Antifuse with improved on-state reliability
    1.
    发明授权
    Antifuse with improved on-state reliability 失效
    具有改进的状态可靠性的防腐剂

    公开(公告)号:US6033938A

    公开(公告)日:2000-03-07

    申请号:US751193

    申请日:1996-11-15

    IPC分类号: H01L23/525 H01L21/82

    CPC分类号: H01L23/5252 H01L2924/0002

    摘要: Treatment of the positive electrode interface of an antifuse provides significantly improved on-state reliability. Treatments include, but are not limited to, a plasma etch using carbon tetrafluoride (CF.sub.4), a sputter clean using Argon, and wet chemical treatments using dimethyl formamide (and water) or a resist developer.

    摘要翻译: 反熔丝的正极接口的处理提供了显着改善的导通状态可靠性。 处理包括但不限于使用四氟化碳(CF4)的等离子体蚀刻,使用氩气的溅射清洁以及使用二甲基甲酰胺(和水)或抗蚀剂显影剂的湿化学处理。

    Multilayer amorphous silicon antifuse
    2.
    发明授权
    Multilayer amorphous silicon antifuse 失效
    多层非晶硅反熔丝

    公开(公告)号:US5726484A

    公开(公告)日:1998-03-10

    申请号:US611897

    申请日:1996-03-06

    摘要: Antifuses are provided which include first and second conductive layers and an antifuse layer positioned between the first and second conductive layers. The antifuse layer includes at least one oxide layer positioned between two amorphous silicon layers. Interconnect structures and programmable logic devices are also provided which include the antifuses.

    摘要翻译: 提供了包括第一和第二导电层以及位于第一和第二导电层之间的反熔丝层的防潮装置。 反熔丝层包括位于两个非晶硅层之间的至少一个氧化物层。 还提供了互连结构和可编程逻辑器件,其包括反熔丝。

    Method for over-etching to improve voltage distribution
    4.
    发明授权
    Method for over-etching to improve voltage distribution 失效
    用于过蚀刻以改善电压分布的方法

    公开(公告)号:US6057589A

    公开(公告)日:2000-05-02

    申请号:US61817

    申请日:1998-04-16

    摘要: An over-etched (OE) antifuse includes a lower electrode, an antifuse layer contacting the lower electrode by an over-etched via, and a second conductive layer formed on the antifuse layer. This over-etched via forms a trench in the lower electrode, wherein in one embodiment the depth of the trench approximates the thickness of the antifuse layer. The trench narrows the programming voltage distribution of the antifuses on the device, irrespective of topology. Because active circuits can be placed underneath the OE antifuses, the present invention dramatically reduces chip size in comparison to conventional devices.

    摘要翻译: 过蚀刻(OE)反熔丝包括下电极,通过过蚀刻通孔与下电极接触的反熔丝层,以及形成在反熔丝层上的第二导电层。 该过蚀刻通孔在下电极中形成沟槽,其中在一个实施例中,沟槽的深度接近反熔丝层的厚度。 沟槽缩小了设备上反熔文件的编程电压分布,而不考虑拓扑结构。 由于有源电路可以放置在OE反熔丝之下,因此与传统的器件相比,本发明显着地减小了芯片的尺寸。

    Method of forming multilayer amorphous silicon antifuse
    5.
    发明授权
    Method of forming multilayer amorphous silicon antifuse 失效
    形成多层非晶硅反熔丝的方法

    公开(公告)号:US5970372A

    公开(公告)日:1999-10-19

    申请号:US1022

    申请日:1997-12-30

    IPC分类号: H01L23/525 H01L29/00

    摘要: Antifuses are provided which include first and second conductive layers and an antifuse layer positioned between the first and second conductive layers. The antifuse layer includes at least one oxide layer positioned between two amorphous silicon layers. Interconnect structures and programmable logic devices are also provided which include the antifuses.

