Method of providing high flux of point of use activated reactive species for semiconductor processing
    1.
    发明授权
    Method of providing high flux of point of use activated reactive species for semiconductor processing 失效
    提供高通量使用激活活性物质进行半导体加工的方法

    公开(公告)号:US06793736B2

    公开(公告)日:2004-09-21

    申请号:US10392940

    申请日:2003-03-20

    IPC分类号: B08B702

    CPC分类号: H01L21/67069

    摘要: A method for providing a high flux of point of use activated reactive species for semiconductor processing wherein a workpiece is exposed to a gaseous atmosphere containing a transmission gas that is substantially nonattenuating to preselected wavelengths of electromagnetic radiation. A laminar flow of a gaseous constituent is also provided over a substantially planar surface of the workpiece wherein a beam of the electromagnetic radiation is directed into the gaseous atmosphere such that it converges in the laminar flow to provide maximum beam energy in close proximity to the surface of the workpiece, but spaced a finite distance therefrom. The gaseous constituent is dissociated by the beam producing an activated reactive species that reacts with the surface of the workpiece.

    摘要翻译: 一种用于提供用于半导体加工的高通量使用激活活性物质的方法,其中工件暴露于含有基本上不衰减到预选的电磁辐射波长的透射气体的气体气氛中。 气体成分的层流还设置在工件的基本上平坦的表面上,其中电磁辐射的束被引导到气态气氛中,使得其在层流中会聚以提供最接近表面的最大束能 的距离。 气体组分由光束解离,产生与工件表面反应的活化反应物质。

    Microwave oven cleaner
    2.
    发明授权

    公开(公告)号:US06656288B2

    公开(公告)日:2003-12-02

    申请号:US09923511

    申请日:2001-08-07

    IPC分类号: B08B702

    摘要: A device and method that cleans microwave ovens through a chemical action, specifically to an agent that is placed into the microwave oven, and then activated by operating the oven for a period of time. Different embodiments include a devise composed of an open cell container filled with solution; an open cell container with an attached sponge(s) and filled with solution; and a sponge that contains a cleaning solution in hydrant or dehydrated form. In some of the described embodiments, the devise has a tear off membrane seal to maintain the solution within the cell prior to use. Another embodiment described has a bottle hanger attached to a cell. All embodiments maintain a process to absorb excess microwave energy.

    Method and apparatus for degreasing steel strip
    3.
    发明授权
    Method and apparatus for degreasing steel strip 失效
    钢带脱脂方法及装置

    公开(公告)号:US06547886B1

    公开(公告)日:2003-04-15

    申请号:US09589750

    申请日:2000-06-09

    IPC分类号: B08B702

    CPC分类号: C25F1/00

    摘要: A steel strip is degreased with low power consumption by subjecting the steel strip to electrolytic washing in a degreasing apparatus including an electrolytic washing apparatus in which electrodes confront each other across the steel strip located therebetween, and charge density and current density are maintained within a predetermined range. There is also provided a simple steel strip degreasing apparatus which is especially suitable for the method.

    摘要翻译: 通过在包括电解质洗涤装置的脱脂装置中对钢带进行电解洗涤,钢带脱脂,功率消耗低,电极密度和电流密度保持在预定的范围内 范围。 还提供了一种特别适用于该方法的简单钢带脱脂装置。

    Method for decontaminating a hollow needle
    4.
    发明授权
    Method for decontaminating a hollow needle 失效
    中空针头净化方法

    公开(公告)号:US06632287B1

    公开(公告)日:2003-10-14

    申请号:US09529662

    申请日:2000-04-18

    IPC分类号: B08B702

    CPC分类号: A61L2/04

    摘要: The invention provides a method and device for decontaminating a contaminated hollow metal needle having electrical wires attached to the needle which heat cleaning fluid dispensed into the needle.

    摘要翻译: 本发明提供了一种用于净化污染的中空金属针的方法和装置,其具有附接到针上的电线,其中分配到针中的热清洁流体。

    Method and apparatus for dislodging accrued deposits from a vessel

    公开(公告)号:US06630032B2

    公开(公告)日:2003-10-07

    申请号:US09878875

    申请日:2001-06-11

    IPC分类号: B08B702

    CPC分类号: B08B7/0007 B08B9/08

    摘要: Apparatus for dislodging an accretion of a substance from the vicinity of a vessel, includes apparatus for generating gas-borne shock waves in the vicinity of a vessel, thereby to expose a substance accrued on a surface thereof to separation forces causing at least partial separation of the substance from the surface, so as to facilitate removal of the at least partially separated substance therefrom; and support apparatus for supporting the apparatus for generating shock waves in a selected association relative to the vessel.

