公开(公告)号：US06480755B1

公开(公告)日：2002-11-12

申请号：US09357917

申请日：1999-07-21

申请人： Masaki Ootani ,  Ryuji Takechi ,  Yasuhiro Marume ,  Takamasa Inobe ,  Katuya Oota ,  Yasuhiro Satou

发明人： Masaki Ootani ,  Ryuji Takechi ,  Yasuhiro Marume ,  Takamasa Inobe ,  Katuya Oota ,  Yasuhiro Satou

IPC分类号： G06F1900

CPC分类号： G05B19/41865 ,  G05B2219/31456 ,  G05B2219/32297 ,  Y02P90/20 ,  Y02P90/28

摘要： A process control device includes: a change table detection unit to determine existence of a change table corresponding to a progress file; a progress file adjustment unit to change, when the change table detection unit determines that there exists a change table, the content of the progress file based on the change table; a unit to control a transport device of an item in process based on the progress file changed by the progress file adjustment unit; and a unit to control a manufacturing device of the item based on the progress file changed by the progress file adjustment unit. The manufacturing device control unit controls the manufacturing device based on the progress file that has been changed by the progress file adjustment unit, and thus, it is possible to change the processing orders, processing conditions and the like even when individual items are in respective manufacturing steps.

摘要翻译： 一种过程控制装置，包括：变更表检测单元，用于确定与进度文件相对应的变更表的存在; 进度文件调整单元，当所述更改表检测单元确定存在改变表时，基于所述改变表来改变所述进度文件的内容; 基于由进度文件调整单元改变的进度文件来控制正在处理的物品的运送装置的单元; 以及基于由进度文件调整单元改变的进度文件来控制物品的制造装置的单元。 制造装置控制单元基于由进度文件调整单元改变的进度文件来控制制造装置，因此即使各个制品在各个制造中也可以改变处理顺序，处理条件等 脚步。

公开(公告)号：US06397119B1

公开(公告)日：2002-05-28

申请号：US09354094

申请日：1999-07-15

申请人： Yasuhiro Marume ,  Ryuji Takechi ,  Masaki Ootani ,  Takamasa Inobe ,  Katuya Oota ,  Yasuhiro Satou

发明人： Yasuhiro Marume ,  Ryuji Takechi ,  Masaki Ootani ,  Takamasa Inobe ,  Katuya Oota ,  Yasuhiro Satou

IPC分类号： G06F1900

CPC分类号： G05B19/41865 ,  G05B2219/31428 ,  G05B2219/45031 ,  Y02P90/04 ,  Y02P90/14 ,  Y02P90/20

摘要： A semiconductor manufacturing system having a high processing efficiency and a high product output includes a processing device for simultaneously processing a prescribed number of lots for which it is reserved, and a semiconductor manufacturing system control device connected to the processing device for managing the manufacturing steps. The semiconductor manufacturing system control device includes a lot processing step managing portion for managing the processing steps of the lots and determining whether the lots have arrived at the step of being processed by the processing device; a lot securing portion, connected to the lot processing step managing portion, for selecting, when the lots have arrived at the step of being processed by the processing device, a prescribed number of lots to be processed by the processing device under the same processing condition as the lots, instructing an operator to secure the prescribed number of lots selected, and determining whether the prescribed number of lots are secured; and a lot reservation portion connected to the lot securing portion and the processing device for reserving the processing device for the processing of the prescribed number of lots secured when the prescribed number of lots are secured. The processing device includes a portion connected to the semiconductor manufacturing system control device for processing the prescribed number of lots for which it is reserved.

摘要翻译： 具有高处理效率和高产品输出的半导体制造系统包括用于同时处理预定数量的批次的处理装置和连接到处理装置的用于管理制造步骤的半导体制造系统控制装置。 半导体制造系统控制装置包括批处理步骤管理部分，用于管理批次的处理步骤，并且确定批次是否到达处理装置处理的步骤; 连接到批处理步骤管理部分的许多固定部分，用于当批次到达处理装置处理的步骤时，选择在相同处理条件下由处理装置处理的规定数量的批次 作为批次，指示操作者确保所选择的规定数量的批次，并且确定规定的批次数量是否被保证; 以及连接到批次固定部分的许多预留部分和用于在确保规定的批次数时确保的预定数量的批次的处理的预留处理装置。 处理装置包括连接到半导体制造系统控制装置的部分，用于处理预定数量的批号。

