公开(公告)号：US08821974B2

公开(公告)日：2014-09-02

申请号：US13212716

申请日：2011-08-18

申请人： Masahiro Kimura ,  Tomonori Kojimaru ,  Tetsuya Emoto ,  Manabu Okutani ,  Masayuki Otsuji

发明人： Masahiro Kimura ,  Tomonori Kojimaru ,  Tetsuya Emoto ,  Manabu Okutani ,  Masayuki Otsuji

IPC分类号： C23C16/00 ,  B05D3/02

CPC分类号： H01L21/02057 ,  B08B3/08 ,  F26B1/00 ,  H01L21/02068 ,  H01L21/306 ,  H01L21/3105 ,  H01L21/321 ,  H01L21/67028 ,  H01L21/67051 ,  H01L21/6708 ,  H05K3/227

摘要： A liquid hydrophobizing agent is supplied to a substrate and a surface of the substrate is hydrophobized. A solvent, lower in surface tension than water and capable of dissolving the hydrophobizing agent, is supplied to the substrate in a pre-drying rinsing step. Thereafter, the substrate is dried. The substrate to be processed is maintained in a state of not contacting water until it is dried after being hydrophobized.

摘要翻译： 将液体疏水化剂供给至基材，将基材的表面疏水化。 在预干燥漂洗步骤中，向基材供给溶解于表面张力低于水并能够溶解疏水化剂的溶剂。 之后，干燥基板。 待处理的基材保持在不接触水的状态，直到其被疏水化后干燥。