Optical displacement detection mechanism and surface information measurement device using the same
    1.
    发明授权
    Optical displacement detection mechanism and surface information measurement device using the same 有权
    光学位移检测机构和表面信息测量装置使用相同

    公开(公告)号:US07973942B2

    公开(公告)日:2011-07-05

    申请号:US11841445

    申请日:2007-08-20

    CPC分类号: G01B11/024 G01Q20/02

    摘要: There is provided an optical displacement detection mechanism in which, even if a measurement object changes, a detection sensitivity and a ratio of a noise are adjustable without depending on optical characteristics such as reflectivity, or a shape and mechanical characteristics of a measurement object, an influence of a thermal deformation of the measurement object by an irradiated light to the measurement object can be made small, and a measurement accuracy can be ensured under optimum conditions. In an optical displacement detection mechanism comprising a light source irradiating a light to a cantilever becoming the measurement object, a light source drive circuit driving the light source, a photodetector receiving the light after irradiated to the cantilever from the light source to thereby detect an intensity of the light, and an amplifier amplifying a detection signal of the photodetector at a predetermined amplification rate, there is made such that, by providing a light intensity regulator and an amplification rate regulator, an irradiated light intensity to the cantilever and an amplification rate of the photodetector can be made variable.

    摘要翻译: 提供了一种光学位移检测机构,其中即使测量对象改变,检测灵敏度和噪声比可以调节,而不依赖于诸如反射率的光学特性或测量对象的形状和机械特性, 可以使通过照射光将测量对象的热变形对测量对象的影响减小,并且可以在最佳条件下确保测量精度。 在包括将光照射到作为测量对象的悬臂的光源的光学位移检测机构中,驱动光源的光源驱动电路,从光源照射到悬臂的光接收器,其接收光,从而检测强度 以及以预定的放大率放大光检测器的检测信号的放大器,通过提供光强度调节器和放大率调节器,对悬臂的照射光强度和放大率 可以使光电检测器变得可变。

    Optical Displacement Detection Mechanism and Surface Information Measurement Device Using the Same
    2.
    发明申请
    Optical Displacement Detection Mechanism and Surface Information Measurement Device Using the Same 有权
    光学位移检测机构及其表面信息测量装置

    公开(公告)号:US20080049236A1

    公开(公告)日:2008-02-28

    申请号:US11841445

    申请日:2007-08-20

    IPC分类号: G01B11/14

    CPC分类号: G01B11/024 G01Q20/02

    摘要: There is provided an optical displacement detection mechanism in which, even if a measurement object changes, a detection sensitivity and a ratio of a noise are adjustable without depending on optical characteristics such as reflectivity, or a shape and mechanical characteristics of a measurement object, an influence of a thermal deformation of the measurement object by an irradiated light to the measurement object can be made small, and a measurement accuracy can be ensured under optimum conditions. In an optical displacement detection mechanism comprising a light source irradiating a light to a cantilever becoming the measurement object, a light source drive circuit driving the light source, a photodetector receiving the light after irradiated to the cantilever from the light source to thereby detect an intensity of the light, and an amplifier amplifying a detection signal of the photodetector at a predetermined amplification rate, there is made such that, by providing a light intensity regulator and an amplification rate regulator, an irradiated light intensity to the cantilever and an amplification rate of the photodetector can be made variable.

    摘要翻译: 提供了一种光学位移检测机构,其中即使测量对象改变,检测灵敏度和噪声比可以调节,而不依赖于诸如反射率的光学特性或测量对象的形状和机械特性, 可以使通过照射光将测量对象的热变形对测量对象的影响减小,并且可以在最佳条件下确保测量精度。 在包括将光照射到作为测量对象的悬臂的光源的光学位移检测机构中,驱动光源的光源驱动电路,从光源照射到悬臂的光接收器,其接收光,从而检测强度 以及以预定的放大率放大光检测器的检测信号的放大器,通过提供光强度调节器和放大率调节器,对悬臂的照射光强度和放大率 可以使光电检测器变得可变。

