公开(公告)号：US20090239334A1

公开(公告)日：2009-09-24

申请号：US12052581

申请日：2008-03-20

申请人： Matthew J. Breitwisch ,  Matthew Colburn ,  Eric Joseph ,  Chung Hon Lam ,  Deborah A. Neumayer ,  Alejandro G. Schrott

发明人： Matthew J. Breitwisch ,  Matthew Colburn ,  Eric Joseph ,  Chung Hon Lam ,  Deborah A. Neumayer ,  Alejandro G. Schrott

IPC分类号： H01L21/00

CPC分类号： H01L45/1683 ,  H01L45/06 ,  H01L45/1233 ,  H01L45/144 ,  H01L45/148 ,  H01L45/16

摘要： A method of manufacturing a memory device is provided that in one embodiment includes providing an interlevel dielectric layer including a first via containing a memory material; forming at least one insulating layer on an upper surface of the memory material and the interlevel dielectric layer; forming an cavity through a portion of a thickness of the at least one insulating layer; forming a copolymer mask in at least the cavity, the copolymer mask including at least one opening that provides an exposed surface of a remaining portion of the at least one insulating layer that overlies the memory material; etching the exposed surface of the remaining portion of the at least one insulating layer to provide a second via to the memory material; and forming a conductive material within the second via in electrical contact with the memory material.

摘要翻译： 提供了一种制造存储器件的方法，其在一个实施例中包括提供包括含有存储材料的第一通孔的层间介电层; 在所述存储材料和所述层间电介质层的上表面上形成至少一个绝缘层; 通过所述至少一个绝缘层的厚度的一部分形成空腔; 在至少所述空腔中形成共聚物掩模，所述共聚物掩模包括至少一个开口，所述至少一个开口提供覆盖所述存储材料的所述至少一个绝缘层的剩余部分的暴露表面; 蚀刻所述至少一个绝缘层的剩余部分的暴露表面以向所述存储材料提供第二通孔; 以及在所述第二通孔内与所述记忆材料电接触形成导电材料。

公开(公告)号：US20080316871A1

公开(公告)日：2008-12-25

申请号：US11662017

申请日：2005-09-01

申请人： Patrice Minotti ,  Gilles Bourbon ,  Patrice Le Moal ,  Eric Joseph

发明人： Patrice Minotti ,  Gilles Bourbon ,  Patrice Le Moal ,  Eric Joseph

IPC分类号： G04C3/12 ,  H02N1/00

CPC分类号： G04C3/12

摘要： A drive device formed by etching a wafer. The drive device includes a drive element that can sequentially mesh with a driven element and an actuating element that can displace the drive element according to a hysteresis movement thereby driving the driven element. Placement of the drive element on an outer edge of the wafer enables an interfacing of the drive element with a driven element placed opposite therefrom. A clockwork mechanism including a drive device of the aforementioned type and an input gear that can be rotationally driven by the drive device is also provided.

摘要翻译： 通过蚀刻晶片形成的驱动装置。 驱动装置包括驱动元件，该驱动元件可以与从动元件顺序啮合，并且可以根据滞后移动使驱动元件移位从而驱动从动元件。 将驱动元件放置在晶片的外边缘上，可以使驱动元件与与之相对放置的从动元件进行接口。 还提供了一种包括上述类型的驱动装置和可由驱动装置旋转驱动的输入齿轮的发条机构。

公开(公告)号：US20080150391A1

公开(公告)日：2008-06-26

申请号：US11886512

申请日：2006-03-15

申请人： Patrice Le Moal ,  Gilles Bourbon ,  Patrice Minotti ,  Eric Joseph

发明人： Patrice Le Moal ,  Gilles Bourbon ,  Patrice Minotti ,  Eric Joseph

IPC分类号： H02N1/00

CPC分类号： H02N1/008 ,  Y10T74/1529

摘要： A device comprising an element to be driven and a driving element designed to be urged into engagement with the element to be driven and an actuating element adapted to generate a reciprocating movement to move the driving element, the driving element and the actuating element being formed by etching in a semiconductor material block, are provided. During a first alternation (a) of the movement generated by the actuating element, the driving element is urged into engagement with the element to be driven to pull the element to be driven. During a second alternation (b) in the opposite direction generated by the actuating element, the driving element slides on the element to be driven, such that the element to be driven is displaced in a step-by-step movement by the driving element.

