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公开(公告)号：US08415863B2
公开(公告)日：2013-04-09
申请号：US13460277
申请日：2012-04-30
CPC分类号： H03H9/1021 , H03H3/04 , H03H9/21 , Y10T29/42 , Y10T29/49005 , Y10T29/49155 , Y10T29/49574
摘要： A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.
摘要翻译： 振动片制造方法包括：（a）制备具有第一和第二表面的支撑体，所述第一和第二表面在朝向相反方向限定厚度的同时，所述支撑体包括基部和多个臂，所述臂延伸 在与基板的厚度方向正交的方向上并排配置，下电极膜设置在各臂的第一面上，压电膜设置在下电极膜上，至少一个上 电极膜设置在压电膜上，每个臂的第二表面的至少一部分是暴露区域; 和（b）蚀刻第二表面的暴露区域以便减小厚度以降低臂相对于厚度方向的抗弯刚度。
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公开(公告)号：US08405283B2
公开(公告)日：2013-03-26
申请号：US13534623
申请日：2012-06-27
申请人： Makoto Furuhata , Takashi Yamazaki , Yuji Hamayama
发明人： Makoto Furuhata , Takashi Yamazaki , Yuji Hamayama
IPC分类号： H01L41/04
CPC分类号： H03H9/215 , H03H9/02102 , H03H9/02133
摘要： A flexural vibration piece includes a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane. The flexural vibration piece also includes a heat conduction path, in the vicinity of the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region.
摘要翻译： 弯曲振动片包括弯曲振动器，其具有由于振动而产生压缩应力或拉伸应力的第一区域和当压缩应力作用在第一区域上时拉伸应力作用于其上的第二区域， 当拉伸应力作用在第一区域上时，施加压缩应力，并且在第一平面中进行弯曲振动。 弯曲振动片还包括在第一区域和第二区域附近的导热路径，该热传导路径由导热率高于弯曲振动器的导热率的材料形成，并且在第一区域和第二区域之间热连接 地区。
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公开(公告)号：US08288926B2
公开(公告)日：2012-10-16
申请号：US13331602
申请日：2011-12-20
申请人： Makoto Furuhata , Takashi Yamazaki
发明人： Makoto Furuhata , Takashi Yamazaki
IPC分类号： H03H9/19
CPC分类号： H03H9/215 , H03H9/0547 , H03H9/1021
摘要： A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on the one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface.
摘要翻译： 具有基部的谐振器; 和谐振臂，其进行弯曲振动，所述谐振臂部分具有两个主表面，设置在所述一个主表面上的第一凹槽，设置成在所述另一个主表面上与所述第一凹槽并置设置的第二凹槽，并置设置的第三凹槽 与第一槽相比设置在比另一主表面上的第一槽更靠近基部侧的第四槽和与第二槽并列设置的第四槽，并且设置在基体部分侧比主表面上的第二槽更靠近基部侧。 第一槽部分和第二槽部分的深度之和和第三和第四槽部分的深度之和大于一个主表面和另一个主表面之间的距离。
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公开(公告)号：US08102103B2
公开(公告)日：2012-01-24
申请号：US13083945
申请日：2011-04-11
申请人： Makoto Furuhata , Takashi Yamazaki
发明人： Makoto Furuhata , Takashi Yamazaki
IPC分类号： H03H9/19
CPC分类号： H03H9/215 , H03H9/0547 , H03H9/1021
摘要： A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on the one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface.
摘要翻译： 具有基部的谐振器; 和谐振臂，其进行弯曲振动，所述谐振臂部分具有两个主表面，设置在所述一个主表面上的第一凹槽，设置成在所述另一个主表面上与所述第一凹槽并置设置的第二凹槽，并置设置的第三凹槽 与第一槽相比设置在比另一个主表面上的第一槽更靠近基部侧的第四槽以及与第二槽并列设置的第四槽，并且设置在与主表面上的第二槽相比更靠近基部侧。 第一槽部分和第二槽部分的深度之和和第三和第四槽部分的深度之和大于一个主表面和另一个主表面之间的距离。
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公开(公告)号：US20110198969A1
公开(公告)日：2011-08-18
申请号：US13125000
申请日：2009-10-22
IPC分类号： H01L41/04 , H01L41/107
CPC分类号： H03H9/21 , H03H9/0547 , H03H9/1021 , H03H9/19 , H03H9/215
摘要： Deterioration of the Q value caused by the thermoelastic effect is suppressed. Since a first depth of a first groove and a second depth of a second groove are smaller than a distance between a surface including a third surface and a surface including a fourth surface, the first and second grooves do not penetrate between the surface including the third surface and the surface including the fourth surface. In addition, the sum of the first depth of the first groove and the second depth of the second groove is greater than the distance between the third and fourth surfaces, a heat transfer path between a first expandable portion (the first surface) and a second expandable portion (the second surface) cannot be formed as a straight line. As such, the heat transfer path between the first expandable portion (the first surface) and a second expandable portion (the second surface) is made to detour to the first and second grooves and and thus be lengthened.
