公开(公告)号：US06432218B1

公开(公告)日：2002-08-13

申请号：US09402877

申请日：1999-12-07

申请人： Masatoshi Hirokawa ,  Haruki Sonoda ,  Yusuke Abe ,  Tetsuji Oishi ,  Masashi Omori ,  Hiroshi Tanaka

发明人： Masatoshi Hirokawa ,  Haruki Sonoda ,  Yusuke Abe ,  Tetsuji Oishi ,  Masashi Omori ,  Hiroshi Tanaka

IPC分类号： B08B310

CPC分类号： B08B3/10 ,  Y10S134/902

摘要： A multi-step flow cleaning method and a multi-step flow cleaning apparatus are provided which effectively clean workpieces with a stream of a cleaning solution and to suppress an increase of foreign matters adhering to the surfaces of the workpieces. A cleaning tank 10 for holding workpieces is provided, a supply line 14 for supplying a cleaning solution such as pure water from the bottom surface of the cleaning tank is provided, and a valve 12 for adjusting the flow of the cleaning solution is disposed in the middle of the supply line 14. The valve 12 is equipped with a switching section 12a for controlling the outflow of the cleaning solution by opening or closing the supply line 14, and a bypass 12b for supplying the cleaning solution, bypassing the switching section 12a. The valve 12 is provided such that it is able to adjust in two steps the supply flow of the cleaning solution supplied to the cleaning tank 10 by using the supply flow fed through the bypass 12b and the supply flow fed through the switching section 12a.

摘要翻译： 提供了一种多级流动清洗方法和多级流动清洁装置，其用清洁液流清洁工件，并且抑制附着在工件表面上的异物的增加。 设置有用于保持工件的清洁槽10，用于从清洗槽的底面供给纯净水等清洗液的供给管路14，将清洗液的流量调整用阀12配置在 阀12配备有用于通过打开或关闭供应管线14来控制清洗溶液的流出的切换部分12a和绕过切换部分12a的清洁溶液供给的旁路12b。 阀12设置成使得能够通过使用通过旁路12b供给的供给流和通过切换部12a供给的供给流，分两步调整供给到清洗槽10的清洗溶液的供给流。

公开(公告)号：US06616774B2

公开(公告)日：2003-09-09

申请号：US09961682

申请日：2001-09-24

申请人： Haruki Sonoda ,  Kazuto Nishizaki ,  Tetsuji Oishi ,  Masatoshi Hirokawa ,  Ei-Ichi Ando ,  Yusuke Abe ,  Masashi Omori

发明人： Haruki Sonoda ,  Kazuto Nishizaki ,  Tetsuji Oishi ,  Masatoshi Hirokawa ,  Ei-Ichi Ando ,  Yusuke Abe ,  Masashi Omori

IPC分类号： B08B702

CPC分类号： H01L21/67057 ,  H01L21/67781 ,  Y10S134/902 ,  Y10S438/906

摘要： There are provided a band-shaped tray 12 having grasping grooves 12a for grasping opposite side ends of wafers 1, and a cleaning tank 20 to which the wafers 1 inserted in the tray 12 are conveyed by a conveyor robot 2 to be cleaned. The cleaning tank 20 is provided with guides 22 for mounting the tray 12 in the tank, a bottom portion 26 formed substantially in V-shape conforming to the bottom-face shape of the wafer 1, and flow ports 24 via which cleaning fluid is supplied into the tank. An outer side face of the cleaning tank 20 is provided with an overflow tank 30 for containing the cleaning fluid overflowing from the cleaning tank 20, and the overflow tank 30 is provided with a circulation line 32 for circulating the cleaning fluid again into the cleaning tank 20.

摘要翻译： 提供了带状托盘12，其具有用于抓握晶片1的相对侧端的把持槽12a和清洁槽20，插入托盘12中的晶片1由输送机器人2输送到清洗槽20。 清洗槽20设置有用于将托盘12安装在罐中的引导件22，基本上形成为符合晶片1的底面形状的V形的底部26，以及通过其供应清洁流体的流动端口24 进入坦克 清洗槽20的外侧面设置有用于容纳从清洗槽20溢出的清洗液的溢流槽30，溢流槽30设有循环管线32，用于将清洗液再次循环到清洗槽 20。

公开(公告)号：US08951490B2

公开(公告)日：2015-02-10

申请号：US14123408

申请日：2012-05-18

申请人： Takeshi Okumura ,  Yoshiharu Nonaka ,  Tomoyuki Ogino ,  Takatoshi Shoji ,  Masatoshi Hirokawa ,  Noboru Takikawa ,  Kazuto Kamazawa

发明人： Takeshi Okumura ,  Yoshiharu Nonaka ,  Tomoyuki Ogino ,  Takatoshi Shoji ,  Masatoshi Hirokawa ,  Noboru Takikawa ,  Kazuto Kamazawa

