公开(公告)号：US06540840B1

公开(公告)日：2003-04-01

申请号：US09488764

申请日：2000-01-21

申请人： Masayuki Toda ,  Masaki Kusuhara ,  Mikio Doi ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Yoichi Kanno ,  Osamu Uchisawa ,  Kohei Yamamoto ,  Toshikatu Meguro

发明人： Masayuki Toda ,  Masaki Kusuhara ,  Mikio Doi ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Yoichi Kanno ,  Osamu Uchisawa ,  Kohei Yamamoto ,  Toshikatu Meguro

IPC分类号： C23C1600

CPC分类号： C23C16/4486 ,  C23C16/409

摘要： Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod 10 has a spiral groove 60 formed in the external periphery closer to the vaporizing section 22, the rod 10 being inserted into the cylindrical hollow portion.

公开(公告)号：US07744698B2

公开(公告)日：2010-06-29

申请号：US10310578

申请日：2002-12-05

申请人： Masayuki Toda ,  Masaki Kusuhara ,  Mikio Doi ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Yoichi Kanno ,  Osamu Uchisawa ,  Kohei Yamamoto ,  Toshikatu Meguro

发明人： Masayuki Toda ,  Masaki Kusuhara ,  Mikio Doi ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Yoichi Kanno ,  Osamu Uchisawa ,  Kohei Yamamoto ,  Toshikatu Meguro

IPC分类号： C23C16/00

CPC分类号： C23C16/4486 ,  C23C16/409

摘要： Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod 10 has a spiral groove 60 formed in the external periphery closer to the vaporizing section 22, the rod i0 being inserted into the cylindrical hollow portion.

摘要翻译： 公开了由分散部8和蒸发部22构成的蒸发器。分散部8包括用于将载气3在压力下导入气体通道的气体导入口4，将原料溶液5a，5b供给到 气体通道和用于将含有原料溶液的载气输送到汽化部分22的气体出口7.蒸发部分22包括蒸发管20，其一端连接到MOCVD系统的反应管，并具有另一端 连接到分散部8的气体出口7，以及用于加热蒸发管20的加热装置。蒸发部22用于加热和蒸发从分散部8输送的含有载气3的原料溶液。分散部8 包括具有圆柱形中空部分的分散部分主体1和具有小于圆柱形内径的外径的杆10 l中空部分。 杆10具有形成在更靠近蒸发部22的外周中的螺旋槽60，杆i0插入到圆筒形中空部中。

公开(公告)号：US06931203B2

公开(公告)日：2005-08-16

申请号：US10310564

申请日：2002-12-05

申请人： Masayuki Toda ,  Masaki Kusuhara ,  Mikio Doi ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Yoichi Kanno ,  Osamu Uchisawa ,  Kohei Yamamoto ,  Toshikatu Meguro

发明人： Masayuki Toda ,  Masaki Kusuhara ,  Mikio Doi ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Yoichi Kanno ,  Osamu Uchisawa ,  Kohei Yamamoto ,  Toshikatu Meguro

IPC分类号： H01L21/31 ,  C23C16/40 ,  C23C16/448 ,  H01L21/8242 ,  H01L27/108 ,  F22B29/06 ,  F02M15/04

CPC分类号： C23C16/4486 ,  C23C16/409

摘要： Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod 10 has a spiral groove 60 formed in the external periphery closer to the vaporizing section 22, the rod 10 being inserted into the cylindrical hollow portion.

摘要翻译： 公开了由分散部8和蒸发部22构成的蒸发器。分散部8包括用于将载气3在压力下导入气体通道的气体导入口4，供给原料溶液5a，5b的装置 和用于将含有原料溶液的载气输送到汽化部分22的气体出口7.蒸发部分22包括蒸发管20，其一端连接到MOCVD系统的反应管，并具有 另一端连接到分散部8的气体出口7，以及加热装置，用于加热蒸发管20.蒸发部22用于加热和蒸发从分散部8输送的含有载气3的原料溶液。分散 部分8包括具有圆柱形中空部分的分散部分主体1和具有小于圆柱形内径的外径的杆10 cal中空部分。 杆10具有形成在更靠近蒸发部分22的外周中的螺旋槽60，杆10插入到圆柱形中空部分中。