    OPTICAL DISPLACEMENT-DETECTING MECHANISM AND PROBE MICROSCOPE USING THE SAME
    3.
    发明申请
    OPTICAL DISPLACEMENT-DETECTING MECHANISM AND PROBE MICROSCOPE USING THE SAME 有权
    使用光学位移检测机制和探针显微镜

    公开(公告)号:US20080049223A1

    公开(公告)日:2008-02-28

    申请号:US11840549

    申请日:2007-08-17

    IPC分类号: G01J4/00 G01B11/14 G01N21/47

    CPC分类号: G01Q20/02

    摘要: The optical displacement-detecting mechanism has: a light source for irradiating a target for measurement with light; a light source-driving circuit for driving the light source; an optical detector made from a semiconductor for receiving light after the irradiation of the target for measurement by the light source and converting the light into an electric signal thereby to detect an intensity of light; and an amplifier including a current-voltage conversion circuit for performing current-to-voltage conversion on a detection signal of the optical detector with a predetermined amplification factor. In the optical displacement-detecting mechanism, a light source having a spectrum half width of 10 nm or larger is used, whereby the light source can be driven with an output power of 2 mW or larger without generating mode hop noise and optical feedback noise.

    摘要翻译: 光学位移检测机构具有:用光照射被测物的光源; 用于驱动光源的光源驱动电路; 由半导体制成的光检测器,用于在由光源照射测量目标物之后接收光,并将光转换成电信号从而检测光的强度; 以及放大器,其包括用于以预定的放大系数对光学检测器的检测信号进行电流 - 电压转换的电流 - 电压转换电路。 在光学位移检测机构中,使用光谱半宽度为10nm以上的光源,由此可以以2mW以上的输出功率驱动光源,而不产生模式跳噪声和光反馈噪声。

    Optical displacement-detecting mechanism and probe microscope using the same
    4.
    发明授权
    Optical displacement-detecting mechanism and probe microscope using the same 有权
    光学位移检测机构和探针显微镜使用相同

    公开(公告)号:US07787133B2

    公开(公告)日:2010-08-31

    申请号:US11840549

    申请日:2007-08-17

    IPC分类号: G01B11/14

    CPC分类号: G01Q20/02

    摘要: The optical displacement-detecting mechanism has: a light source for irradiating a target for measurement with light; a light source-driving circuit for driving the light source; an optical detector made from a semiconductor for receiving light after the irradiation of the target for measurement by the light source and converting the light into an electric signal thereby to detect an intensity of light; and an amplifier including a current-voltage conversion circuit for performing current-to-voltage conversion on a detection signal of the optical detector with a predetermined amplification factor. In the optical displacement-detecting mechanism, a light source having a spectrum half width of 10 nm or larger is used, whereby the light source can be driven with an output power of 2 mW or larger without generating mode hop noise and optical feedback noise.

    摘要翻译: 光学位移检测机构具有:用光照射被测物的光源; 用于驱动光源的光源驱动电路; 由半导体制成的光检测器,用于在由光源照射测量目标物之后接收光,并将光转换成电信号从而检测光的强度; 以及放大器,其包括用于以预定的放大系数对光学检测器的检测信号进行电流 - 电压转换的电流 - 电压转换电路。 在光学位移检测机构中,使用光谱半宽度为10nm以上的光源,由此可以以2mW以上的输出功率驱动光源,而不产生模式跳噪声和光反馈噪声。

    Scanning probe microscope displacement detecting mechanism and scanning probe microscope using same
    5.
    发明授权
    Scanning probe microscope displacement detecting mechanism and scanning probe microscope using same 有权
    扫描探针显微镜位移检测机构和扫描探针显微镜使用相同

