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    Multi-step flow cleaning method and multi-step flow cleaning apparatus
    1.
    发明授权
    Multi-step flow cleaning method and multi-step flow cleaning apparatus 失效
    多步流动清洗方法和多步流动清洗装置

    公开(公告)号：US06432218B1

    公开(公告)日：2002-08-13

    申请号：US09402877

    申请日：1999-12-07

    申请人： Masatoshi Hirokawa ,  Haruki Sonoda ,  Yusuke Abe ,  Tetsuji Oishi ,  Masashi Omori ,  Hiroshi Tanaka

    发明人： Masatoshi Hirokawa ,  Haruki Sonoda ,  Yusuke Abe ,  Tetsuji Oishi ,  Masashi Omori ,  Hiroshi Tanaka

    IPC分类号： B08B310

    CPC分类号： B08B3/10 ,  Y10S134/902

    摘要： A multi-step flow cleaning method and a multi-step flow cleaning apparatus are provided which effectively clean workpieces with a stream of a cleaning solution and to suppress an increase of foreign matters adhering to the surfaces of the workpieces. A cleaning tank 10 for holding workpieces is provided, a supply line 14 for supplying a cleaning solution such as pure water from the bottom surface of the cleaning tank is provided, and a valve 12 for adjusting the flow of the cleaning solution is disposed in the middle of the supply line 14. The valve 12 is equipped with a switching section 12a for controlling the outflow of the cleaning solution by opening or closing the supply line 14, and a bypass 12b for supplying the cleaning solution, bypassing the switching section 12a. The valve 12 is provided such that it is able to adjust in two steps the supply flow of the cleaning solution supplied to the cleaning tank 10 by using the supply flow fed through the bypass 12b and the supply flow fed through the switching section 12a.

    摘要翻译： 提供了一种多级流动清洗方法和多级流动清洁装置，其用清洁液流清洁工件，并且抑制附着在工件表面上的异物的增加。 设置有用于保持工件的清洁槽10，用于从清洗槽的底面供给纯净水等清洗液的供给管路14，将清洗液的流量调整用阀12配置在 阀12配备有用于通过打开或关闭供应管线14来控制清洗溶液的流出的切换部分12a和绕过切换部分12a的清洁溶液供给的旁路12b。 阀12设置成使得能够通过使用通过旁路12b供给的供给流和通过切换部12a供给的供给流，分两步调整供给到清洗槽10的清洗溶液的供给流。

    Steam drying apparatus, cleaning apparatus incorporating the same, and steam drying process
    2.
    发明授权
    Steam drying apparatus, cleaning apparatus incorporating the same, and steam drying process 失效
    蒸汽干燥装置，包括其的清洗装置，以及蒸汽干燥方法

    公开(公告)号：US5608974A

    公开(公告)日：1997-03-11

    申请号：US526478

    申请日：1995-09-11

    申请人： Hiroshi Tanaka ,  Nobuaki Doi ,  Masashi Omori ,  Hiroaki Ishikawa

    发明人： Hiroshi Tanaka ,  Nobuaki Doi ,  Masashi Omori ,  Hiroaki Ishikawa

    IPC分类号： F26B3/04 ,  F26B5/04 ,  F26B9/06 ,  F26B21/00 ,  F26B21/14 ,  H01L21/00 ,  H01L21/304 ,  F26B21/06

    CPC分类号： H01L21/67034 ,  F26B21/145 ,  F26B5/04

    摘要： A steam drying apparatus in which a process chamber is fitted at a loading opening with a lid which is closed from above. The inner side wall surface of the process chamber has a first surface formed in the lower part thereof and is substantially in parallel with the inner wall surface of the lid, and a second surface extending from the upper end part of the first surface and bent outwards to face the inner wall surface of the lid. The second surface is provided with a steam supply port for supplying the processing solution vapor into the process chamber. To the steam supply port is connected a steam supply means for supplying the processing solution vapor into the process chamber.

