公开(公告)号：US20220310890A1

公开(公告)日：2022-09-29

申请号：US16967759

申请日：2019-02-11

Applicant: MSG LITHOGLAS GMBH

Inventor： Ulli HANSEN ,  Simon MAUS ,  Oliver GYENGE ,  Rachid ABDALLAH

IPC: H01L33/60 ,  H01L31/0203 ,  H01L33/48 ,  H01L31/0232 ,  H01S5/02255 ,  H01S5/02216 ,  H01S5/02345 ,  H01S5/0237

Abstract: Provided is a component arrangement, including a carrier substrates; a spacer which is arranged on the carrier substrate so as to surround an installation space and has an outlet opening on a side facing away from the carrier substrate; an optical component arranged in the installation space; a contact connection which electrically conductively connects the optical component to external contacts arranged outside the installation space; a cover substrate which is arranged on the spacer and with which the outlet opening is covered in a light-permeable manner; and a light-reflecting surface which is formed on an anisotropically etched silicon component and is arranged in the installation space as an inclined surface at an angle of approx. 45° relative to the surface of the carrier substrate facing the installation space, in such a way that light radiated in a horizontal direction onto the light-reflecting surface can be radiated out in the vertical direction through the opening and the cover substrate, and vice versa.