    公开(公告)号:US07614287B2

    公开(公告)日:2009-11-10

    申请号:US11842722

    申请日:2007-08-21

    IPC分类号: G01B5/28

    摘要: A displacement detection mechanism for a scanning probe microscope capable of performing measurement quickly with high precision even if an objective lens or an illumination system is arranged above or below a sample or a cantilever, and a scanning probe microscope comprising it. The displacement detection mechanism (112) for a scanning probe microscope comprising a supporting section (22) for supporting a cantilever (20), a light source (114) for irradiating a reflective surface (14) with light, and a light receiving section (121) for receiving light reflected off the reflective surface (14), and detecting displacement of the cantilever (20) based on the light receiving position of the light receiving section (121), wherein the rear end of the cantilever (20) is secured to the supporting section (22), and the above light is allowed to impinge on the reflective surface (14), while inclining toward the X axis and Y axis, from above regions B and C on the distal end side of the cantilever (20) out of regions A, B, C and D sectioned, when viewed from the above, by the Y axis extending in the longitudinal direction of the cantilever (20) and the X axis passing through the reflective surface (14) and extending in the direction intersecting the Y axis perpendicularly.

    摘要翻译: 即使将物镜或照明系统配置在样本或悬臂的上方或下方,也可以以高精度快速进行测量的扫描探针显微镜以及包括该扫描探针显微镜的扫描探针显微镜。 一种用于扫描探针显微镜的位移检测机构(112),包括用于支撑悬臂(20)的支撑部分(22),用于用光照射反射表面(14)的光源(114)和光接收部分 121),用于接收从所述反射表面(14)反射的光,以及基于所述光接收部分(121)的光接收位置检测所述悬臂(20)的位移,其中所述悬臂(20)的后端被固定 到所述支撑部分(22),并且当所述悬臂(20)的远端侧上方的区域B和C向X轴和Y轴倾斜时,允许上述光照射在所述反射表面(14)上 )在从上方观察的区域A,B,C和D中,通过沿悬臂(20)的纵向方向延伸的Y轴和穿过反射表面(14)的X轴延伸并在 方向垂直于Y轴 。

    SCANNING PROBE MICROSCOPE DISPLACEMENT DETECTING MECHANISM AND SCANNING PROBE MICROSCOPE USING SAME
    6.
    发明申请
    SCANNING PROBE MICROSCOPE DISPLACEMENT DETECTING MECHANISM AND SCANNING PROBE MICROSCOPE USING SAME 有权
    扫描探针显微镜位移检测机构和扫描探针显微镜

    公开(公告)号:US20080048115A1

    公开(公告)日:2008-02-28

    申请号:US11842722

    申请日:2007-08-21

    IPC分类号: G01N13/16 G01B7/34

    摘要: A displacement detection mechanism for a scanning probe microscope capable of performing measurement quickly with high precision even if an objective lens or an illumination system is arranged above or below a sample or a cantilever, and a scanning probe microscope comprising it. The displacement detection mechanism (112) for a scanning probe microscope comprising a supporting section (22) for supporting a cantilever (20), a light source (114) for irradiating a reflective surface (14) with light, and a light receiving section (121) for receiving light reflected off the reflective surface (14), and detecting displacement of the cantilever (20) based on the light receiving position of the light receiving section (121), wherein the rear end of the cantilever (20) is secured to the supporting section (22), and the above light is allowed to impinge on the reflective surface (14), while inclining toward the X axis and Y axis, from above regions B and C on the distal end side of the cantilever (20) out of regions A, B, C and D sectioned, when viewed from the above, by the Y axis extending in the longitudinal direction of the cantilever (20) and the X axis passing through the reflective surface (14) and extending in the direction intersecting the Y axis perpendicularly.

    摘要翻译: 即使将物镜或照明系统配置在样本或悬臂的上方或下方,也可以以高精度快速进行测量的扫描探针显微镜以及包括该扫描探针显微镜的扫描探针显微镜。 一种用于扫描探针显微镜的位移检测机构(112),包括用于支撑悬臂(20)的支撑部分(22),用于用光照射反射表面(14)的光源(114)和光接收部分 121),用于接收从所述反射表面(14)反射的光,以及基于所述光接收部分(121)的光接收位置检测所述悬臂(20)的位移,其中所述悬臂(20)的后端被固定 到所述支撑部分(22),并且当所述悬臂(20)的远端侧上方的区域B和C向X轴和Y轴倾斜时,允许上述光照射在所述反射表面(14)上 )在从上方观察的区域A,B,C和D中,通过沿悬臂(20)的纵向方向延伸的Y轴和穿过反射表面(14)的X轴延伸并在 方向相交 垂直于Y轴。

