公开(公告)号：US11592476B2

公开(公告)日：2023-02-28

申请号：US17024532

申请日：2020-09-17

Applicant: Maury Microwave, Inc.

Inventor： David Brearley ,  Gary R. Simpson

IPC: G01R31/28 ,  G01D5/14 ,  H01P1/00 ,  H01P3/02

Abstract: The accuracy of an impedance tuner may be improved and the size may be reduced by using linear actuators instead of rotary motors. The linear actuator may be integrated with position sensors to allow very small size, and implemented with a servo system for best accuracy and speed. Spring loaded arms holding the mismatch probes allow the tuner to operate in any orientation to further fit into small spaces. The small size reduces losses by allowing direct connection to wafer probes for on-wafer measurement systems.

公开(公告)号：US20220082614A1

公开(公告)日：2022-03-17

申请号：US17024532

申请日：2020-09-17

Applicant: Maury Microwave, Inc.

Inventor： David Brearley ,  Gary R. Simpson

IPC: G01R31/28 ,  H01P1/00 ,  H01P3/02 ,  G01D5/14

Abstract: The accuracy of an impedance tuner may be improved and the size may be reduced by using linear actuators instead of rotary motors. The linear actuator may be integrated with position sensors to allow very small size, and implemented with a servo system for best accuracy and speed. Spring loaded arms holding the mismatch probes allow the tuner to operate in any orientation to further fit into small spaces. The small size reduces losses by allowing direct connection to wafer probes for on-wafer measurement systems.