    摘要翻译： 一种蒸汽干燥装置，其中处理室装配在具有从上方关闭的盖的装载开口处。 处理室的内侧壁面具有形成在其下部并与盖的内壁面基本平行的第一表面，以及从第一表面的上端部延伸并向外弯曲的第二表面 面对盖的内壁表面。 第二表面设置有用于将处理溶液蒸气供应到处理室中的蒸汽供给口。 蒸汽供应口连接有用于将处理溶液蒸气供应到处理室中的蒸汽供应装置。

    Stream drying process
    3.
    发明授权
    Stream drying process 失效
    蒸汽干燥过程

    公开(公告)号：US5709037A

    公开(公告)日：1998-01-20

    申请号：US726734

    申请日：1996-10-07

    申请人： Hiroshi Tanaka ,  Nobuaki Doi ,  Masashi Omori ,  Hiroaki Ishikawa

    发明人： Hiroshi Tanaka ,  Nobuaki Doi ,  Masashi Omori ,  Hiroaki Ishikawa

    IPC分类号： F26B3/04 ,  F26B5/04 ,  F26B9/06 ,  F26B21/00 ,  F26B21/14 ,  H01L21/00 ,  H01L21/304 ,  F26B3/00

    CPC分类号： H01L21/67034 ,  F26B21/145 ,  F26B5/04

    摘要： A material to be dried, such as a semiconductor substrate during manufacturing a semiconductor device, is loaded into a process chamber fitted at a loading opening with a lid which is closed from above. The inner side wall surface of the process chamber has a first surface formed in the lower part thereof and is substantially in parallel with the inner wall surface of the lid, and a second surface extending from the upper end part of the first surface and bent outwards to face the inner wall surface of the lid. A processing solution vapor is fed through a steam supply port in the second surface into the process chamber and flowed downwardly over the material to be dried. The processing solution vapor is condensed and recovered below the material to be dried.

    摘要翻译： 在制造半导体器件期间，待干燥的材料，例如半导体衬底，被装载到装配在具有从上方封闭的盖的装载开口的处理室中。 处理室的内侧壁面具有形成在其下部并与盖的内壁面基本平行的第一表面，以及从第一表面的上端部延伸并向外弯曲的第二表面 面对盖的内壁表面。 处理溶液蒸气通过第二表面中的蒸汽供应端口进入处理室，并向下流过要干燥的材料。 处理溶液蒸气在待干燥材料下方冷凝和回收。

    CO2 recovery device
    5.
    发明授权
    CO2 recovery device 有权
    CO2回收装置

    公开(公告)号：US09399189B2

    公开(公告)日：2016-07-26

    申请号：US14004708

    申请日：2012-04-11

    申请人： Tatsuya Tsujiuchi ,  Hiroshi Tanaka ,  Hiromitsu Nagayasu ,  Takuya Hirata ,  Tsuyoshi Oishi ,  Masahiko Tatsumi ,  Koji Kadono

    发明人： Tatsuya Tsujiuchi ,  Hiroshi Tanaka ,  Hiromitsu Nagayasu ,  Takuya Hirata ,  Tsuyoshi Oishi ,  Masahiko Tatsumi ,  Koji Kadono

    IPC分类号： B01D53/14

    CPC分类号： B01D53/1425 ,  B01D53/1406 ,  B01D53/1475 ,  B01D2252/204 ,  B01D2257/504 ,  B01D2258/0283 ,  Y02A50/2342 ,  Y02C10/04 ,  Y02C10/06

    摘要： A CO2 recovery device includes a cooling tower including a cooling unit for bringing the flue gas, which contains CO2, into contact with water so as to cool flue gas; a CO2-absorbing unit for bringing the flue gas into contact with a CO2 absorbent (lean solution) so as to remove CO2 from flue gas; and a regenerator including an absorbent regenerating unit for releasing CO2 from a rich solution so as to regenerate the CO2 absorbent. The CO2-absorbing unit includes: a cocurrent flow CO2-absorbing unit provided in a cocurrent flow CO2 absorber, for bringing the flue gas into contact with the CO2 absorbent in a cocurrent flow so as to remove CO2 from flue gas and a countercurrent CO2-absorbing unit provided in a CO2 absorber, for bringing the flue gas into contact with the CO2 absorbent in a countercurrent flow so as to remove CO2 from flue gas.