摘要翻译： 一种装置，包括待驱动的元件和设计成被推动与被驱动元件接合的驱动元件，以及适于产生往复运动以使驱动元件移动的致动元件，驱动元件和致动元件由 提供了半导体材料块中的蚀刻。 在由致动元件产生的运动的第一交替（a）期间，驱动元件被推动与待驱动的元件接合以拉动待驱动的元件。 在由致动元件产生的相反方向的第二次交替（b）期间，驱动元件在待驱动的元件上滑动，使得被驱动的元件由驱动元件逐步移动。

公开(公告)号：US20070069604A1

公开(公告)日：2007-03-29

申请号：US10548214

申请日：2004-03-05

申请人： Gilles Bourbon ,  Cyrille Hibert ,  Eric Joseph ,  Patrice Le Moal ,  Patrice Minotti

发明人： Gilles Bourbon ,  Cyrille Hibert ,  Eric Joseph ,  Patrice Le Moal ,  Patrice Minotti

IPC分类号： H02N1/00

CPC分类号： H02N1/008 ,  G04C3/12

摘要： A MEMS device is provided which includes a driven element having a series of teeth. The MEMS device includes a driving element operable to engage the driven element when the driving element is in a meshed position with the series of teeth. A driving actuator of the MEMS device is operable to (i) move the driving element with a hysteresis-type motion from an initial position into the meshed position to engage the driven element, (ii) move the driving element causing the driven element to move while the driving element is in the meshed position, (iii) move the driving element away from the meshed position, and (iv) cause the driving element to return to the initial position while the driving element is not in the meshed position.

摘要翻译： 提供了一种MEMS器件，其包括具有一系列齿的从动元件。 MEMS器件包括驱动元件，当驱动元件处于与该系列齿的啮合位置时，驱动元件可操作以接合从动元件。 MEMS器件的驱动致动器可操作以（i）将驱动元件从初始位置移动到啮合位置，从而接合驱动元件，（ii）移动驱动元件使驱动元件移动 当驱动元件处于啮合位置时，（iii）使驱动元件远离啮合位置，并且（iv）使驱动元件在驱动元件不处于啮合位置时返回初始位置。

公开(公告)号：US08058772B2

公开(公告)日：2011-11-15

申请号：US11886504

申请日：2006-03-16

申请人： Patrice Minotti ,  Gilles Bourbon ,  Patrice Le Moal ,  Eric Joseph

发明人： Patrice Minotti ,  Gilles Bourbon ,  Patrice Le Moal ,  Eric Joseph

IPC分类号： H02N2/12

CPC分类号： H02N1/008

摘要： The invention concerns an element to be driven, a driving element designed to be urged into engagement with the element to be driven and an actuating element adapted to move the driving element so that it drives the element to be driven in step-by-step displacement, the driving element and the actuating element being formed by etching in a semiconductor material wafer. The invention is characterized in that it comprises elastic prestressing means for maintaining the driving element in contact with the element to be driven.

摘要翻译： 本发明涉及要被驱动的元件，被设计成被推动与要驱动的元件接合的驱动元件和适于移动驱动元件的致动元件，使得驱动元件以逐步位移驱动被驱动元件 驱动元件和致动元件通过在半导体材料晶片中进行蚀刻形成。 本发明的特征在于它包括用于保持驱动元件与被驱动元件接触的弹性预应力装置。

公开(公告)号：US07636277B2

公开(公告)日：2009-12-22

申请号：US11662017

申请日：2005-09-01

申请人： Patrice Minotti ,  Gilles Bourbon ,  Patrice Le Moal ,  Eric Joseph

发明人： Patrice Minotti ,  Gilles Bourbon ,  Patrice Le Moal ,  Eric Joseph

IPC分类号： G04F5/00 ,  G04B19/02 ,  H02N1/00

CPC分类号： G04C3/12

摘要： A drive device formed by etching a wafer. The drive device includes a drive element that can sequentially mesh with a driven element and an actuating element that can displace the drive element according to a hysteresis movement thereby driving the driven element. Placement of the drive element on an outer edge of the wafer enables an interfacing of the drive element with a driven element placed opposite therefrom. A clockwork mechanism including a drive device of the aforementioned type and an input gear that can be rotationally driven by the drive device is also provided.

摘要翻译： 通过蚀刻晶片形成的驱动装置。 驱动装置包括驱动元件，该驱动元件可以与从动元件顺序啮合，并且可以根据滞后移动使驱动元件移位从而驱动从动元件。 将驱动元件放置在晶片的外边缘上，可以使驱动元件与与之相对放置的从动元件进行接口。 还提供了一种包括上述类型的驱动装置和可由驱动装置旋转驱动的输入齿轮的发条机构。

公开(公告)号：US07592737B2

公开(公告)日：2009-09-22

申请号：US10548214

申请日：2004-03-05

申请人： Gilles Bourbon ,  Cyrille Hibert ,  Eric Joseph ,  Patrice Le Moal ,  Patrice Minotti

发明人： Gilles Bourbon ,  Cyrille Hibert ,  Eric Joseph ,  Patrice Le Moal ,  Patrice Minotti

IPC分类号： H02N2/00

CPC分类号： H02N1/008 ,  G04C3/12

摘要： A MEMS device is provided which includes a driven element having a series of teeth. The MEMS device includes a driving element operable to engage the driven element when the driving element is in a meshed position with the series of teeth. A driving actuator of the MEMS device is operable to (i) move the driving element with a hysteresis-type motion from an initial position into the meshed position to engage the driven element, (ii) move the driving element causing the driven element to move while the driving element is in the meshed position, (iii) move the driving element away from the meshed position, and (iv) cause the driving element to return to the initial position while the driving element is not in the meshed position.