    摘要翻译: 提供了包括第一和第二导电层以及位于第一和第二导电层之间的反熔丝层的防潮装置。 反熔丝层包括位于两个非晶硅层之间的至少一个氧化物层。 还提供了互连结构和可编程逻辑器件,其包括反熔丝。

    Integrated circuit multiplexer including transistors of more than one oxide thickness
    8.
    发明授权
    Integrated circuit multiplexer including transistors of more than one oxide thickness 有权
    集成电路多路复用器包括多于一个氧化物厚度的晶体管

    公开(公告)号:US06768335B1

    公开(公告)日:2004-07-27

    申请号:US10354520

    申请日:2003-01-30

    IPC分类号: G06F738

    摘要: A multiplexer that can be used, for example, in a programmable logic device (PLD). The multiplexer includes a plurality of pass transistors passing a selected one of several input values to an internal node, which drives a buffer that provides the multiplexer output signal. The pass transistors can be controlled, for example, by values stored in memory cells of a PLD. The pass transistors have a first oxide thickness and are controlled by a value having a first operating voltage. The buffer includes transistors having a second and thinner oxide thickness, and is operated at a second and lower operating voltage. Where memory cells are used to control the pass transistors, the memory cells include transistors having the first oxide thickness and operate at the first operating voltage. Some embodiments also include transistors of varying gate length for each of the pass transistors, buffer transistors, and memory cell transistors.

    摘要翻译: 可以用于例如可编程逻辑器件(PLD)中的多路复用器。 多路复用器包括将多个输入值中选择的一个输入值传送到内部节点的多个传输晶体管,驱动提供多路复用器输出信号的缓冲器。 可以例如通过存储在PLD的存储器单元中的值来控制传输晶体管。 传输晶体管具有第一氧化物厚度并且由具有第一工作电压的值控制。 缓冲器包括具有第二和较薄氧化物厚度的晶体管,并且在第二和较低工作电压下操作。 在使用存储器单元来控制传输晶体管的情况下,存储单元包括具有第一氧化物厚度并在第一工作电压下工作的晶体管。 一些实施例还包括用于每个传输晶体管,缓冲晶体管和存储单元晶体管的栅极长度变化的晶体管。

    Non-volatile memory array using gate breakdown structures
    10.
    发明授权
    Non-volatile memory array using gate breakdown structures 有权
    使用门击穿结构的非易失性存储器阵列

    公开(公告)号:US06522582B1

    公开(公告)日:2003-02-18

    申请号:US09553571

    申请日:2000-04-19

    IPC分类号: G11C1400

    CPC分类号: G11C16/08

    摘要: Memory cell structures and related circuitry for use in non-volatile memory devices are described. The cell structures can be fabricated utilizing standard CMOS processes, e.g. sub 0.35 micron or sub 0.25 micron processes. Preferably, the cell structures can be fabricated using 0.18 micron or 0.15 micron standard CMOS processes. Advantageously, the cell structures can be programmed so that a conductive path is formed between like type materials. For example, in certain cell structures a cell is programmed by applying a programming voltage in such a way as to form a conductive path between a p-type gate and a p-type source/drain region or an n-type gate and an n-type source/drain region. Programming cells in this manner advantageously provides a programmed cell having a low, linear resistance after programming. In addition, novel charge pump circuits are provided that, in a preferred embodiment, are located “on chip” with an array of memory cells. These charge pump circuits are preferably fabricated utilizing the same standard CMOS processing techniques that were utilized to form the memory cell structures and related circuitry.

    摘要翻译: 描述了用于非易失性存储器件的存储单元结构和相关电路。 可以使用标准CMOS工艺制造电池结构,例如 次0.35微米或次级0.25微米工艺。 优选地,可以使用0.18微米或0.15微米标准CMOS工艺制造电池结构。 有利地,电池结构可以被编程,使得在相似类型的材料之间形成导电路径。 例如,在某些单元结构中,通过施加编程电压来编程单元,以便在p型栅极和p型源极/漏极区域或n型栅极和n型栅极之间形成导电路径 型源极/漏极区域。 以这种方式编程单元有利地在编程之后提供具有低线性电阻的编程单元。 此外,提供了新颖的电荷泵电路,在优选实施例中,它们以“存储器”阵列位于芯片上。 这些电荷泵电路优选地利用用于形成存储器单元结构和相关电路的相同的标准CMOS处理技术来制造。