    Cu-Ga Target, Method of Producing Same, Light-absorbing Layer Formed from Cu-Ga Based Alloy Film, and CIGS System Solar Cell Having the Light-absorbing Layer
    7.
    发明申请
    Cu-Ga Target, Method of Producing Same, Light-absorbing Layer Formed from Cu-Ga Based Alloy Film, and CIGS System Solar Cell Having the Light-absorbing Layer 审中-公开
    Cu-Ga靶及其制造方法,由Cu-Ga系合金膜形成的吸光层和具有光吸收层的CIGS系太阳能电池

    公开(公告)号:US20130319527A1

    公开(公告)日:2013-12-05

    申请号:US13988363

    申请日:2011-08-10

    摘要: A Cu—Ga alloy sintered-compact sputtering target having a Ga concentration of 40 to 50 at % and Cu as the balance, wherein the sintered-compact sputtering target is characterized in that the relative density is 80% or higher, and the compositional deviation of the Ga concentration is within ±0.5 at % of the intended composition. A method of producing a Cu—Ga alloy sintered-compact sputtering target having a Ga concentration of 40 to 50 at % and Cu as the balance, wherein the method thereof is characterized in that Cu and Ga raw materials are melted and cooled/pulverized to produce a Cu—Ga alloy raw material powder, and the obtained material powder is further hot-pressed with a retention temperature being between the melting point of the mixed raw material powder and a temperature 15° C. lower than the melting point and with a pressure of 400 kgf/cm2 or more applied to the sintered mixed raw material powder. Provided are a sputtering target having very low compositional deviation and high density; a method of producing the target; a light-absorbing layer having a Cu—Ga based alloy film; and a CIGS solar cell including the light-absorbing layer.

    摘要翻译: Ga浓度为40〜50原子%的Cu-Ga合金烧结致密溅射靶,其余为Cu,其特征在于,相对密度为80%以上,成分偏差 的Ga浓度在所需组成的±0.5at%以内。 将Ga浓度为40〜50原子%,Cu作为余量的Cu-Ga合金烧结体型溅射靶的制造方法,其特征在于,将Cu和Ga原料熔融冷却/粉碎至 生成Cu-Ga合金原料粉末,将所得材料粉末进一步热压,保持温度在混合原料粉末的熔点和低于熔点15℃的温度之间, 对烧结的混合原料粉末施加400kgf / cm 2以上的压力。 提供具有非常低的组成偏差和高密度的溅射靶; 生产目标的方法; 具有Cu-Ga基合金膜的光吸收层; 以及包括光吸收层的CIGS太阳能电池。

    METHOD OF SIGNAL EXCHANGE, METHOD OF BIT-SEQUENCE TRANSMISSION, AND BATTERY PACK
    8.
    发明申请
    METHOD OF SIGNAL EXCHANGE, METHOD OF BIT-SEQUENCE TRANSMISSION, AND BATTERY PACK 审中-公开
    信号交换方法,位传输方法和电池组

    公开(公告)号:US20120314796A1

    公开(公告)日:2012-12-13

    申请号:US13489644

    申请日:2012-06-06

    IPC分类号: H04L27/00

    CPC分类号: H04L25/4906

    摘要: A first bit-sequence, which is to be transmitted from a control section to an authentication chip according to an encoding scheme that transmits each one and zero by a pulse with a width of 200 μsec and 100 μsec respectively, is converted to a second bit-sequence to be transmitted according to NRZ encoding. The converted second bit-sequence is stored in a register with the MSB of the second bit-sequence aligned in the MSB of the register. Timing to set the pulse width for transmission of a one or zero by NRZ encoding is performed repeatedly, and at the start of each timed interval, the signal transmission level output to the authentication chip is set corresponding to the value of the bit stored in the MSB of the register. After setting the signal transmission level, the register is shifted left one bit.

