公开(公告)号：US09366576B2

公开(公告)日：2016-06-14

申请号：US14634307

申请日：2015-02-27

申请人： Massachusetts Institute of Technology ,  Trustees of Boston University

发明人： Harold Y. Hwang ,  Mengkun Liu ,  Richard D. Averitt ,  Keith A. Nelson ,  Aaron Sternbach ,  Kebin Fan

IPC分类号： G01J5/02 ,  G01J5/28 ,  G01J5/20 ,  H01L31/09 ,  G01J5/00

CPC分类号： G01J5/28 ,  G01J5/20 ,  G01J2005/0077 ,  G01J2005/202 ,  G01J2005/283 ,  G01J2005/286 ,  H01L27/14636 ,  H01L27/1464 ,  H01L27/14669 ,  H01L31/09

摘要： An apparatus for detecting electromagnetic radiation within a target frequency range is provided. The apparatus includes a substrate and one or more resonator structures disposed on the substrate. The substrate can be a dielectric or semiconductor material. Each of the one or more resonator structures has at least one dimension that is less than the wavelength of target electromagnetic radiation within the target frequency range, and each of the resonator structures includes at least two conductive structures separated by a spacing. Charge carriers are induced in the substrate near the spacing when the resonator structures are exposed to the target electromagnetic radiation. A measure of the change in conductivity of the substrate due to the induced charge carriers provides an indication of the presence of the target electromagnetic radiation.

公开(公告)号：US10024723B2

公开(公告)日：2018-07-17

申请号：US15156115

申请日：2016-05-16

申请人： Massachusetts Institute of Technology ,  Trustees of Boston University

发明人： Harold Y. Hwang ,  Mengkun Liu ,  Richard D. Averitt ,  Keith A. Nelson ,  Aaron Sternbach ,  Kebin Fan

IPC分类号： G01J5/02 ,  G01J5/28 ,  G01J5/20 ,  H01L27/146 ,  G01J5/00

摘要： An apparatus for detecting electromagnetic radiation within a target frequency range is provided. The apparatus includes a substrate and one or more resonator structures disposed on the substrate. The substrate can be a dielectric or semiconductor material. Each of the one or more resonator structures has at least one dimension that is less than the wavelength of target electromagnetic radiation within the target frequency range, and each of the resonator structures includes at least two conductive structures separated by a spacing. Charge carriers are induced in the substrate near the spacing when the resonator structures are exposed to the target electromagnetic radiation. A measure of the change in conductivity of the substrate due to the induced charge carriers provides an indication of the presence of the target electromagnetic radiation.

公开(公告)号：US20170131148A1

公开(公告)日：2017-05-11

申请号：US15156115

申请日：2016-05-16

申请人： Massachusetts Institute of Technology ,  Trustees of Boston University

发明人： Harold Y. Hwang ,  Mengkun Liu ,  Richard D. Averitt ,  Keith A. Nelson ,  Aaron Sternbach ,  Kebin Fan

IPC分类号： G01J5/28 ,  H01L27/146 ,  G01J5/20

CPC分类号： G01J5/28 ,  G01J5/20 ,  G01J2005/0077 ,  G01J2005/202 ,  G01J2005/283 ,  G01J2005/286 ,  H01L27/14636 ,  H01L27/1464 ,  H01L27/14669 ,  H01L31/09

摘要： An apparatus for detecting electromagnetic radiation within a target frequency range is provided. The apparatus includes a substrate and one or more resonator structures disposed on the substrate. The substrate can be a dielectric or semiconductor material. Each of the one or more resonator structures has at least one dimension that is less than the wavelength of target electromagnetic radiation within the target frequency range, and each of the resonator structures includes at least two conductive structures separated by a spacing. Charge carriers are induced in the substrate near the spacing when the resonator structures are exposed to the target electromagnetic radiation. A measure of the change in conductivity of the substrate due to the induced charge carriers provides an indication of the presence of the target electromagnetic radiation.

公开(公告)号：US20150285687A1

公开(公告)日：2015-10-08

申请号：US14634307

申请日：2015-02-27

申请人： Massachusetts Institute of Technology ,  Trustees of Boston University

发明人： Harold Y. Hwang ,  Mengkun Liu ,  Richard D. Averitt ,  Keith A. Nelson ,  Aaron Sternbach ,  Kebin Fan

IPC分类号： G01J5/28 ,  G01J5/20

CPC分类号： G01J5/28 ,  G01J5/20 ,  G01J2005/0077 ,  G01J2005/202 ,  G01J2005/283 ,  G01J2005/286 ,  H01L27/14636 ,  H01L27/1464 ,  H01L27/14669 ,  H01L31/09

摘要： An apparatus for detecting electromagnetic radiation within a target frequency range is provided. The apparatus includes a substrate and one or more resonator structures disposed on the substrate. The substrate can be a dielectric or semiconductor material. Each of the one or more resonator structures has at least one dimension that is less than the wavelength of target electromagnetic radiation within the target frequency range, and each of the resonator structures includes at least two conductive structures separated by a spacing. Charge carriers are induced in the substrate near the spacing when the resonator structures are exposed to the target electromagnetic radiation. A measure of the change in conductivity of the substrate due to the induced charge carriers provides an indication of the presence of the target electromagnetic radiation.

摘要翻译： 提供一种用于检测目标频率范围内的电磁辐射的装置。 该装置包括衬底和设置在衬底上的一个或多个谐振器结构。 衬底可以是电介质或半导体材料。 一个或多个谐振器结构中的每一个具有小于目标频率范围内的目标电磁辐射的波长的至少一个维度，并且每个谐振器结构都包括由间隔隔开的至少两个导电结构。 当谐振器结构暴露于目标电磁辐射时，电荷载流子在衬底附近被感应。 由于感应的电荷载体导致的衬底的电导率变化的测量提供了目标电磁辐射的存在的指示。