公开(公告)号：US6075602A

公开(公告)日：2000-06-13

申请号：US318322

申请日：1999-05-25

申请人： Martin Fuchs ,  John A. Rogers ,  Matthew J. Banet

发明人： Martin Fuchs ,  John A. Rogers ,  Matthew J. Banet

IPC分类号： G01B11/06 ,  G01B21/08 ,  G01N21/00 ,  G01N21/17 ,  G01N21/41 ,  G01N21/47 ,  G01N21/63 ,  G01B9/02

CPC分类号： G01B11/0666 ,  G01B11/06 ,  G01B21/085 ,  G01N21/1717 ,  G01N21/636

摘要： The invention provides an apparatus for measuring a property of a sample (using, e.g., ISTS) that includes: 1) an excitation laser that generates an excitation laser beam; 2) an optical system aligned along an optical axis that separates the excitation laser beam into at least three sub-beams; 3) an imaging system aligned along the optical axis that collects the sub-beams and focuses them onto the sample to form an optical interference pattern that generates a time-dependent response in the sample; 4) a probe laser that generates a probe laser beam that diffracts off the time-dependent response to form a signal beam; 5) a detector that detects the signal beam and in response generates a radiation-induced electronic response; and 6) a processor that processes the radiation-induced electronic response to determine the property of the sample.

摘要翻译： 本发明提供一种用于测量样品（使用例如ISTS）的性质的装置，其包括：1）产生激发激光束的激发激光; 2）沿着光轴对准的光学系统，其将激发激光束分离成至少三个子光束; 3）沿着光轴对准的成像系统，其收集子光束并将它们聚焦到样品上以形成在样品中产生时间依赖性响应的光学干涉图案; 4）探测激光器，其产生衍射时间依赖响应以形成信号光束的探测激光束; 5）检测信号光束并作为响应的检测器产生辐射诱发的电子响应; 以及6）处理器，其处理辐射诱导的电子响应以确定样品的性质。

公开(公告)号：US6069703A

公开(公告)日：2000-05-30

申请号：US86975

申请日：1998-05-28

申请人： Matthew J. Banet ,  Martin Fuchs ,  John A. Rogers ,  Keith A. Nelson ,  Timothy F. Crimmins ,  Alexei Maznev

发明人： Matthew J. Banet ,  Martin Fuchs ,  John A. Rogers ,  Keith A. Nelson ,  Timothy F. Crimmins ,  Alexei Maznev

IPC分类号： G01B11/06 ,  G01B17/02 ,  G01N3/02 ,  G01N21/00 ,  G01N29/00 ,  G01N29/24 ,  G01N29/04

CPC分类号： G01N29/2418 ,  G01B11/0666 ,  G01B17/025 ,  G01N2021/1725 ,  G01N2203/0222 ,  G01N2203/0282 ,  G01N2291/0231 ,  G01N2291/0237 ,  G01N2291/02854

摘要： An apparatus for measuring a property of a structure comprising at least one layer, the appratus including a light source that produces an optical pulse having a duration of less than 10 ps; a diffractive element that receives the optical pulse and diffracts it to generate at least two excitation pulses; an optical system that spatially and temporally overlaps at least two excitation pulses on or in the structure to form an excitation pattern, containing at least two light regions, that launches an acoustic wave having an out-of-plane component that propagates through the layer, reflects off a lower boundary of the layer, and returns to a surface of the structure to modulate a property of the structure; a light source that produces a probe pulse that diffracts off the modulated property to generate at least one signal pulse; a detector that receives at least one signal pulse and in response generates a light-induced electrical signal; and an analyzer that analyzes the light-induced electrical signal to measure the property of the structure.

摘要翻译： 一种用于测量包括至少一层的结构的性质的装置，所述装置包括产生具有小于10ps的持续时间的光脉冲的光源; 衍射元件，其接收光脉冲并衍射以产生至少两个激励脉冲; 在该结构上或其结构中空间和时间上重叠至少两个激励脉冲以形成激发图案的光学系统，其包含至少两个光区域，该至少两个光区域发射具有传播通过该层的平面外部分的声波， 反射层的下边界，并返回到结构的表面以调节结构的性质; 产生探测脉冲的光源，其衍射出调制特性以产生至少一个信号脉冲; 接收至少一个信号脉冲并作为响应的检测器产生光诱导的电信号; 以及分析器，其分析光感应电信号以测量结构的性质。