    摘要翻译: 将根据通过200μsec和100μsec宽度的脉冲分别发送每一个和零的编码方案从控制部分发送到认证芯片的第一比特序列被转换成第二比特 依照NRZ编码传输。 转换的第二位序列存储在与寄存器的MSB中对齐的第二位序列的MSB的寄存器中。 重复执行通过NRZ编码来设置用于发送一个或者零的脉冲宽度的定时,并且在每个定时间隔开始时,输出到认证芯片的信号传输电平被设置为与存储在认证芯片中的位的值相对应 MSB的寄存器。 设置信号传输电平后,寄存器向左移一位。

    Tip unit for liquid applicator, method for producing the same, and liquid applicator having the tip unit
    9.
    发明授权
    Tip unit for liquid applicator, method for producing the same, and liquid applicator having the tip unit 有权
    用于液体施加器的尖端单元,其制造方法和具有尖端单元的液体施加器

    公开(公告)号:US07914222B2

    公开(公告)日:2011-03-29

    申请号:US10558792

    申请日:2004-05-26

    IPC分类号: B43K7/10

    摘要: A tip unit (1) incorporated in a liquid applicator such as a ball-point pen, the tip unit being capable of an increased rate of liquid discharge with no leaking or clogging problem. To achieve it, the tip unit (1) is accommodated in a tip body (11) having a ball housing (15), a ball (10), a capillary hole (16), and a proximal bore, the ball housing (15) being a passage for allowing liquid to flow therethrough, the ball (10) being rotatively held in the ball housing (15). The ball housing (15) is provided with at least one ink channel (47) adapted to communicate the ball housing (15) with the capillary hole (16) or the proximal bore. The ball housing (15) has a ball resting seat (45) and a side wall (41) that are connected by a connecting surface (71) having a shape of a truncated conical surface with its apex toward the distal end of the tip unit (1).

    摘要翻译: 引入单元(1),其结合在诸如圆珠笔的液体施加器中,所述尖端单元能够以不泄漏或堵塞问题的液体排出速率增加。 为了实现这一点,尖端单元(1)容纳在具有球壳体(15),球(10),毛细孔(16)和近端孔的末端体(11)中,球壳体 )是用于允许液体流过其中的通道,所述球(10)被旋转地保持在所述球壳体(15)中。 球壳体(15)设置有至少一个适于将球壳体(15)与毛细管孔(16)或近端孔连通的油墨通道(47)。 球壳体(15)具有球保持座(45)和侧壁(41),其通过具有截头圆锥形形状的连接表面(71)连接,其顶端朝向尖端单元的远端 (1)。

    PROBE ALIGNING METHOD FOR PROBE MICROSCOPE AND PROBE MICROSCOPE OPERATED BY THE SAME
    10.
    发明申请
    PROBE ALIGNING METHOD FOR PROBE MICROSCOPE AND PROBE MICROSCOPE OPERATED BY THE SAME 有权
    用于探针显微镜和探针显微镜的探针校准方法

    公开(公告)号:US20100031402A1

    公开(公告)日:2010-02-04

    申请号:US12510794

    申请日:2009-07-28

    IPC分类号: G01N13/10

    CPC分类号: G01Q40/00 G01Q30/06

    摘要: Provided is an aligning method capable of setting a sample observation unit such as an optical microscope to a probe microscope observation position at high precision. A sample having a known structure is used in advance. A surface of the sample and a shape of a cantilever provided with a probe are observed using the sample observation unit such as the optical microscope. A sample observation position and a probe position which are obtained using the sample observation unit are verified, and a relative positional relationship therebetween is recorded. Then, a first mark indicating a position of the cantilever and a second mark which is displayed in conjunction with the first mark and has the relative positional relationship with the first mark are produced to align the sample relative to the second mark.

    摘要翻译: 提供了一种能够将诸如光学显微镜的样本观察单元以高精度设置在探针显微镜观察位置的对准方法。 预先使用具有已知结构的样品。 使用诸如光学显微镜的样品观察单元观察样品的表面和设置有探针的悬臂的形状。 验证使用样本观察单元获得的样本观察位置和探针位置,并记录它们之间的相对位置关系。 然后,产生指示悬臂的位置的第一标记和与第一标记一起显示并与第一标记具有相对位置关系的第二标记,以使样本相对于第二标记进行对准。