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1.发明授权Optical displacement detection mechanism and surface information measurement device using the same 有权光学位移检测机构和表面信息测量装置使用相同公开(公告)号：US07973942B2
公开(公告)日：2011-07-05
申请号：US11841445
申请日：2007-08-20
CPC分类号： G01B11/024 , G01Q20/02
摘要： There is provided an optical displacement detection mechanism in which, even if a measurement object changes, a detection sensitivity and a ratio of a noise are adjustable without depending on optical characteristics such as reflectivity, or a shape and mechanical characteristics of a measurement object, an influence of a thermal deformation of the measurement object by an irradiated light to the measurement object can be made small, and a measurement accuracy can be ensured under optimum conditions. In an optical displacement detection mechanism comprising a light source irradiating a light to a cantilever becoming the measurement object, a light source drive circuit driving the light source, a photodetector receiving the light after irradiated to the cantilever from the light source to thereby detect an intensity of the light, and an amplifier amplifying a detection signal of the photodetector at a predetermined amplification rate, there is made such that, by providing a light intensity regulator and an amplification rate regulator, an irradiated light intensity to the cantilever and an amplification rate of the photodetector can be made variable.
摘要翻译： 提供了一种光学位移检测机构，其中即使测量对象改变，检测灵敏度和噪声比可以调节，而不依赖于诸如反射率的光学特性或测量对象的形状和机械特性， 可以使通过照射光将测量对象的热变形对测量对象的影响减小，并且可以在最佳条件下确保测量精度。 在包括将光照射到作为测量对象的悬臂的光源的光学位移检测机构中，驱动光源的光源驱动电路，从光源照射到悬臂的光接收器，其接收光，从而检测强度 以及以预定的放大率放大光检测器的检测信号的放大器，通过提供光强度调节器和放大率调节器，对悬臂的照射光强度和放大率 可以使光电检测器变得可变。
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2.发明申请公开(公告)号：US20080049223A1
公开(公告)日：2008-02-28
申请号：US11840549
申请日：2007-08-17
CPC分类号： G01Q20/02
摘要： The optical displacement-detecting mechanism has: a light source for irradiating a target for measurement with light; a light source-driving circuit for driving the light source; an optical detector made from a semiconductor for receiving light after the irradiation of the target for measurement by the light source and converting the light into an electric signal thereby to detect an intensity of light; and an amplifier including a current-voltage conversion circuit for performing current-to-voltage conversion on a detection signal of the optical detector with a predetermined amplification factor. In the optical displacement-detecting mechanism, a light source having a spectrum half width of 10 nm or larger is used, whereby the light source can be driven with an output power of 2 mW or larger without generating mode hop noise and optical feedback noise.
摘要翻译： 光学位移检测机构具有：用光照射被测物的光源; 用于驱动光源的光源驱动电路; 由半导体制成的光检测器，用于在由光源照射测量目标物之后接收光，并将光转换成电信号从而检测光的强度; 以及放大器，其包括用于以预定的放大系数对光学检测器的检测信号进行电流 - 电压转换的电流 - 电压转换电路。 在光学位移检测机构中，使用光谱半宽度为10nm以上的光源，由此可以以2mW以上的输出功率驱动光源，而不产生模式跳噪声和光反馈噪声。
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3.发明授权公开(公告)号：US07787133B2
公开(公告)日：2010-08-31
申请号：US11840549
申请日：2007-08-17
IPC分类号： G01B11/14
CPC分类号： G01Q20/02
摘要： The optical displacement-detecting mechanism has: a light source for irradiating a target for measurement with light; a light source-driving circuit for driving the light source; an optical detector made from a semiconductor for receiving light after the irradiation of the target for measurement by the light source and converting the light into an electric signal thereby to detect an intensity of light; and an amplifier including a current-voltage conversion circuit for performing current-to-voltage conversion on a detection signal of the optical detector with a predetermined amplification factor. In the optical displacement-detecting mechanism, a light source having a spectrum half width of 10 nm or larger is used, whereby the light source can be driven with an output power of 2 mW or larger without generating mode hop noise and optical feedback noise.