公开(公告)号：US06795198B1

公开(公告)日：2004-09-21

申请号：US09087141

申请日：1998-05-28

申请人： Martin Fuchs ,  Matthew J. Banet ,  Keith A. Nelson ,  John A. Rogers

发明人： Martin Fuchs ,  Matthew J. Banet ,  Keith A. Nelson ,  John A. Rogers

IPC分类号： G01B902

CPC分类号： G01N21/1717 ,  G01B11/0666 ,  G01N29/2418 ,  G01N2291/0423

摘要： The invention provides both a method and apparatus that measures a property of a structure that includes at least one layer. The apparatus features a laser (e.g., a microchip laser, described below) that generates an optical pulse, and a diffractive mask that receives the optical pulse and diffracts it to generate at least two excitation pulses. An optical system, (e.g., an achromat lens pair) receives the optical pulses and spatially and temporally overlaps them on or in the structure to form an excitation pattern that launches an acoustic wave. The acoustic wave modulates a property of the structure, e.g., it generates a time-dependent “surface ripple” or modulates an optical property such as the sample's refractive index or absorption coefficient. Surface ripple is defined as a time-dependent change in the morphology of the surface; its peak-to-null amplitude is typically a few angstroms or less. The apparatus also includes a light source that produces a probe beam that reflects off the modulated property to generate a signal beam. An optical detection system receives the reflected signal beam and in response generates a light-induced electrical signal. An analyzer analyzes the signal to measure the property of the structure.

摘要翻译： 本发明提供了一种测量包括至少一层的结构的性质的方法和装置。 该装置具有产生光脉冲的激光器（例如，下面描述的微芯片激光器），以及接收光脉冲并衍射以产生至少两个激励脉冲的衍射掩模。 光学系统（例如，消色差透镜对）接收光学脉冲，并且在结构中或结构中空间和时间上重叠它们以形成发射声波的激发图案。 声波调制结构的性质，例如，其产生时间依赖性的“表面纹波”或调制光学特性，例如样品的折射率或吸收系数。 表面波纹定义为表面形态的时间依赖性变化; 其峰到零幅度通常为几埃或更小。 该装置还包括产生探测光束的光源，其反射出调制的特性以产生信号光束。 光学检测系统接收反射的信号光束，并且响应于产生光诱导的电信号。 分析仪分析信号以测量结构的性质。

公开(公告)号：US6016202A

公开(公告)日：2000-01-18

申请号：US885555

申请日：1997-06-30

申请人： Martin Fuchs ,  John A. Rogers ,  Matthew J. Banet

发明人： Martin Fuchs ,  John A. Rogers ,  Matthew J. Banet

IPC分类号： G01B11/06 ,  G01B21/08 ,  G01N21/00 ,  G01N21/17 ,  G01N21/41 ,  G01N21/47 ,  G01N21/63 ,  G01B9/02

CPC分类号： G01B11/0666 ,  G01B11/06 ,  G01B21/085 ,  G01N21/1717 ,  G01N21/636

摘要： The invention provides an apparatus for measuring a property of a sample (using, e.g., ISTS) that includes: 1) an excitation laser that generates an excitation laser beam; 2) an optical system aligned along an optical axis that separates the excitation laser beam into at least three sub-beams; 3) an imaging system aligned along the optical axis that collects the sub-beams and focuses them onto the sample to form an optical interference pattern that generates a time-dependent response in the sample; 4) a probe laser that generates a probe laser beam that diffracts off the time-dependent response to form a signal beam; 5) a detector that detects the signal beam and in response generates a radiation-induced electronic response; and 6) a processor that processes the radiation-induced electronic response to determine the property of the sample.

公开(公告)号：US5812261A

公开(公告)日：1998-09-22

申请号：US783046

申请日：1997-01-15

申请人： Keith A. Nelson ,  John A. Rogers ,  Matthew J. Banet ,  John Hanselman ,  Martin Fuchs

发明人： Keith A. Nelson ,  John A. Rogers ,  Matthew J. Banet ,  John Hanselman ,  Martin Fuchs

IPC分类号： B82B1/00 ,  G01B11/06 ,  G01N21/17 ,  G01N21/63 ,  G01N29/24 ,  G01N33/44 ,  G01J3/30

CPC分类号： G01N21/1702 ,  G01B11/0666 ,  G01N21/636 ,  G01N29/2418 ,  G01N29/449 ,  G01N2291/0423 ,  G01N33/44

摘要： A method for determining the thickness of a thin sample is described. The method includes the step of exciting time-dependent acoustic waveguide modes in the sample with an excitation radiation field. The acoustic waveguide modes are detected by diffracting probe radiation off a ripple morphology induced on the sample's surface by the acoustic waveguide modes. The diffracted probe radiation is then analyzed to measure phase velocities or frequencies of the acoustic waveguide modes. A thickness of the thin sample is determined by comparing the measured phase velocities or frequencies to the phase velocities or frequencies calculated from a mathematical model.