公开(公告)号：US06463348B1

公开(公告)日：2002-10-08

申请号：US09354576

申请日：1999-07-16

申请人： Ryuji Takechi ,  Yasuhiro Marume ,  Masaki Ootani ,  Takamasa Inobe ,  Katuya Oota ,  Yasuhiro Satou

发明人： Ryuji Takechi ,  Yasuhiro Marume ,  Masaki Ootani ,  Takamasa Inobe ,  Katuya Oota ,  Yasuhiro Satou

IPC分类号： G06F1900

CPC分类号： G06Q10/06 ,  Y02P90/28

摘要： A process control device for controlling a processing device and a transport apparatus while updating process information of a lot includes: a control information update unit to update control information for controlling the processing device and the transport apparatus; a work-in-process information update unit to update the work-in-process information indicating a location of a lot; a processing device control unit to control the processing device according to the control information updated by the control information update unit and the work-in-process information updated by the work-in-process information updated unit; and a transport apparatus control unit to control the transport apparatus according to the control information updated by the control information update unit and the work-in-process information updated by the work-in-process information update unit. The control information update unit deletes, when trouble occurs, the control information of a lot that is in process at a location where the trouble occurred. Thus, it is possible to release the lot from control of the process control device, and to prevent control of other lots from being restricted.

摘要翻译： 一种用于在更新批次的处理信息的同时控制处理装置和传送装置的处理控制装置包括：控制信息更新单元，用于更新用于控制处理装置和传送装置的控制信息; 一个在制品信息更新单元，用于更新指示批次的位置的在制品信息; 处理装置控制单元，用于根据由控制信息更新单元更新的控制信息和由在制品信息更新单元更新的在制品信息来控制处理装置; 以及传送装置控制单元，用于根据由控制信息更新单元更新的控制信息和由在制品信息更新单元更新的在制品信息来控制传送装置。 当发生故障时，控制信息更新单元删除在发生故障的位置处的批次的控制信息。 因此，可以从处理控制装置的控制中释放批次，并且防止对其他批次的控制受到限制。

公开(公告)号：US06823229B2

公开(公告)日：2004-11-23

申请号：US10131252

申请日：2002-04-25

申请人： Masaki Ootani ,  Yasuhiro Sato ,  Takamasa Inobe ,  Yasuhiro Marume ,  Toshiyuki Watanabe

发明人： Masaki Ootani ,  Yasuhiro Sato ,  Takamasa Inobe ,  Yasuhiro Marume ,  Toshiyuki Watanabe

IPC分类号： G06F1900

CPC分类号： H01L21/67276

摘要： The substrate carrier management system includes a pre-diffusion processing apparatus, a carrier cleaner, and a carrier conveyer. The pre-diffusion processing apparatus unloads a substrate from a supplied carrier in which the substrate is stored, performs predetermined processing on the substrate, and transfers the processed substrate stored in a carrier to be used after processing. The carrier cleaner cleans a carrier emptied as a result of taking a substrate out of the carrier. The carrier conveyer conveys a carrier between the pre-diffusion processing apparatus and the carrier cleaner. The empty carrier unloaded from the pre-diffusion processing apparatus is cleaned by the carrier cleaner, and the processed substrate is stored in the empty carrier. With this arrangement, it is possible to automatically change carriers and thereby continuously use a cleaned carrier in the subsequent step without using a dedicated carrier.

摘要翻译： 衬底载体管理系统包括预扩散处理装置，载体清洁器和载体输送器。 预扩散处理装置从其中存储有基板的供应载体卸载基板，对基板执行预定处理，并且将处理后的待使用的载体进行转印。 载体清洁剂清洁由于将基板从载体中取出而导致的载体排空。 载体输送机在预扩散处理装置和载体清洁器之间传送载体。 从预扩散处理装置卸载的空载体被载体清洁器清洁，并且处理的基板被存储在空载体中。 利用这种布置，可以自动地改变载体，从而在不使用专用载体的情况下，在后续步骤中连续地使用清洁的载体。