摘要翻译： 抑制由热弹性效应引起的Q值的劣化。 由于第一凹槽的第一深度和第二凹槽的第二深度小于包括第三表面的表面和包括第四表面的表面之间的距离，所以第一和第二凹槽不会穿过包括第三凹槽 表面和包括第四表面的表面。 此外，第一凹槽的第一深度和第二凹槽的第二深度之和大于第三和第四表面之间的距离，第一可膨胀部分（第一表面）和第二凹槽之间的传热路径 可膨胀部分（第二表面）不能形成为直线。 因此，使第一可膨胀部分（第一表面）和第二可膨胀部分（第二表面）之间的传热路径绕第一和第二槽弯曲并因此被延长。
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公开(公告)号：US08766515B2
公开(公告)日：2014-07-01
申请号：US13125000
申请日：2009-10-22
IPC分类号： H03H9/21
CPC分类号： H03H9/21 , H03H9/0547 , H03H9/1021 , H03H9/19 , H03H9/215
摘要： Deterioration of the Q value caused by the thermoelastic effect is suppressed. Since a first depth of a first groove and a second depth of a second groove are smaller than a distance between a surface including a third surface and a surface including a fourth surface, the first and second grooves do not penetrate between the surface including the third surface and the surface including the fourth surface. In addition, the sum of the first depth of the first groove and the second depth of the second groove is greater than the distance between the third and fourth surfaces, a heat transfer path between a first expandable portion (the first surface) and a second expandable portion (the second surface) cannot be formed as a straight line. As such, the heat transfer path between the first expandable portion (the first surface) and a second expandable portion (the second surface) is made to detour to the first and second grooves and and thus be lengthened.
摘要翻译： 抑制由热弹性效应引起的Q值的劣化。 由于第一凹槽的第一深度和第二凹槽的第二深度小于包括第三表面的表面和包括第四表面的表面之间的距离，所以第一和第二凹槽不会穿过包括第三凹槽的表面 表面和包括第四表面的表面。 此外，第一凹槽的第一深度和第二凹槽的第二深度之和大于第三和第四表面之间的距离，第一可膨胀部分（第一表面）和第二凹槽之间的传热路径 可膨胀部分（第二表面）不能形成为直线。 因此，使第一可膨胀部分（第一表面）和第二可膨胀部分（第二表面）之间的传热路径绕第一和第二槽弯曲并因此被延长。
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公开(公告)号：US07944132B2
公开(公告)日：2011-05-17
申请号：US12892096
申请日：2010-09-28
申请人： Makoto Furuhata , Takashi Yamazaki
发明人： Makoto Furuhata , Takashi Yamazaki
CPC分类号： H03H9/215 , H03H9/0547 , H03H9/1021
摘要： A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface.
摘要翻译： 具有基部的谐振器; 以及谐振臂，其进行弯曲振动，所述谐振臂部分具有两个主表面，设置在一个主表面上的第一凹槽，与另一个主表面上的第一凹槽并置设置的第二凹槽，设置成与第一凹槽并排设置的第三凹槽， 所述第一槽比所述另一主面上的所述第一槽更靠近所述基部侧;以及第四槽，与所述第二槽并列设置，并且在所述主面上设置为比所述基部侧更靠近所述第二槽。 第一槽部分和第二槽部分的深度之和和第三和第四槽部分的深度之和大于一个主表面和另一个主表面之间的距离。
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公开(公告)号：US20090178260A1
公开(公告)日：2009-07-16
申请号：US12349201
申请日：2009-01-06
IPC分类号： H01L41/22
CPC分类号： H03H9/1021 , H03H3/04 , H03H9/21 , Y10T29/42 , Y10T29/49005 , Y10T29/49155 , Y10T29/49574
摘要： A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.
摘要翻译： 振动片制造方法包括：（a）制备具有第一和第二表面的支撑体，所述第一和第二表面在朝向相反方向限定厚度的同时，所述支撑体包括基部和多个臂，所述臂延伸 在与基板的厚度方向正交的方向上并排配置，下电极膜设置在各臂的第一面上，压电膜设置在下电极膜上，至少一个上 电极膜设置在压电膜上，每个臂的第二表面的至少一部分是暴露区域; 和（b）蚀刻第二表面的暴露区域以便减小厚度以降低臂相对于厚度方向的抗弯刚度。
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公开(公告)号：US08232707B2
公开(公告)日：2012-07-31
申请号：US12729481
申请日：2010-03-23
申请人： Makoto Furuhata , Takashi Yamazaki , Yuji Hamayama
发明人： Makoto Furuhata , Takashi Yamazaki , Yuji Hamayama
IPC分类号： H01L41/04
CPC分类号： H03H9/215 , H03H9/02102 , H03H9/02133
摘要： A flexural vibration piece includes a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane. The flexural vibration piece also includes a heat conduction path, in the vicinity of the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region.
摘要翻译： 弯曲振动片包括弯曲振动器，其具有由于振动而产生压缩应力或拉伸应力的第一区域和当压缩应力作用在第一区域上时拉伸应力作用于其上的第二区域， 当拉伸应力作用在第一区域上时，施加压缩应力，并且在第一平面中进行弯曲振动。 弯曲振动片还包括在第一区域和第二区域附近的导热路径，该热传导路径由导热率高于弯曲振动器的导热率的材料形成，并且在第一区域和第二区域之间热连接 地区。
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公开(公告)号：US08191216B2
公开(公告)日：2012-06-05
申请号：US12349201
申请日：2009-01-06
CPC分类号： H03H9/1021 , H03H3/04 , H03H9/21 , Y10T29/42 , Y10T29/49005 , Y10T29/49155 , Y10T29/49574
摘要： A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.
摘要翻译： 振动片制造方法包括：（a）制备具有第一和第二表面的支撑体，所述第一和第二表面在朝向相反方向限定厚度的同时，所述支撑体包括基部和多个臂，所述臂延伸 在与基板的厚度方向正交的方向上并排配置，下电极膜设置在各臂的第一面上，压电膜设置在下电极膜上，至少一个上 电极膜设置在压电膜上，每个臂的第二表面的至少一部分是暴露区域; 和（b）蚀刻第二表面的暴露区域以便减小厚度以降低臂相对于厚度方向的抗弯刚度。
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