公开(公告)号：US06734982B2

公开(公告)日：2004-05-11

申请号：US09795015

申请日：2001-02-28

申请人： Matthew J. Banet ,  Martin Fuchs ,  John A. Rogers

发明人： Matthew J. Banet ,  Martin Fuchs ,  John A. Rogers

IPC分类号： G01B1106

CPC分类号： G01B11/0666

摘要： A method for measuring a structure that contains overlying and underlying films in a region where the overlying film's thickness rapidly decreases until the underlying film is exposed (e.g., an edge-exclusion structure). The method includes the steps of: (1) exciting acoustic modes in a first portion of the region with at least one excitation laser beam; (2) detecting the acoustic modes with a probe laser beam that is either reflected or diffracted to generate a signal beam; (3) analyzing the signal beam to determine a property of the structure (e.g., the thickness of the overlying layer) in the first portion of the region; (4) translating the structure or the excitation and probe laser beams; and (5) repeating the exciting, detecting, and analyzing steps to determine a property of the structure in a second portion of the region.

摘要翻译： 一种用于测量在覆盖膜的厚度迅速减小直到底层膜暴露的区域（例如，边缘排除结构）中的覆盖和下层膜的结构的测量方法。 该方法包括以下步骤：（1）利用至少一个激发激光束激发该区域的第一部分中的声模; （2）用反射或衍射的探针激光束检测声学模式以产生信号光束; （3）分析信号光束以确定该区域的第一部分中的结构的性质（例如，上覆层的厚度）; （4）平移结构或激发和探测激光束; 和（5）重复激励，检测和分析步骤以确定该区域的第二部分中的结构的属性。

公开(公告)号：US06175421B1

公开(公告)日：2001-01-16

申请号：US09318323

申请日：1999-05-25

申请人： Martin Fuchs ,  John A. Rogers ,  Matthew J. Banet

发明人： Martin Fuchs ,  John A. Rogers ,  Matthew J. Banet

IPC分类号： G01B1102

CPC分类号： G01B11/0666 ,  G01B11/06 ,  G01B21/085 ,  G01N21/1717 ,  G01N21/636

摘要： The invention provides an apparatus for measuring a property of a sample (using, e.g., ISTS) that includes: 1) an excitation laser that generates an excitation laser beam; 2) an optical system aligned along an optical axis that separates the excitation laser beam into at least three sub-beams; 3) an imaging system aligned along the optical axis that collects the sub-beams and focuses them onto the sample to form an optical interference pattern that generates a time-dependent response in the sample; 4) a probe laser that generates a probe laser beam that diffracts off the time-dependent response to form a signal beam; 5) a detector that detects the signal beam and in response generates a radiation-induced electronic response; and 6) a processor that processes the radiation-induced electronic response to determine the property of the sample.

摘要翻译： 本发明提供一种用于测量样品（使用例如ISTS）的性质的装置，其包括：1）产生激发激光束的激发激光; 2）沿着光轴对准的光学系统，其将激发激光束分离成至少三个子光束; 3）沿着光轴对准的成像系统，其收集子光束并将它们聚焦到样品上以形成在样品中产生时间依赖性响应的光学干涉图案; 4）探测激光器，其产生衍射时间依赖响应以形成信号光束的探测激光束; 5）检测信号光束并作为响应的检测器产生辐射诱发的电子响应; 以及6）处理器，其处理辐射诱导的电子响应以确定样品的性质。

公开(公告)号：US6052185A

公开(公告)日：2000-04-18

申请号：US885786

申请日：1997-06-30

申请人： Matthew J. Banet ,  John A. Rogers ,  Martin Fuchs

发明人： Matthew J. Banet ,  John A. Rogers ,  Martin Fuchs

IPC分类号： G01N29/00 ,  G01B9/02 ,  G01N21/00 ,  G01N21/17 ,  G01N21/45 ,  H01L21/66

CPC分类号： G01N21/1717 ,  G01N21/17

摘要： A method and apparatus that determines a concentration of ions implanted in a material is described. The method includes the steps of: (1) passing an excitation pulse through a diffracting mask (e.g., a phase or amplitude mask) to generate at least two excitation laser sub-pulses; (2) irradiating a region of the material with a grating pattern, formed by overlapping two excitation laser sub-pulses in time and space to initiate a time-dependent response (e.g., a change in refractive index) in the region; (3) diffracting a probe laser pulse having a duration that is at least long as the time-dependent response off the region to generate a time-dependent signal beam; (4) detecting the time-dependent signal beam to generate a signal waveform; and (5) processing the signal waveform to determine the concentration of ions implanted in the material.