摘要翻译： 光学位移检测机构具有：用光照射被测物的光源; 用于驱动光源的光源驱动电路; 由半导体制成的光检测器，用于在由光源照射测量目标物之后接收光，并将光转换成电信号从而检测光的强度; 以及放大器，其包括用于以预定的放大系数对光学检测器的检测信号进行电流 - 电压转换的电流 - 电压转换电路。 在光学位移检测机构中，使用光谱半宽度为10nm以上的光源，由此可以以2mW以上的输出功率驱动光源，而不产生模式跳噪声和光反馈噪声。
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4.发明申请公开(公告)号：US20080049236A1
公开(公告)日：2008-02-28
申请号：US11841445
申请日：2007-08-20
IPC分类号： G01B11/14
CPC分类号： G01B11/024 , G01Q20/02
摘要： There is provided an optical displacement detection mechanism in which, even if a measurement object changes, a detection sensitivity and a ratio of a noise are adjustable without depending on optical characteristics such as reflectivity, or a shape and mechanical characteristics of a measurement object, an influence of a thermal deformation of the measurement object by an irradiated light to the measurement object can be made small, and a measurement accuracy can be ensured under optimum conditions. In an optical displacement detection mechanism comprising a light source irradiating a light to a cantilever becoming the measurement object, a light source drive circuit driving the light source, a photodetector receiving the light after irradiated to the cantilever from the light source to thereby detect an intensity of the light, and an amplifier amplifying a detection signal of the photodetector at a predetermined amplification rate, there is made such that, by providing a light intensity regulator and an amplification rate regulator, an irradiated light intensity to the cantilever and an amplification rate of the photodetector can be made variable.
摘要翻译： 提供了一种光学位移检测机构，其中即使测量对象改变，检测灵敏度和噪声比可以调节，而不依赖于诸如反射率的光学特性或测量对象的形状和机械特性， 可以使通过照射光将测量对象的热变形对测量对象的影响减小，并且可以在最佳条件下确保测量精度。 在包括将光照射到作为测量对象的悬臂的光源的光学位移检测机构中，驱动光源的光源驱动电路，从光源照射到悬臂的光接收器，其接收光，从而检测强度 以及以预定的放大率放大光检测器的检测信号的放大器，通过提供光强度调节器和放大率调节器，对悬臂的照射光强度和放大率 可以使光电检测器变得可变。
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5.发明授权Scanning probe microscope displacement detecting mechanism and scanning probe microscope using same 有权扫描探针显微镜位移检测机构和扫描探针显微镜使用相同公开(公告)号：US07614287B2
公开(公告)日：2009-11-10
申请号：US11842722
申请日：2007-08-21
申请人： Masato Iyoki , Hiroyoshi Yamamoto
发明人： Masato Iyoki , Hiroyoshi Yamamoto
IPC分类号： G01B5/28
摘要： A displacement detection mechanism for a scanning probe microscope capable of performing measurement quickly with high precision even if an objective lens or an illumination system is arranged above or below a sample or a cantilever, and a scanning probe microscope comprising it. The displacement detection mechanism (112) for a scanning probe microscope comprising a supporting section (22) for supporting a cantilever (20), a light source (114) for irradiating a reflective surface (14) with light, and a light receiving section (121) for receiving light reflected off the reflective surface (14), and detecting displacement of the cantilever (20) based on the light receiving position of the light receiving section (121), wherein the rear end of the cantilever (20) is secured to the supporting section (22), and the above light is allowed to impinge on the reflective surface (14), while inclining toward the X axis and Y axis, from above regions B and C on the distal end side of the cantilever (20) out of regions A, B, C and D sectioned, when viewed from the above, by the Y axis extending in the longitudinal direction of the cantilever (20) and the X axis passing through the reflective surface (14) and extending in the direction intersecting the Y axis perpendicularly.
