专利检索 ap:("Masaki SHIMA" OR "Yoshinori WAKAMIYA" OR "Shuji OSONO" OR "Satohiro OKAYAMA" OR "Hideyuki OGATA") AND inv:"Hideyuki OGATA" 第 1 页

1.

发明申请
CATALYTIC CVD EQUIPMENT, METHOD FOR FORMATION OF FILM, PROCESS FOR PRODUCTION OF SOLAR CELL, AND SUBSTRATE HOLDER 有权
标题翻译：催化CVD设备，薄膜形成方法，太阳能电池生产工艺和基板保持器

公开(公告)号：US20120190149A1

公开(公告)日：2012-07-26

申请号：US13435646

申请日：2012-03-30

申请人： Masaki SHIMA , Yoshinori WAKAMIYA , Shuji OSONO , Satohiro OKAYAMA , Hideyuki OGATA

发明人： Masaki SHIMA , Yoshinori WAKAMIYA , Shuji OSONO , Satohiro OKAYAMA , Hideyuki OGATA

IPC分类号： H01L31/0216 , C23C16/458

CPC分类号： C23C16/44 , C23C16/24 , C23C16/325 , C23C16/345 , C23C16/4404 , C23C16/481 , H01L21/68757

摘要： In a catalytic CVD equipment, a holder includes an antireflective structure for preventing reflection of a radiant ray that is ejected from the catalytic wire toward the side of the substrate.

摘要翻译： 在催化CVD设备中，保持器包括防反射结构，用于防止从催化丝向衬底侧喷射的辐射线的反射。

2.

发明申请
CATALYTIC CVD EQUIPMENT, METHOD FOR FORMATION OF FILM, AND PROCESS FOR PRODUCTION OF SOLAR CELL 审中-公开
标题翻译：催化CVD设备，薄膜形成方法和太阳能电池生产工艺

公开(公告)号：US20120190176A1

公开(公告)日：2012-07-26

申请号：US13436202

申请日：2012-03-30

申请人： Motohide KAI , Shuji OSONO , Satohiro OKAYAMA , Hideyuki OGATA

发明人： Motohide KAI , Shuji OSONO , Satohiro OKAYAMA , Hideyuki OGATA

IPC分类号： H01L21/20 , C23C16/52

CPC分类号： C23C16/4488 , C23C16/24 , C23C16/44 , H01L21/02422 , H01L21/02532 , H01L21/02592

摘要： In a catalytic CVD equipment, the control unit controls a temperature of the catalytic wires to a standby temperature at predetermined time intervals before and after the film is formed. The standby time is a predetermined temperature which is lower than the temperature of the catalytic wires when the film is formed, and is higher than room temperature.

摘要翻译： 在催化CVD设备中，控制单元在形成膜之前和之后以预定的时间间隔将催化丝的温度控制在待机温度。待机时间是比形成膜时的催化丝的温度低的规定温度，高于室温。