    Method and apparatus for removing plastic residue
    6.
    发明授权
    Method and apparatus for removing plastic residue 失效
    去除塑料残渣的方法和装置

    公开(公告)号:US06402853B1

    公开(公告)日:2002-06-11

    申请号:US09678385

    申请日:2000-10-03

    申请人: J. Drake Carlisle

    发明人: J. Drake Carlisle

    IPC分类号: B08B702

    CPC分类号: B08B7/0064

    摘要: Equipment used in the processing of plastic, such as molds and extrusion screws, is cleaned of plastic residue by a combination of thermal cycling and agitation without impact cleaning. A chamber can be heated by an electric radiant heater and cooled by the introduction of liquid nitrogen. A fixture in the chamber receives the equipment to be cleaned and is agitated by a drive motor. The chamber is heated and cooled in the following cycle in which the drive motor agitates the fixture: first to 250-300° F., then to −315° F., then cycled between −50° F. and −10° F., then to 150° F., then to −200° F., to 100° F., then to ambient temperature. The chamber is controlled by a computer that prompts the operator for the kind of plastic to be cleaned off of the equipment and then controls the heating and cooling automatically.

    摘要翻译: 用于加工塑料的设备,如模具和挤出螺丝,通过热循环和搅拌的组合清洁塑料残留物,无需冲击清洗。 室可以通过电辐射加热器加热并通过引入液氮来冷却。 室内的固定装置接收要清洁的设备,并由驱动电机搅动。 在随后的循环中,腔室被加热和冷却,在该循环中驱动马达将固定装置搅动:首先至250-300°F,然后至-315°F,然后在-50°F至-10°F之间循环。 ,然后至150°F,然后至-200°F,至100°F,然后至环境温度。 该室由计算机控制,提示操作员将该类塑料从设备上清除,然后自动控制加热和冷却。

    Road surface marking tape for temporary use and a method of such use
    9.
    发明授权
    Road surface marking tape for temporary use and a method of such use 失效
    用于临时使用的路面标记胶带和这种使用方法

    公开(公告)号:US06533870B1

    公开(公告)日:2003-03-18

    申请号:US09623605

    申请日:2000-09-05

    IPC分类号: B08B702

    CPC分类号: E01C23/081 E01F9/578

    摘要: The invention relates to a road surface marking tape intended for temporary use and being of the kind that includes a base layer of non-cured or non-vulcanized soft elastomeric material, and reinforcing material embedded in the base layer. The reinforcing material is comprised of short fibers of non-metallic material distributed generally uniformly in the base layer in an amount corresponding to 5-50%, preferably 10-20% of the weight of the base layer. The reinforcing material is preferably comprised of fibers of fabric, plastic or carbon with lengths generally between 0.5 and 5 mm, preferably between 1 and 3 mm. The elastomeric material is usually a rubber of the acrylnitrile-butadiene type. The invention also relates to a method of temporarily marking the surface of a road or highway with the aid of the inventive tape, wherein the tape is applied to said surface in the form of an elongated web taken from a tape reel with the aid of an appropriate mechanical tape-laying device, and removed when the traffic markings are no longer required, by freezing the tape to a brittle state and disintegrating the tape to a powder form and collecting said powder mechanically. Freezing, disintegration and collection of the tape material can be effected mechanically in one single step. The tape is conveniently disintegrated by brushing with a rotating steel brush or the like, and the resultant tape scrap is removed by suction.

    摘要翻译: 本发明涉及一种用于临时使用的路面标记带,并且是包括非固化或未硫化的软质弹性体材料的基层,以及嵌入基底层中的增强材料。 增强材料由非金属材料的短纤维组成,基体层中基本上均匀地分布,其量相当于基层重量的5-50%,优选10-20%。 增强材料优选由织物,塑料或碳纤维构成,长度通常为0.5至5毫米,优选为1至3毫米。 弹性体材料通常是丙烯腈 - 丁二烯类型的橡胶。 本发明还涉及借助于本发明的带临时标记道路或高速公路的表面的方法,其中带子以从带卷轴取下的细长网状物的形式施加到所述表面上 适当的机械带式铺设装置,并且当不再需要交通标记时,通过将带冻结到脆性状态并将带分解成粉末形式并机械地收集所述粉末而去除。 胶带材料的冷冻,分解和收集可以在一个单一步骤中机械地实现。 通过用旋转的钢刷等进行刷涂,方便地将胶带分解,并通过抽吸除去所得到的胶带废料。