摘要翻译： 即使将物镜或照明系统配置在样本或悬臂的上方或下方，也可以以高精度快速进行测量的扫描探针显微镜以及包括该扫描探针显微镜的扫描探针显微镜。 一种用于扫描探针显微镜的位移检测机构（112），包括用于支撑悬臂（20）的支撑部分（22），用于用光照射反射表面（14）的光源（114）和光接收部分 121），用于接收从所述反射表面（14）反射的光，以及基于所述光接收部分（121）的光接收位置检测所述悬臂（20）的位移，其中所述悬臂（20）的后端被固定 到所述支撑部分（22），并且当所述悬臂（20）的远端侧上方的区域B和C向X轴和Y轴倾斜时，允许上述光照射在所述反射表面（14）上 ）在从上方观察的区域A，B，C和D中，通过沿悬臂（20）的纵向方向延伸的Y轴和穿过反射表面（14）的X轴延伸并在 方向垂直于Y轴 。
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6.发明授权Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever 有权悬臂，悬臂系统，扫描探针显微镜，质量传感器装置，粘弹性测量仪器，操纵装置，悬臂位移测定方法，悬臂振动方法及悬臂变形方法公开(公告)号：US08214915B2
公开(公告)日：2012-07-03
申请号：US12455556
申请日：2009-06-03
IPC分类号： G01Q20/00
CPC分类号： G01Q70/14 , G01G3/12 , G01G9/00 , G01Q10/045 , G01Q60/32
摘要： Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.
摘要翻译： 本发明提供一种能够以活跃的方式自身弯曲和变形的悬臂。 悬臂包括：杠杆部分，其具有由主体部分支撑的近端; 以及形成在悬臂中并在施加电压时产生热量的电阻器构件，从而通过由于热量的热膨胀而使杆部变形。
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7.发明申请Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever 有权悬臂，悬臂系统，扫描探针显微镜，质量传感器装置，粘弹性测量仪器，操纵装置，悬臂位移测定方法，悬臂振动方法及悬臂变形方法公开(公告)号：US20100107284A1
公开(公告)日：2010-04-29
申请号：US12455556
申请日：2009-06-03
CPC分类号： G01Q70/14 , G01G3/12 , G01G9/00 , G01Q10/045 , G01Q60/32
摘要： Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.
摘要翻译： 本发明提供一种能够以活跃的方式自身弯曲和变形的悬臂。 悬臂包括：杠杆部分，其具有由主体部分支撑的近端; 以及形成在悬臂中并在施加电压时产生热量的电阻器构件，从而通过由于热量的热膨胀而使杆部变形。
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公开(公告)号：US20050231066A1
公开(公告)日：2005-10-20
申请号：US11045916
申请日：2005-01-28
申请人： Masato Iyoki , Akihiko Hidaka , Kazutoshi Watanabe
发明人： Masato Iyoki , Akihiko Hidaka , Kazutoshi Watanabe
IPC分类号： G01B7/16 , G01B7/34 , G01B21/30 , G01L1/22 , G01N37/00 , G01Q10/00 , G01Q10/04 , H01L41/04 , H01L41/09
CPC分类号： G01Q10/04 , Y10S977/872
摘要： The invention provides a fine-adjustment mechanism for a scanning probe microscopy with high rigidity and high degree of measurement accuracy wherein a strain gauge displacement sensor which can be installed in a small space is arranged so that temperature compensation is achieved. The fine-adjustment mechanism composed of a piezoelectric device is provided with at least two-piece electrode. One of the electrodes is configured as a dummy electrode, to which no voltage is applied, and the other electrode is configured as an active electrode which generates strain when voltage is applied. One or two resistors are provided on each of the active electrode and dummy electrode, and a bridge circuit is configured by the resistors.