摘要翻译： 提供了一种MEMS器件，其包括具有一系列齿的从动元件。 MEMS器件包括驱动元件，当驱动元件处于与该系列齿的啮合位置时，驱动元件可操作以接合从动元件。 MEMS器件的驱动致动器可操作以（i）将驱动元件从初始位置移动到啮合位置，从而接合驱动元件，（ii）移动驱动元件使驱动元件移动 当驱动元件处于啮合位置时，（iii）使驱动元件远离啮合位置，并且（iv）使驱动元件在驱动元件不处于啮合位置时返回初始位置。

公开(公告)号：US20090096323A1

公开(公告)日：2009-04-16

申请号：US11886504

申请日：2006-03-16

申请人： Patrice Minotti ,  Gilles Bourbon ,  Patrice Le Moal ,  Eric Joseph

发明人： Patrice Minotti ,  Gilles Bourbon ,  Patrice Le Moal ,  Eric Joseph

IPC分类号： H02N2/12

CPC分类号： H02N1/008

摘要： The invention concerns an element to be driven, a driving element designed to be urged into engagement with the element to be driven and an actuating element adapted to move the driving element so that it drives the element to be driven in step-by-step displacement, the driving element and the actuating element being formed by etching in a semiconductor material wafer. The invention is characterized in that it comprises elastic prestressing means for maintaining the driving element in contact with the element to be driven.

摘要翻译： 本发明涉及要被驱动的元件，被设计成被推动与要驱动的元件接合的驱动元件和适于移动驱动元件的致动元件，使得驱动元件以逐步位移驱动被驱动元件 驱动元件和致动元件通过在半导体材料晶片中进行蚀刻形成。 本发明的特征在于它包括用于保持驱动元件与被驱动元件接触的弹性预应力装置。

公开(公告)号：US08189372B2

公开(公告)日：2012-05-29

申请号：US12025898

申请日：2008-02-05

申请人： Matthew Breitwisch ,  Shihhung Chen ,  Thomas Happ ,  Eric Joseph

发明人： Matthew Breitwisch ,  Shihhung Chen ,  Thomas Happ ,  Eric Joseph

IPC分类号： G11C11/00

CPC分类号： G11C13/0004 ,  G11C8/10

摘要： An integrated circuit includes a first electrode including an etched recessed portion. The integrated circuit includes a second electrode and a resistivity changing material filling the recessed portion and coupled to the second electrode.

摘要翻译： 集成电路包括包括蚀刻凹部的第一电极。 集成电路包括第二电极和填充凹陷部分并耦合到第二电极的电阻率变化材料。

公开(公告)号：US07768161B2

公开(公告)日：2010-08-03

申请号：US11886512

申请日：2006-03-15

申请人： Patrice Le Moal ,  Gilles Bourbon ,  Patrice Minotti ,  Eric Joseph

发明人： Patrice Le Moal ,  Gilles Bourbon ,  Patrice Minotti ,  Eric Joseph

IPC分类号： H02K7/07 ,  H02N1/00

CPC分类号： H02N1/008 ,  Y10T74/1529

摘要： A device comprising an element to be driven and a driving element designed to be urged into engagement with the element to be driven and an actuating element adapted to generate a reciprocating movement to move the driving element, the driving element and the actuating element being formed by etching in a semiconductor material block, are provided. During a first alternation (a) of the movement generated by the actuating element, the driving element is urged into engagement with the element to be driven to pull the element to be driven. During a second alternation (b) in the opposite direction generated by the actuating element, the driving element slides on the element to be driven, such that the element to be driven is displaced in a step-by-step movement by the driving element.

摘要翻译： 一种装置，包括待驱动的元件和设计成被推动与被驱动元件接合的驱动元件，以及适于产生往复运动以使驱动元件移动的致动元件，驱动元件和致动元件由 提供了半导体材料块中的蚀刻。 在由致动元件产生的运动的第一交替（a）期间，驱动元件被推动与待驱动的元件接合以拉动待驱动的元件。 在由致动元件产生的相反方向的第二次交替（b）期间，驱动元件在待驱动的元件上滑动，使得被驱动的元件由驱动元件逐步移动。