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公开(公告)号:US20120049370A1
公开(公告)日:2012-03-01
申请号:US13215463
申请日:2011-08-23
申请人: Makoto Wada , Yuichi Yamazaki , Masayuki Katagiri , Masayuki Kitamura , Atsuko Sakata , Akihiro Kajita , Tadashi Sakai , Naohsi Sakuma
发明人: Makoto Wada , Yuichi Yamazaki , Masayuki Katagiri , Masayuki Kitamura , Atsuko Sakata , Akihiro Kajita , Tadashi Sakai , Naohsi Sakuma
IPC分类号: H01L23/522 , H01L21/768 , B82Y99/00
CPC分类号: H01L23/53276 , B82Y10/00 , B82Y40/00 , H01L21/76831 , H01L21/76844 , H01L21/76846 , H01L21/76855 , H01L21/76858 , H01L21/76865 , H01L21/76876 , H01L21/76877 , H01L21/76879 , H01L23/5226 , H01L23/53223 , H01L23/53238 , H01L23/53266 , H01L23/53295 , H01L2221/1089 , H01L2221/1094 , H01L2924/0002 , H01L2924/00
摘要: According to one embodiment, a carbon nanotube interconnection includes a first conductive layer, an insulating film, a catalyst underlying film, a catalyst deactivation film, a catalyst film, and carbon nanotubes. An insulating film is formed on the first conductive layer and including a hole. An catalyst underlying film is formed on the first conductive layer on a bottom surface in the hole and on the insulating film on a side surface in the hole. A catalyst deactivation film is formed on the catalyst underlying film on the side surface in the hole. A catalyst film is formed on the catalyst underlying film on the bottom surface in the hole and the catalyst deactivation film on the side surface in the hole. Carbon nanotubes are formed in the hole, the carbon nanotubes including one end in contact with the catalyst film on the bottom surface in the hole.
摘要翻译: 根据一个实施例,碳纳米管互连包括第一导电层,绝缘膜,底层催化剂,催化剂失活膜,催化剂膜和碳纳米管。 绝缘膜形成在第一导电层上并包括孔。 在孔的底面上的第一导电层和孔的侧面的绝缘膜上形成催化剂底膜。 在孔中的侧表面上的催化剂底层上形成催化剂失活膜。 在孔的底面的催化剂底层和孔的侧面的催化剂失活膜上形成催化剂膜。 在孔中形成碳纳米管,碳纳米管包括与孔中底表面上的催化剂膜接触的一端。
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公开(公告)号:US08487449B2
公开(公告)日:2013-07-16
申请号:US13215463
申请日:2011-08-23
申请人: Makoto Wada , Yuichi Yamazaki , Masayuki Katagiri , Masayuki Kitamura , Atsuko Sakata , Akihiro Kajita , Tadashi Sakai , Naohsi Sakuma
发明人: Makoto Wada , Yuichi Yamazaki , Masayuki Katagiri , Masayuki Kitamura , Atsuko Sakata , Akihiro Kajita , Tadashi Sakai , Naohsi Sakuma
IPC分类号: H01L29/70 , H01L21/4763
CPC分类号: H01L23/53276 , B82Y10/00 , B82Y40/00 , H01L21/76831 , H01L21/76844 , H01L21/76846 , H01L21/76855 , H01L21/76858 , H01L21/76865 , H01L21/76876 , H01L21/76877 , H01L21/76879 , H01L23/5226 , H01L23/53223 , H01L23/53238 , H01L23/53266 , H01L23/53295 , H01L2221/1089 , H01L2221/1094 , H01L2924/0002 , H01L2924/00
摘要: According to one embodiment, a carbon nanotube interconnection includes a first conductive layer, an insulating film, a catalyst underlying film, a catalyst deactivation film, a catalyst film, and carbon nanotubes. An insulating film is formed on the first conductive layer and including a hole. An catalyst underlying film is formed on the first conductive layer on a bottom surface in the hole and on the insulating film on a side surface in the hole. A catalyst deactivation film is formed on the catalyst underlying film on the side surface in the hole. A catalyst film is formed on the catalyst underlying film on the bottom surface in the hole and the catalyst deactivation film on the side surface in the hole. Carbon nanotubes are formed in the hole, the carbon nanotubes including one end in contact with the catalyst film on the bottom surface in the hole.
摘要翻译: 根据一个实施例,碳纳米管互连包括第一导电层,绝缘膜,底层催化剂,催化剂失活膜,催化剂膜和碳纳米管。 绝缘膜形成在第一导电层上并包括孔。 在孔的底面上的第一导电层和孔的侧面的绝缘膜上形成催化剂底膜。 在孔中的侧表面上的催化剂底层上形成催化剂失活膜。 在孔的底面的催化剂底层和孔的侧面的催化剂失活膜上形成催化剂膜。 在孔中形成碳纳米管,碳纳米管包括与孔中底表面上的催化剂膜接触的一端。
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