公开(公告)号：US11885738B1

公开(公告)日：2024-01-30

申请号：US16873259

申请日：2020-03-09

申请人： Martin M. Liphardt ,  Galen L Pfeiffer ,  Ping He

发明人： Martin M. Liphardt ,  Galen L Pfeiffer ,  Ping He

IPC分类号： G01N21/21 ,  G01N21/55 ,  G01J3/28

CPC分类号： G01N21/211 ,  G01J3/2823 ,  G01N21/55 ,  G01N2021/215

摘要： An imaging system, and method of its use, for viewing a sample surface at an inclined angle, preferably in functional combination with a sample investigating reflectometer, spectrophotometer, ellipsometer or polarimeter system; wherein the imaging system provides that a sample surface and multi-element imaging detector surface are oriented with respect to one another to meet the Scheimpflug condition, and wherein a telecentric lens system is simultaneously positioned between the sample surface and the input surface of the multi-element imaging detector such that an image of the sample surface produced by said multi-element imaging detector is both substantially in focus over the extent thereof, and such that substantially no keystone error is demonstrated in said image.

公开(公告)号：US10444140B1

公开(公告)日：2019-10-15

申请号：US16501699

申请日：2019-05-23

申请人： Griffin A. P. Hovorka ,  Martin M. Liphardt ,  Galen L Pfeiffer

发明人： Griffin A. P. Hovorka ,  Martin M. Liphardt ,  Galen L Pfeiffer

IPC分类号： G01J3/42 ,  G01N21/01 ,  G01N21/55 ,  G01N21/21 ,  G01N21/31

摘要： A sample positioning system having two rotation elements with offset therebetween, to the second of which rotation elements is affixed a sample supporting stage. The rotation axes of the two rotation element are parallel, or substantially so. The sample positioning system finds application in the mapping of samples by Metrology systems such as Reflectometer, Spectrophotometer and Ellipsometer systems.