公开(公告)号：US6007868A

公开(公告)日：1999-12-28

申请号：US151589

申请日：1993-11-12

申请人： Mareike Klee ,  Wolfgang Brand ,  Henricus A.M. Van Hal

发明人： Mareike Klee ,  Wolfgang Brand ,  Henricus A.M. Van Hal

IPC分类号： C23C18/12 ,  H01G7/06 ,  H01L21/28 ,  H01L21/314 ,  H01L21/316 ,  B05D5/12

CPC分类号： H01L21/31691 ,  C23C18/1216 ,  C23C18/1225 ,  C23C18/1245 ,  H01G7/06 ,  H01L21/28167

摘要： A method is described of manufacturing ferroelectric bismuth-titanate layers Bi.sub.4 Ti.sub.3 O.sub.12 on a substrate, A solution containing bismuth and titanium is provided, in a stoichiometric ratio, in the form of a metallo-organic or inorganic compound which is homogeneously mixed in an organic solvent, being brought into contact with the substrate and thermally treated at a temperature in the range from 500.degree. C. to 650.degree. C., thereby forming bismuth-titanate Bi.sub.4 Ti.sub.3 O.sub.12.

摘要翻译： 描述了在基板上制造铁电铋钛酸盐层Bi4Ti3O12的方法，以化学计量比的方式，以有机溶剂中均匀混合的金属有机或无机化合物的形式提供含有铋和钛的溶液， 与基板接触并在500℃至650℃的温度下热处理，由此形成钛酸铋Bi 4 Ti 3 O 12。