公开(公告)号：US5942854A

公开(公告)日：1999-08-24

申请号：US90402

申请日：1998-06-04

申请人： Makoto Ryoji ,  Masakuni Tokai ,  Yukitaka Mori ,  Takeshi Hasegawa ,  Masahito Ban

发明人： Makoto Ryoji ,  Masakuni Tokai ,  Yukitaka Mori ,  Takeshi Hasegawa ,  Masahito Ban

IPC分类号： H05H1/46 ,  C23C14/32 ,  C23F4/00 ,  H01J27/20 ,  H01J37/32 ,  H01L21/203 ,  H01L21/205 ,  H01L21/302 ,  H05H1/24 ,  H01J27/02

CPC分类号： H01J37/32009 ,  H01J37/3233 ,  H01J37/32357

摘要： The present invention provides an electron-beam excited plasma generator which can effectively form samples of larger areas.The electron-beam excited plasma generator according to the present invention comprises a cathode (11) for emitting thermions; a discharge electrode (23) for gas discharge between the cathode and the same; an intermediate electrode (13) positioned coaxially with the discharge electrode in an axial direction; a discharge chamber (2) to be filled with discharge gas plasma generated by the gas discharge between the cathode and the discharge electrode; a plasma processing chamber (3) formed adjacent to the discharge chamber with a partition wall (21) disposed therebetween and positioned so that a surface-to-be-processed of a workpiece-to-be-processed (35) is positioned perpendicular to the axial direction; a plurality of orifices (22) for pulling out electrons in the discharge gas plasma in the discharge chamber into the plasma processing chamber, each being formed in the partition wall substantially perpendicular to the axial line and distributed radially with respect to the axial direction; and an accelerating electrode (31) disposed in the plasma processing chamber for pulling out and accelerating the electrons through the orifices.

摘要翻译： 本发明提供一种电子束激发等离子体发生器，能够有效地形成较大面积的样品。 根据本发明的电子束激发等离子体发生器包括用于发射热量的阴极（11） 用于在阴极与其之间进行气体放电的放电电极（23）; 与所述放电电极在轴向同轴配置的中间电极（13） 放电室（2），其被填充有由阴极和放电电极之间的气体放电产生的放电气体等离子体; 等离子体处理室（3），其与排放室相邻形成有分隔壁（21），其间设置有被处理工件（35）的待处理表面与垂直于 轴向; 多个用于将放电室中的放电气体等离子体中的电子抽出到等离子体处理室中的多个孔，每个孔分别形成在基本上垂直于轴线并且相对于轴向方向径向分布的分隔壁中; 以及设置在等离子体处理室中的加速电极（31），用于拉出和加速电子通过孔。

公开(公告)号：US5326981A

公开(公告)日：1994-07-05

申请号：US950661

申请日：1992-09-25

申请人： Tamio Hara ,  Manabu Hamagaki ,  Katsunobu Aoyagi ,  Takeshi Yamada ,  Makoto Ryoji ,  Masakuni Tokai ,  Yosuke Kajiyama

发明人： Tamio Hara ,  Manabu Hamagaki ,  Katsunobu Aoyagi ,  Takeshi Yamada ,  Makoto Ryoji ,  Masakuni Tokai ,  Yosuke Kajiyama

IPC分类号： H01J27/04 ,  H01J37/305 ,  H01J37/32 ,  H01J37/30

CPC分类号： H01J37/3266 ,  H01J27/04 ,  H01J37/305

摘要： In an electron beam excited ion irradiation apparatus which irradiates ions to a material, an electrical discharge changes an inert gas into a plasma. Electrons are drawn from this plasma and are made into electron beams. The electron beams are passed through an active gas to create ion. When the ion is irradiated to a material, electron components of the electron beams, which are irradiated vertically to a surface of the material are changed their irradiation direction. Control of the range of electron beam irradiation is performed by a magnetic filed formed so as to surround the ion beams.

摘要翻译： 在向材料照射离子的电子束激发离子照射装置中，放电将惰性气体变成等离子体。 电子从该等离子体中抽出并制成电子束。 电子束通过活性气体产生离子。 当离子被照射到材料时，垂直于材料表面照射的电子束的电子分量改变其照射方向。 电子束照射范围的控制是通过围绕离子束形成的磁场进行的。

公开(公告)号：US4467958A

公开(公告)日：1984-08-28

申请号：US422460

申请日：1982-09-23

申请人： Masao Yoshiwa ,  Yoshiro Hujioka ,  Masakuni Tokai ,  Mikio Muro

发明人： Masao Yoshiwa ,  Yoshiro Hujioka ,  Masakuni Tokai ,  Mikio Muro

IPC分类号： F24S90/00 ,  F24D11/02 ,  F24D19/10 ,  F25B15/00 ,  F25B27/00 ,  G05D23/19 ,  G05D23/00

CPC分类号： F24D11/0221 ,  F24D19/106 ,  G05D23/1924 ,  Y02B10/20 ,  Y02B10/70 ,  Y02B30/126

摘要： A solar heating system including a chemical heat pump for storing thermal energy by converting same into energy in the form of a difference in the concentration of an aqueous multiple-component chemical solution which actuates the chemical heat pump, and a solar collector of a low temperature solar collection type operative to collect excess thermal energy of the sun not used for heating and cooling purposes during the time intermediate the solar irradiance abundant season and the solar irradiance scarce season, or spring and autumn, and store same in the chemical heat pump as energy in the form of a difference in the concentration of an aqueous multiple-component chemical solution. Warm water obtained by heating water by the solar heat collector is supplied in the wintertime to the chemical heat pump as a low temperature heat source and control of flow of a working medium is effected depending on the amount of the solar energy collected in the wintertime, so as to thereby increase the efficiency with which the solar energy is utilized during the intermediate season and winter.

摘要翻译： 一种太阳能加热系统，包括化学热泵，其通过将致热化学热泵的水性多组分化学溶液的浓度差异转化为能量而存储热能;以及低温太阳能收集器 在太阳辐照丰富季节和太阳辐照度稀缺季节或春季和秋季之间的时间内，太阳能集热式操作用于收集太阳不被用于加热和冷却目的的过剩热能，并在化学热泵中储存相同的能量 以水溶液多组分化学溶液的浓度差的形式。 通过太阳能集热器加热水所获得的温水，作为低温热源在冬季供应给化学热泵，并根据冬季采集的太阳能量进行控制， 从而提高在中间季节和冬季使用太阳能的效率。