abstract translation: 射频发生器包括功率控制模块，频率控制模块和脉冲发生模块。 功率控制模块被配置为产生指示功率放大器的目标状态的功率电平的功率信号。 频率控制模块被配置为产生指示功率放大器的目标状态的频率的频率信号。 脉冲发生模块被配置为（i）向功率放大器提供输出信号，（ii）回收功率放大器的目标状态之一的最新功率电平或最新频率中的至少一个，以及（iii） 基于功率信号，频率信号以及功率放大器的最新功率电平和最新频率中的至少一个，将输出信号的当前功率电平和当前频率从第一状态调整到第二状态。