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公开(公告)号：US09202732B2
公开(公告)日：2015-12-01
申请号：US13121498
申请日：2009-09-29
IPC分类号： H01L21/67
CPC分类号： H01L21/67265 , Y10S414/138
摘要： The substrate detection apparatus includes: a collimating reflector located on one side of substrates; an illumination unit configured to radiate light in a planar state toward the collimating reflector such that edge portions of the substrates are located in an optical path of the light; an image acquiring unit configured to acquire a passing light image including the edge portions formed on the collimating reflector with the light radiated in the planar state from the illumination unit; and an image processing unit configured to process the passing light image obtained by the image acquiring unit, thereby detecting the conditions of the substrates.
摘要翻译： 基板检测装置包括：位于基板一侧的准直反射器; 照明单元，被配置为将平面状态的光朝向准直反射体照射，使得所述基板的边缘部位于所述光的光路中; 图像获取单元，被配置为从所述照明单元获取包括形成在所述准直反射器上的所述边缘部分的通过光图像，所述光照射是以平面状态照射的光; 以及图像处理单元，被配置为处理由图像获取单元获得的通过光图像，从而检测基板的状态。
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公开(公告)号：US20110205354A1
公开(公告)日：2011-08-25
申请号：US13121498
申请日：2009-09-29
IPC分类号： H04N5/253
CPC分类号： H01L21/67265 , Y10S414/138
摘要： The substrate detection apparatus includes: a collimating reflector located on one side of substrates; an illumination unit configured to radiate light in a planar state toward the collimating reflector such that edge portions of the substrates are located in an optical path of the light; an image acquiring unit configured to acquire a passing light image including the edge portions formed on the collimating reflector with the light radiated in the planar state from the illumination unit; and an image processing unit configured to process the passing light image obtained by the image acquiring unit, thereby detecting the conditions of the substrates.
摘要翻译： 基板检测装置包括：位于基板一侧的准直反射器; 照明单元，被配置为将平面状态的光朝向准直反射体照射，使得所述基板的边缘部位于所述光的光路中; 图像获取单元，被配置为从所述照明单元获取包括形成在所述准直反射器上的所述边缘部分的通过光图像，所述光照射是以平面状态照射的光; 以及图像处理单元，被配置为处理由图像获取单元获得的通过光图像，从而检测基板的状态。
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公开(公告)号：US20070286711A1
公开(公告)日：2007-12-13
申请号：US11808358
申请日：2007-06-08
IPC分类号： H01L21/677
CPC分类号： H01L21/67772 , H01L21/67766 , H01L21/67775
摘要： In the present invention, a base 43 of a robot 27 is fixed to a fixing portion 53 of a frame divided body 50. The base 43 allows force exerted from a robot main body 27A to be transmitted to the fixing portion 53 of the frame divided body 50. Contrary, the fixing portion 53 of the frame divided body 50 has rigidity which can prevent the force exerted from the base 43 of the robot 27 from being transmitted to a main body constituting member 51. Accordingly, the base 43 of the robot 27 has only to possess a function for connecting the robot main body 27A and the frame divided body 50. Therefore, even though reducing its rigidity, transmission of vibration to the wafer processing apparatus can be prevented, as well as occurrence of malfunctioning in the substrate processing work can be prevented. In addition, increasing the rigidity of the frame divided body 50 can be achieved easier with a simpler construction and more effective than increasing the rigidity of the robot. Accordingly, more secured wafer processing can be provided.
摘要翻译： 在本发明中，机器人27的基座43固定在框架分割体50的固定部53上。 底座43允许从机器人主体部件27A施加的力传递到框架分割体50的固定部分53。 相反，框架分割体50的固定部分53具有能够防止从机器人27的基座43施加的力传递到主体构成构件51的刚性。 因此，机器人27的基座43仅具有连接机器人主体部27A和框架分割体50的功能。 因此，即使降低其刚性，也能够防止向晶片加工装置的振动传递，并且能够防止基板处理作业发生故障。 此外，通过更简单的构造可以更容易地实现框架分割体50的刚性的提高，并且比增加机器人的刚性更有效。 因此，可以提供更加牢固的晶片处理。
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公开(公告)号：US07942619B2
公开(公告)日：2011-05-17
申请号：US11808358
申请日：2007-06-08
IPC分类号： H01L21/677
CPC分类号： H01L21/67772 , H01L21/67766 , H01L21/67775
摘要： In the present invention, a base 43 of a robot 27 is fixed to a fixing portion 53 of a frame divided body 50. The base 43 allows force exerted from a robot main body 27A to be transmitted to the fixing portion 53 of the frame divided body 50. Contrary, the fixing portion 53 of the frame divided body 50 has rigidity which can prevent the force exerted from the base 43 of the robot 27 from being transmitted to a main body constituting member 51. Accordingly, the base 43 of the robot 27 has only to possess a function for connecting the robot main body 27A and the frame divided body 50. Therefore, even though reducing its rigidity, transmission of vibration to the wafer processing apparatus can be prevented, as well as occurrence of malfunctioning in the substrate processing work can be prevented. In addition, increasing the rigidity of the frame divided body 50 can be achieved easier with a simpler construction and more effective than increasing the rigidity of the robot. Accordingly, more secured wafer processing can be provided.