    摘要翻译： CO 2回收装置包括：冷却塔，其包括用于使含有CO 2的烟道气与水接触以冷却烟道气的冷却单元; 用于使烟道气与CO 2吸收剂（贫溶液）接触以便从烟道气中除去CO 2的CO 2吸收单元; 以及再生器，其包括用于从富溶液中释放CO 2以便再生CO 2吸收剂的吸收剂再生单元。 二氧化碳吸收单元包括：并流CO2吸收单元，其设置在并流CO2吸收器中，用于使烟道气与CO 2吸收剂以并流方式接触，以便从烟气中除去CO 2和逆流CO2- 提供在CO 2吸收器中的吸收单元，用于使烟气以逆流流动与CO 2吸收剂接触，以便从烟道气中除去CO 2。

    Transmission system, transmission device, packet loss ratio measurement method, and packet loss ratio measurement program
    7.
    发明授权
    Transmission system, transmission device, packet loss ratio measurement method, and packet loss ratio measurement program 有权
    传输系统，传输设备，丢包率测量方法和丢包率测量程序

    公开(公告)号：US09264332B2

    公开(公告)日：2016-02-16

    申请号：US14129075

    申请日：2012-06-12

    申请人： Akira Sakurai ,  Hiroshi Tanaka ,  Masaki Umayabashi

    发明人： Akira Sakurai ,  Hiroshi Tanaka ,  Masaki Umayabashi

    IPC分类号： G01R31/08 ,  G06F11/00 ,  G08C15/00 ,  H04L12/26

    CPC分类号： H04L43/0829 ,  H04L43/0835 ,  H04L43/0841 ,  H04L43/0852 ,  H04L43/106

    摘要： In a transmission system capable of measuring packet loss ratio between arbitrary devices upon a transmission path without increasing bandwidth of an OAM frame band, a plurality of transmission devices which have been disposed upon a transmission path are provided with a frame analysis unit which receives data frames so as to analyze the type of the data frames, a count processing unit which stores the number of received frames included in the data frames into storage module provided beforehand, an output line end portion which outputs the data frames, and an OAM processing unit which calculates the packet loss ratio in the transmission path using the number of received frames. The frame analysis unit has a function which, if the data frames are OAM frames, copies the data frames and the OAM processing unit has a function which calculates the packet loss ratio using the copied OAM frames.

    摘要翻译： 在能够测量传输路径上的任意设备之间的分组丢失率而不增加OAM帧频带宽的传输系统中，设置在传输路径上的多个传输设备设置有帧分析单元，其接收数据帧 为了分析数据帧的类型，将数据帧中包含的接收帧的数量存储在预先提供的存储模块中的计数处理单元，输出数据帧的输出线路端部分和OAM处理单元， 使用接收帧的数量来计算传输路径中的丢包率。 帧分析单元具有这样的功能：如果数据帧是OAM帧，则复制数据帧，并且OAM处理单元具有使用复制的OAM帧来计算分组丢失率的功能。

    Substrate processing apparatus and substrate processing method
    8.
    发明授权
    Substrate processing apparatus and substrate processing method 有权
    基板加工装置及基板处理方法