摘要翻译： 描述了确定植入材料中的离子的浓度的方法和装置。 该方法包括以下步骤：（1）使激发脉冲通过衍射掩模（例如，相位或幅度掩模）以产生至少两个激发激光子脉冲; （2）通过在时间和空间上重叠两个激发激光子脉冲而形成的光栅图案照射材料的区域以引发该区域中的时间依赖性响应（例如，折射率的变化）; （3）将具有至少长度的持续时间的探针激光脉冲衍射出所述区域的时间依赖性响应以产生时间相关信号光束; （4）检测时间依赖信号光束以产生信号波形; 和（5）处理信号波形以确定植入材料中的离子的浓度。

公开(公告)号：US06348967B1

公开(公告)日：2002-02-19

申请号：US09568931

申请日：2000-05-11

申请人： Keith A. Nelson ,  John A. Rogers ,  Matthew J. Banet ,  John Hanselman ,  Martin Fuchs

发明人： Keith A. Nelson ,  John A. Rogers ,  Matthew J. Banet ,  John Hanselman ,  Martin Fuchs

IPC分类号： G01N2100

CPC分类号： G01N21/1702 ,  G01B11/0666 ,  G01N21/636 ,  G01N29/2418 ,  G01N29/449 ,  G01N33/44 ,  G01N2291/0423

摘要： A method for determining the thickness of a thin sample is described. The method includes the step of exciting time-dependent acoustic waveguide modes in the sample with an excitation radiation field. The acoustic waveguide modes are detected by diffracting probe radiation off a ripple morphology induced on the sample's surface by the acoustic waveguide modes. The diffracted probe radiation is then analyzed to measure phase velocities or frequencies of the acoustic waveguide modes. A thickness of the thin sample is determined by comparing the measured phase velocities or frequencies to the phase velocities or frequencies calculated from a mathematical model.

摘要翻译： 描述了用于确定薄样品的厚度的方法。 该方法包括利用激发辐射场激发样品中与时间相关的声波导模式的步骤。 通过声波导模式将探针辐射从样品表面感应出的波纹形态衍射出来，来检测声波导模式。 然后分析衍射探针辐射以测量声波导模式的相速度或频率。 通过将测量的相速度或频率与从数学模型计算的相速度或频率进行比较来确定薄样品的厚度。

公开(公告)号：US06256100B1

公开(公告)日：2001-07-03

申请号：US09067411

申请日：1998-04-27

申请人： Matthew J. Banet ,  Martin Fuchs ,  John A. Rogers

发明人： Matthew J. Banet ,  Martin Fuchs ,  John A. Rogers

IPC分类号： G01N2184

CPC分类号： G01B11/0666

摘要： A method for measuring a structure that contains overlying and underlying films in a region where the overlying film's thickness rapidly decreases until the underlying film is exposed (e.g., an edge-exclusion structure). The method includes the steps of: (1) exciting acoustic modes in a first portion of the region with at least one excitation laser beam; (2) detecting the acoustic modes with a probe laser beam that is either reflected or diffracted to generate a signal beam; (3) analyzing the signal beam to determine a property of the structure (e.g., the thickness of the overlying layer) in the first portion of the region; (4) translating the structure or the excitation and probe laser beams; and (5) repeating the exciting, detecting, and analyzing steps to determine a property of the structure in a second portion of the region.

摘要翻译： 一种用于测量在覆盖膜的厚度迅速减小直到底层膜暴露的区域（例如，边缘排除结构）中的覆盖和下层膜的结构的测量方法。 该方法包括以下步骤：（1）利用至少一个激发激光束激发该区域的第一部分中的声模; （2）用反射或衍射的探针激光束检测声学模式以产生信号光束; （3）分析信号光束以确定该区域的第一部分中的结构的性质（例如，上覆层的厚度）; （4）平移结构或激发和探测激光束; 和（5）重复激励，检测和分析步骤以确定该区域的第二部分中的结构的属性。