IPC分类号： C01B31/20 ,  B01D53/04 ,  B01D53/047 ,  B01D53/62

CPC分类号： C01B31/20 ,  B01D53/04 ,  B01D53/047 ,  B01D53/62 ,  B01D2257/504 ,  B01D2258/0283 ,  B01D2259/40001 ,  B01D2259/40054 ,  B01D2259/40086 ,  B01D2259/402 ,  Y02C10/08

摘要： A CO2 recovery method and apparatus for desorbing and recovering carbon dioxide with low energy consumption from a gas discharged from a power generation plant having a boiler and a steam turbine. The adsorption and the desorption of carbon dioxide are performed alternately in two CO2 absorbers and located in a CO2 recovery apparatus, which each hold a carbon dioxide adsorbent. When carbon dioxide is desorbed, steam discharged from an outlet of a steam turbine of a power generation plant is partially branched before introduced into a condenser, and sent to a steam compressor. The partially branched steam is compressed in this compressor, and then sent to a cooling device. By cooling, the steam for desorption is prepared. The steam prepared in the cooling device is supplied into a CO2 absorber to desorb carbon dioxide. Accordingly, waste steam, before it is introduced into the condenser, is usable for desorption.

摘要翻译： 从具有锅炉和蒸汽轮机的发电厂排出的气体中解吸和回收低能耗的二氧化碳的二氧化碳回收方法和装置。 二氧化碳的吸附和解吸交替在两个CO2吸收器中进行，并位于二氧化碳回收装置中，每个二氧化碳回收装置都装有二氧化碳吸附剂。 当二氧化碳解吸时，从发电厂的蒸汽轮机的出口排出的蒸汽在引入冷凝器之前部分地分支，并被送到蒸汽压缩机。 部分分支的蒸汽在该压缩机中被压缩，然后送到冷却装置。 通过冷却，制备用于解吸的蒸汽。 将冷却装置中制备的蒸汽供给到二氧化碳吸收器中以解吸二氧化碳。 因此，废蒸汽在其被引入冷凝器之前可用于解吸。

公开(公告)号：US20140105809A1

公开(公告)日：2014-04-17

申请号：US14123408

申请日：2012-05-18

申请人： Takeshi Okumura ,  Yoshiharu Nonaka ,  Tomoyuki Ogino ,  Takatoshi Shoji ,  Masatoshi Hirokawa ,  Noboru Takikawa ,  Kazuto Kamazawa

发明人： Takeshi Okumura ,  Yoshiharu Nonaka ,  Tomoyuki Ogino ,  Takatoshi Shoji ,  Masatoshi Hirokawa ,  Noboru Takikawa ,  Kazuto Kamazawa

IPC分类号： C01B31/20

CPC分类号： C01B31/20 ,  B01D53/04 ,  B01D53/047 ,  B01D53/62 ,  B01D2257/504 ,  B01D2258/0283 ,  B01D2259/40001 ,  B01D2259/40054 ,  B01D2259/40086 ,  B01D2259/402 ,  Y02C10/08

摘要： A CO2 recovery method and apparatus for desorbing and recovering carbon dioxide with low energy consumption from a gas discharged from a power generation plant having a boiler and a steam turbine. The adsorption and the desorption of carbon dioxide are performed alternately in two CO2 absorbers and located in a CO2 recovery apparatus, which each hold a carbon dioxide adsorbent. When carbon dioxide is desorbed, steam discharged from an outlet of a steam turbine of a power generation plant is partially branched before introduced into a condenser, and sent to a steam compressor. The partially branched steam is compressed in this compressor, and then sent to a cooling device. By cooling, the steam for desorption is prepared. The steam prepared in the cooling device is supplied into a CO2 absorber to desorb carbon dioxide. Accordingly, waste steam, before it is introduced into the condenser, is usable for desorption.

摘要翻译： 从具有锅炉和蒸汽轮机的发电厂排出的气体中解吸和回收低能耗的二氧化碳的二氧化碳回收方法和装置。 二氧化碳的吸附和解吸交替在两个CO2吸收器中进行，并位于二氧化碳回收装置中，每个二氧化碳回收装置都装有二氧化碳吸附剂。 当二氧化碳解吸时，从发电厂的蒸汽轮机的出口排出的蒸汽在引入冷凝器之前部分地分支，并被送到蒸汽压缩机。 部分分支的蒸汽在该压缩机中被压缩，然后送到冷却装置。 通过冷却，制备用于解吸的蒸汽。 将冷却装置中制备的蒸汽供给到二氧化碳吸收器中以解吸二氧化碳。 因此，废蒸汽在其被引入冷凝器之前可用于解吸。