    公开(公告)号：US09070549B2

    公开(公告)日：2015-06-30

    申请号：US12680799

    申请日：2008-09-22

    申请人： Hiroshi Tanaka ,  Toshiyuki Shiokawa ,  Takao Inada

    发明人： Hiroshi Tanaka ,  Toshiyuki Shiokawa ,  Takao Inada

    IPC分类号： B08B5/02 ,  H01L21/02 ,  H01L21/67

    CPC分类号： H01L21/02052 ,  H01L21/67028

    摘要： A drying gas is supplied into a drying chamber in a substantially horizontal direction, an obliquely downward direction descendent from the substantially horizontal direction, or a vertically downward direction under a state where a wafer is immersed in a cleaning liquid in a cleaning tank. The wafer is moved from the cleaning tank into the drying chamber, with the drying gas being supplied into the drying chamber. At this time, the supply of the drying gas into the drying chamber is stopped, under a condition where a part of the wafer is immersed in the cleaning liquid stored in the cleaning tank. After the movement of the wafer into the drying chamber has been finished, a drying gas is supplied into the drying chamber in an obliquely upward direction ascendant from the substantially horizontal direction or a vertically upward direction.

    摘要翻译： 在将晶片浸入清洗槽中的清洗液体的状态下，将干燥气体从大致水平方向或垂直向下方向向大致水平方向，倾斜向下方向供给到干燥室。 将晶片从清洁槽移动到干燥室中，其中干燥气体被供应到干燥室中。 此时，在将晶片的一部分浸渍在存储在清洗槽中的清洗液中的状态下，将干燥气体供给到干燥室内停止。 在将晶片移动到干燥室中之后，干燥气体从大致水平方向或垂直向上方向上升的斜上方向供给干燥室。

    Composition containing antisense oligonucleotide to micro RNA
    10.
    发明授权
    Composition containing antisense oligonucleotide to micro RNA 有权
    含有反义寡核苷酸至微RNA的组合物

    公开(公告)号：US08889649B2

    公开(公告)日：2014-11-18

    申请号：US13884436

    申请日：2011-11-10

    申请人： Koichi Nakashiro ,  Hiroyuki Hamakawa ,  Hiroshi Tanaka

    发明人： Koichi Nakashiro ,  Hiroyuki Hamakawa ,  Hiroshi Tanaka

    IPC分类号： C12N15/11 ,  C12Q1/68 ,  A61K31/7088 ,  C12N15/113 ,  A61K48/00

    CPC分类号： C12N15/113 ,  A61K31/7088 ,  A61K48/00 ,  C12N2310/113 ,  C12N2310/141 ,  C12N2310/3231 ,  C12N2320/11 ,  C12N2330/31

    摘要： Provided is a composition that contains an antisense oligonucleotide to a micro RNA and is capable of inhibiting the growth of cancer cells. The present invention, as one aspect, relates to a composition for suppressing the growth of human cancer cells, the composition containing an antisense oligonucleotide to a micro RNA, wherein the micro RNA is selected from the group consisting of hsa-miR-133a, hsa-miR-133b, hsa-miR-346 and hsa-miR-361-3p. The present invention, as another aspect, relates to a composition for suppressing the growth of human head/neck cancer cells, the composition containing an antisense oligonucleotide to a micro RNA, wherein the micro RNA is selected from the group consisting of hsa-miR-92a, hsa-miR-133a, hsa-miR-133b, hsa-miR-139-5p, hsa-miR-197, hsa-miR-328, hsa-miR-346, hsa-miR-361-3p, hsa-miR-605, hsa-miR-766, hsa-miR-1228, hsa-miR-1252, hsa-miR-1260 and hsa-miR-1271.

    摘要翻译： 本发明提供了含有对微RNA的反义寡核苷酸并且能够抑制癌细胞生长的组合物。 本发明一方面涉及抑制人癌细胞生长的组合物，该组合物含有对微RNA的反义寡核苷酸，其中所述微RNA选自hsa-miR-133a，hsa -miR-133b，hsa-miR-346和hsa-miR-361-3p。 本发明另一方面涉及抑制人头颈部癌细胞生长的组合物，该组合物含有对微RNA的反义寡核苷酸，其中微RNA选自hsa-miR- 92a，hsa-miR-133a，hsa-miR-133b，hsa-miR-139-5p，hsa-miR-197，hsa-miR-328，hsa-miR-346，hsa-miR-361-3p， miR-605，hsa-miR-766，hsa-miR-1228，hsa-miR-1252，hsa-miR-1260和hsa-miR-1271。