摘要:
A method for providing a high flux of point of use activated reactive species for semiconductor processing wherein a workpiece is exposed to a gaseous atmosphere containing a transmission gas that is substantially nonattenuating to preselected wavelengths of electromagnetic radiation. A laminar flow of a gaseous constituent is also provided over a substantially planar surface of the workpiece wherein a beam of the electromagnetic radiation is directed into the gaseous atmosphere such that it converges in the laminar flow to provide maximum beam energy in close proximity to the surface of the workpiece, but spaced a finite distance therefrom. The gaseous constituent is dissociated by the beam producing an activated reactive species that reacts with the surface of the workpiece.
摘要:
A device and method that cleans microwave ovens through a chemical action, specifically to an agent that is placed into the microwave oven, and then activated by operating the oven for a period of time. Different embodiments include a devise composed of an open cell container filled with solution; an open cell container with an attached sponge(s) and filled with solution; and a sponge that contains a cleaning solution in hydrant or dehydrated form. In some of the described embodiments, the devise has a tear off membrane seal to maintain the solution within the cell prior to use. Another embodiment described has a bottle hanger attached to a cell. All embodiments maintain a process to absorb excess microwave energy.
摘要:
A steel strip is degreased with low power consumption by subjecting the steel strip to electrolytic washing in a degreasing apparatus including an electrolytic washing apparatus in which electrodes confront each other across the steel strip located therebetween, and charge density and current density are maintained within a predetermined range. There is also provided a simple steel strip degreasing apparatus which is especially suitable for the method.
摘要:
The invention provides a method and device for decontaminating a contaminated hollow metal needle having electrical wires attached to the needle which heat cleaning fluid dispensed into the needle.
摘要:
Apparatus for dislodging an accretion of a substance from the vicinity of a vessel, includes apparatus for generating gas-borne shock waves in the vicinity of a vessel, thereby to expose a substance accrued on a surface thereof to separation forces causing at least partial separation of the substance from the surface, so as to facilitate removal of the at least partially separated substance therefrom; and support apparatus for supporting the apparatus for generating shock waves in a selected association relative to the vessel.
摘要:
Equipment used in the processing of plastic, such as molds and extrusion screws, is cleaned of plastic residue by a combination of thermal cycling and agitation without impact cleaning. A chamber can be heated by an electric radiant heater and cooled by the introduction of liquid nitrogen. A fixture in the chamber receives the equipment to be cleaned and is agitated by a drive motor. The chamber is heated and cooled in the following cycle in which the drive motor agitates the fixture: first to 250-300° F., then to −315° F., then cycled between −50° F. and −10° F., then to 150° F., then to −200° F., to 100° F., then to ambient temperature. The chamber is controlled by a computer that prompts the operator for the kind of plastic to be cleaned off of the equipment and then controls the heating and cooling automatically.
摘要:
This invention relates to water-based alkaline cleaning solutions and their use as an environmentally safer replacement of organic solvents to remove photoresist, polyimide residue and other interlevel dielectric polymer coating residue from polymer film apply equipment, specifically, spin coater bowl and assembly parts consisting of a teflon top shield, stainless steel plate, and a bottom teflon spin coating bowl used in semiconductor device fabrication processes.
摘要:
The present invention relates to a method of removing a layer of material from a synthetic resin or an organic acid ester of cellulose comprising: washing the layer from the substrate with an aqueous alkali solution with a temperature of at least 105° C., and then washing the alkali solution from the substrate. Furthermore, the present invention relates to a pressure vessel used for the above method, comprising a longitudinal cylindrical body having a circular cross-section, an end plate connected to the top of the cylindrical body and an inverted end plate connected to the lower part of the cylindrical body in a manner such that its convex part faces upwards wherein the pressure vessel has a strainer plate and a stirring blade inside the cylindrical body.
摘要:
The invention relates to a road surface marking tape intended for temporary use and being of the kind that includes a base layer of non-cured or non-vulcanized soft elastomeric material, and reinforcing material embedded in the base layer. The reinforcing material is comprised of short fibers of non-metallic material distributed generally uniformly in the base layer in an amount corresponding to 5-50%, preferably 10-20% of the weight of the base layer. The reinforcing material is preferably comprised of fibers of fabric, plastic or carbon with lengths generally between 0.5 and 5 mm, preferably between 1 and 3 mm. The elastomeric material is usually a rubber of the acrylnitrile-butadiene type. The invention also relates to a method of temporarily marking the surface of a road or highway with the aid of the inventive tape, wherein the tape is applied to said surface in the form of an elongated web taken from a tape reel with the aid of an appropriate mechanical tape-laying device, and removed when the traffic markings are no longer required, by freezing the tape to a brittle state and disintegrating the tape to a powder form and collecting said powder mechanically. Freezing, disintegration and collection of the tape material can be effected mechanically in one single step. The tape is conveniently disintegrated by brushing with a rotating steel brush or the like, and the resultant tape scrap is removed by suction.
摘要:
Provided is a vibrating section having an ultrasonic transducer of piezoelectric elements and a rear ultrasonic horn and a front ultrasonic horn, the horns being joined to the transducer. The ultrasonic transducer has a consumption power set at 8W or less. The ultrasonic horn has a flat front end surface, the area of the front end surface being set at 0.07 to 1 cm2.