摘要翻译： 本发明提供了一种用于具有高刚性和高测量精度的扫描探针显微镜的精细调节机构，其中可以安装在小空间中的应变片位移传感器被布置成实现温度补偿。 由压电元件构成的微调机构具有至少两片电极。 其中一个电极被配置为没有施加电压的虚拟电极，另一个电极被配置为当施加电压时产生应变的有源电极。 有源电极和虚拟电极均设置有一个或两个电阻器，桥接电路由电阻器构成。
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公开(公告)号：US07288762B2
公开(公告)日：2007-10-30
申请号：US11045916
申请日：2005-01-28
申请人： Masato Iyoki , Akihiko Hidaka , Kazutoshi Watanabe
发明人： Masato Iyoki , Akihiko Hidaka , Kazutoshi Watanabe
IPC分类号： H01L41/04
CPC分类号： G01Q10/04 , Y10S977/872
摘要： The invention provides a fine-adjustment mechanism for a scanning probe microscopy with high rigidity and high degree of measurement accuracy wherein a strain gauge displacement sensor which can be installed in a small space is arranged so that temperature compensation is achieved. The fine-adjustment mechanism composed of a piezoelectric device is provided with at least two-piece electrode. One of the electrodes is configured as a dummy electrode, to which no voltage is applied, and the other electrode is configured as an active electrode which generates strain when voltage is applied. One or two resistors are provided on each of the active electrode and dummy electrode, and a bridge circuit is configured by the resistors.
摘要翻译： 本发明提供了一种用于具有高刚性和高测量精度的扫描探针显微镜的精细调节机构，其中可以安装在小空间中的应变片位移传感器被布置成实现温度补偿。 由压电元件构成的微调机构具有至少两片电极。 其中一个电极被配置为没有施加电压的虚拟电极，另一个电极被配置为当施加电压时产生应变的有源电极。 有源电极和虚拟电极均设置有一个或两个电阻器，桥接电路由电阻器构成。
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10.发明申请SCANNING PROBE MICROSCOPE DISPLACEMENT DETECTING MECHANISM AND SCANNING PROBE MICROSCOPE USING SAME 有权扫描探针显微镜位移检测机构和扫描探针显微镜公开(公告)号：US20080048115A1
公开(公告)日：2008-02-28
申请号：US11842722
申请日：2007-08-21
申请人： Masato Iyoki , Hiroyoshi Yamamoto
发明人： Masato Iyoki , Hiroyoshi Yamamoto
摘要： A displacement detection mechanism for a scanning probe microscope capable of performing measurement quickly with high precision even if an objective lens or an illumination system is arranged above or below a sample or a cantilever, and a scanning probe microscope comprising it. The displacement detection mechanism (112) for a scanning probe microscope comprising a supporting section (22) for supporting a cantilever (20), a light source (114) for irradiating a reflective surface (14) with light, and a light receiving section (121) for receiving light reflected off the reflective surface (14), and detecting displacement of the cantilever (20) based on the light receiving position of the light receiving section (121), wherein the rear end of the cantilever (20) is secured to the supporting section (22), and the above light is allowed to impinge on the reflective surface (14), while inclining toward the X axis and Y axis, from above regions B and C on the distal end side of the cantilever (20) out of regions A, B, C and D sectioned, when viewed from the above, by the Y axis extending in the longitudinal direction of the cantilever (20) and the X axis passing through the reflective surface (14) and extending in the direction intersecting the Y axis perpendicularly.
摘要翻译： 即使将物镜或照明系统配置在样本或悬臂的上方或下方，也可以以高精度快速进行测量的扫描探针显微镜以及包括该扫描探针显微镜的扫描探针显微镜。 一种用于扫描探针显微镜的位移检测机构（112），包括用于支撑悬臂（20）的支撑部分（22），用于用光照射反射表面（14）的光源（114）和光接收部分 121），用于接收从所述反射表面（14）反射的光，以及基于所述光接收部分（121）的光接收位置检测所述悬臂（20）的位移，其中所述悬臂（20）的后端被固定 到所述支撑部分（22），并且当所述悬臂（20）的远端侧上方的区域B和C向X轴和Y轴倾斜时，允许上述光照射在所述反射表面（14）上 ）在从上方观察的区域A，B，C和D中，通过沿悬臂（20）的纵向方向延伸的Y轴和穿过反射表面（14）的X轴延伸并在 方向相交 垂直于Y轴。
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