公开(公告)号：US20170178879A1

公开(公告)日：2017-06-22

申请号：US15452896

申请日：2017-03-08

Applicant: MKS Instruments, Inc.

Inventor： Jesse N. KLEIN ,  David C. HALSTEAD ,  Michael R. GILBERT

IPC: H01J37/34 ,  C23C14/54 ,  H01J37/32

CPC classification number: H01J37/3476 ,  C23C14/54 ,  H01J37/32027 ,  H01J37/32055 ,  H01J37/32935 ,  H01J37/32944 ,  H01J37/34 ,  H01J37/3444 ,  H01J2237/0206

Abstract: A sputtering system that includes a sputtering chamber having a target material serving as a cathode, and an anode and a work piece. A direct current (DC) power supply supplies electrical power to the anode and the cathode sufficient to generate a plasma within the sputtering chamber. A detection module detects the occurrence of an arc in the sputtering chamber by monitoring an electrical characteristic of the plasma. In one embodiment the electrical characteristic monitored is the impedance of the plasma. In another embodiment the electrical characteristic is the conductance of the plasma.

公开(公告)号：US20180330921A1

公开(公告)日：2018-11-15

申请号：US15974947

申请日：2018-05-09

Applicant: MKS Instruments, Inc.

Inventor： Aaron T. RADOMSKI ,  Ky LUU ,  Larry J. FISK, II ,  Ross REINHARDT ,  Matthew G. HARRINGTON ,  Amish RUGHOONUNDON ,  Jesse N. KLEIN ,  Aaron M. BURRY

IPC: H01J37/32 ,  H05H1/46 ,  H01L21/3065

Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.

公开(公告)号：US20140062305A1

公开(公告)日：2014-03-06

申请号：US13826571

申请日：2013-03-14

Applicant: MKS INSTRUMENTS, INC.

Inventor： Jesse N. KLEIN ,  Richard PHAM

IPC: G01R31/00 ,  H01J37/32

CPC classification number: G01R31/00 ,  H01J37/32 ,  H01J37/32183 ,  H01J37/32935

Abstract: A system includes a control module, a detection module, and a reaction module. The control module is configured to receive a sensor signal indicating a power characteristic of an output power provided from a power generator to a load. The load is separate from the control module and the power generator. The detection module is configured to (i) detect a shift parameter of the power characteristic based on the sensor signal, (ii) compare the shift parameter to a first threshold, and (iii) indicate whether the shift parameter has exceeded the first threshold and not a second threshold. The reaction module is configured to indicate that a low-level abnormality exists in the load in response to the shift parameter exceeding the first threshold and not the second threshold.

Abstract translation: 系统包括控制模块，检测模块和反应模块。 控制模块被配置为接收指示从发电机提供给负载的输出功率的功率特性的传感器信号。 负载与控制模块和发电机分开。 检测模块被配置为（i）基于传感器信号检测功率特性的移位参数，（ii）将移位参数与第一阈值进行比较，以及（iii）指示移位参数是否超过第一阈值，以及 不是第二个门槛。 反应模块被配置为响应于超过第一阈值而不是第二阈值的移动参数来指示负载中存在低电平异常。