公开(公告)号：US11152130B2

公开(公告)日：2021-10-19

申请号：US16325936

申请日：2017-08-15

申请人： Massachusetts Institute of Technology

发明人： Akintunde I. Akinwande ,  Berthold Klaus Paul Horn ,  Richard C. Lanza ,  George Barbastathis ,  Rajiv Gupta ,  Jonah Jacob

IPC分类号： G01N23/04 ,  G01N23/083 ,  H01J35/12 ,  H01J35/18 ,  H01J35/06 ,  G21K7/00 ,  G01N23/044 ,  H01L21/66 ,  G01N23/041

摘要： System and method for imaging an integrated circuit (IC). The imaging system comprises an x-ray source including a plurality of spatially and temporally addressable electron sources, an x-ray detector arranged such that incident x-rays are oriented normal to an incident surface of the x-ray detector and a three-axis stage arranged between the x-ray source and the x-ray detector, the three-axis stage configured to have mounted thereon an integrated circuit through which x-rays generated by the x-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the three-axis stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the three-axis stage to acquire a set of intensity data by the x-ray detector as the three-axis stage moves along a three-dimensional trajectory.

公开(公告)号：US20200085392A1

公开(公告)日：2020-03-19

申请号：US16684372

申请日：2019-11-14

申请人： Massachusetts Institute of Technology

发明人： Richard C. Lanza ,  Berthold Klaus Paul Horn ,  Akintunde I. Akinwande ,  George Barbastathis ,  Rajiv Gupta

IPC分类号： A61B6/00 ,  A61B6/02

摘要： System and method for nanoscale X-ray imaging of biological specimen. The imaging system comprises an X-ray source including a plurality of spatially and temporally addressable electron sources, an X-ray detector arranged such that incident X-rays are oriented normal to an incident surface of the X-ray detector and a stage arranged between the X-ray source and the X-ray detector, the stage configured to have mounted thereon a biological specimen through which X-rays generated by the X-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the stage to acquire a set of intensity data by the X-ray detector as the stage moves along a three-dimensional trajectory.

公开(公告)号：US11437218B2

公开(公告)日：2022-09-06

申请号：US17020734

申请日：2020-09-14

申请人： Massachusetts Institute of Technology

发明人： Richard C. Lanza ,  Berthold Klaus Paul Horn ,  Akintunde I. Akinwande ,  George Barbastathis ,  Rajiv Gupta

IPC分类号： H01J37/28 ,  H01J37/24 ,  H01J37/256 ,  G01N23/22 ,  G01N23/04 ,  H01J37/244 ,  G01N23/2252 ,  G01N23/044

摘要： System and method for nanoscale X-ray imaging. The imaging system comprises an electron source configured to generate an electron beam along a first direction; an X-ray source comprising a thin film anode configured to receive the electron beam at an electron beam spot on the thin film anode, and to emit an X-ray beam substantially along the first direction from a portion of the thin film anode proximate the electron beam spot, such that the X-ray beam passes through the sample specimen. The imaging apparatus further comprises an X-ray detector configured to receive the X-ray beam that passes through the sample specimen. Some embodiments are directed to an electron source that is an electron column of a scanning electron microscope (SEM) and is configured to focus the electron beam at the electron beam spot.

公开(公告)号：US11145431B2

公开(公告)日：2021-10-12

申请号：US16684372

申请日：2019-11-14

申请人： Massachusetts Institute of Technology

发明人： Richard C. Lanza ,  Berthold Klaus Paul Horn ,  Akintunde I. Akinwande ,  George Barbastathis ,  Rajiv Gupta

IPC分类号： G21K7/00 ,  G01N23/041 ,  G01N23/044 ,  H01J35/16 ,  G01N23/083 ,  H01J35/06 ,  H01J35/18

摘要： System and method for nanoscale X-ray imaging of biological specimen. The imaging system comprises an X-ray source including a plurality of spatially and temporally addressable electron sources, an X-ray detector arranged such that incident X-rays are oriented normal to an incident surface of the X-ray detector and a stage arranged between the X-ray source and the X-ray detector, the stage configured to have mounted thereon a biological specimen through which X-rays generated by the X-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the stage to acquire a set of intensity data by the X-ray detector as the stage moves along a three-dimensional trajectory.

公开(公告)号：US20210151288A1

公开(公告)日：2021-05-20

申请号：US17020734

申请日：2020-09-14

申请人： Massachusetts Institute of Technology

发明人： Richard C. Lanza ,  Berthold Klaus Paul Horn ,  Akintunde I. Akinwande ,  George Barbastathis ,  Rajiv Gupta

IPC分类号： H01J37/28 ,  H01J37/244 ,  H01J37/256 ,  G01N23/044 ,  G01N23/2252

摘要： System and method for nanoscale X-ray imaging. The imaging system comprises an electron source configured to generate an electron beam along a first direction; an X-ray source comprising a thin film anode configured to receive the electron beam at an electron beam spot on the thin film anode, and to emit an X-ray beam substantially along the first direction from a portion of the thin film anode proximate the electron beam spot, such that the X-ray beam passes through the sample specimen. The imaging apparatus further comprises an X-ray detector configured to receive the X-ray beam that passes through the sample specimen. Some embodiments are directed to an electron source that is an electron column of a scanning electron microscope (SEM) and is configured to focus the electron beam at the electron beam spot.

公开(公告)号：US20190206652A1

公开(公告)日：2019-07-04

申请号：US16325936

申请日：2017-08-15

申请人： Massachusetts Institute of Technology ,  Science Reseach Laboratory, Inc.

发明人： Akintunde I. Akinwande ,  Berthold Klaus Paul Horn ,  Richard C. Lanza ,  George Barbastathis ,  Rajiv Gupta ,  Jonah Jacob

IPC分类号： H01J35/06 ,  G01N23/044 ,  H01L21/66

CPC分类号： H01J35/065 ,  G01N23/044 ,  G01N2223/6113 ,  H01J2235/068 ,  H01L22/12

摘要： System and method for imaging an integrated circuit (IC). The imaging system comprises an x-ray source including a plurality of spatially and temporally addressable electron sources, an x-ray detector arranged such that incident x-rays are oriented normal to an incident surface of the x-ray detector and a three-axis stage arranged between the x-ray source and the x-ray detector, the three-axis stage configured to have mounted thereon an integrated circuit through which x-rays generated by the x-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the three-axis stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the three-axis stage to acquire a set of intensity data by the x-ray detector as the three-axis stage moves along a three-dimensional trajectory.