摘要翻译： 在本发明中，机器人27的基座43被固定在框架分割体50的固定部53上。底座43允许从机器人主体27A施加的力传递到分割的框架的固定部53 相反，框架分割体50的固定部分53具有能够防止从机器人27的基部43施加的力被传递到主体构成构件51的刚性。因此，机器人的基座43 27仅具有连接机器人主体27A和框架分割体50的功能。因此，即使降低其刚性，也可以防止向晶片处理装置的振动传递，以及基板的故障发生 可以防止加工工作。 此外，通过更简单的构造可以更容易地实现框架分割体50的刚性的提高，并且比增加机器人的刚性更有效。 因此，可以提供更加牢固的晶片处理。
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5.发明授权公开(公告)号：US07651311B2
公开(公告)日：2010-01-26
申请号：US11889653
申请日：2007-08-15
申请人： Yasuhiko Hashimoto , Masao Takatori
发明人： Yasuhiko Hashimoto , Masao Takatori
IPC分类号： B65B69/00
CPC分类号： H01L21/67772 , Y10S414/139
摘要： In this invention, a movable body movable in forward and backward directions and a connector fixed to an opener-side door are connected with each other by link members so as to constitute a parallel link mechanism, such that they can be angularly displaced relative to each other. Link member angular displacement means controls the angular displacement of each link member relative to the movable body to be in a predetermined angular position, corresponding to the position of the movable body along the forward and backward directions. Reciprocation of the movable body in the forward and backward directions by movable body drive means moves the opener-side door in the forward and backward directions as well as in the upward and downward directions, thereby opening an opener-side opening. Since the movable body is moved only in the forward and backward directions, and necessity of moving and guiding the movable body in the upward and downward directions can be eliminated, the substrate container opener can be downsized, and a space provided below a FOUP supporting portion can be utilized effectively.
摘要翻译： 在本发明中，可沿前后方向移动的移动体和固定在开启侧门上的连接器通过连接构件相互连接，构成平行连杆机构，使得它们能够相对于每个 其他。 链接构件角位移装置将每个连杆构件相对于可动体的角位移控制在预定的角位置，对应于可移动体沿着前后方向的位置。 可移动体驱动装置在向前和向后方向上可移动体的往复运动使开启侧门沿前后方向以及上下方向移动，从而打开开启器侧开口。 由于可移动体仅沿前后方向移动，并且可以消除上下方向的移动和引导移动体的必要性，因此能够使基板容器开启器小型化，并且设置在FOUP支撑部下方的空间 可以有效利用。
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6.发明申请公开(公告)号：US20080069670A1
公开(公告)日：2008-03-20
申请号：US11889653
申请日：2007-08-15
申请人： Yasuhiko Hashimoto , Masao Takatori
发明人： Yasuhiko Hashimoto , Masao Takatori
IPC分类号： H01L21/677
CPC分类号： H01L21/67772 , Y10S414/139
摘要： In this invention, a movable body movable in forward and backward directions and a connector fixed to an opener-side door are connected with each other by link members so as to constitute a parallel link mechanism, such that they can be angularly displaced relative to each other. Link member angular displacement means controls the angular displacement of each link member relative to the movable body to be in a predetermined angular position, corresponding to the position of the movable body along the forward and backward directions. Reciprocation of the movable body in the forward and backward directions by movable body drive means moves the opener-side door in the forward and backward directions as well as in the upward and downward directions, thereby opening an opener-side opening. Since the movable body is moved only in the forward and backward directions, and necessity of moving and guiding the movable body in the upward and downward directions can be eliminated, the substrate container opener can be downsized, and a space provided below a FOUP supporting portion can be utilized effectively.
摘要翻译： 在本发明中，可沿前后方向移动的移动体和固定在开启侧门上的连接器通过连接构件相互连接，构成平行连杆机构，使得它们能够相对于每个 其他。 链接构件角位移装置将每个连杆构件相对于可动体的角位移控制在预定的角位置，对应于可移动体沿着前后方向的位置。 可移动体驱动装置在向前和向后方向上可移动体的往复运动使开启侧门沿前后方向以及上下方向移动，从而打开开启器侧开口。 由于可移动体仅沿前后方向移动，并且可以消除上下方向的移动和引导移动体的必要性，因此可以使基板容器开启器小型化，并且设置在FOUP支撑部下方的空间 可以有效利用。
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