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公开(公告)号：US11592476B2
公开(公告)日：2023-02-28
申请号：US17024532
申请日：2020-09-17
Applicant: Maury Microwave, Inc.
Inventor： David Brearley , Gary R. Simpson
Abstract: The accuracy of an impedance tuner may be improved and the size may be reduced by using linear actuators instead of rotary motors. The linear actuator may be integrated with position sensors to allow very small size, and implemented with a servo system for best accuracy and speed. Spring loaded arms holding the mismatch probes allow the tuner to operate in any orientation to further fit into small spaces. The small size reduces losses by allowing direct connection to wafer probes for on-wafer measurement systems.
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公开(公告)号：US11199568B2
公开(公告)日：2021-12-14
申请号：US16580553
申请日：2019-09-24
Applicant: Maury Microwave, Inc.
Inventor： Giampiero Esposito , Mauro Marchetti , Sathya Padmanabhan , Gary R. Simpson
IPC: G01R27/32 , G01R31/3193 , G01R31/317 , G01R31/28
Abstract: A load pull system for making measurements on a DUT at millimeter wave frequencies using active tuning. The system uses phase and amplitude control of each signal at low frequency before being upconverted to the millimeter wave measurement frequencies. The measured signals at the DUT plane may be down-converted for measurement with a low frequency analyzer.
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公开(公告)号：US20170285085A1
公开(公告)日：2017-10-05
申请号：US15595769
申请日：2017-05-15
Applicant: Maury Microwave, Inc.
Inventor： Ali Boudiaf , Roman Meierer , Gary R. Simpson
CPC classification number: G01R31/02 , G01R1/00 , G01R27/28 , G01R35/00 , H01L2221/00 , H03H1/00 , H03H7/38 , H03H7/40 , H03H11/28 , H04B2201/00
Abstract: A solid state impedance tuner or impedance tuner system including a housing structure and at least two solid state tuner modules electrically combined and disposed in one package within the housing structure. Each tuner module includes at least one solid state control element.Another embodiment is directed to an impedance tuner module card configured in a standardized system architecture. The card includes a chassis board, and at least one solid state tuner module integrated on the card and supported on or by the chassis board, each module including at least one solid state control element.Methods for calibrating a solid state impedance tuner that includes at least two solid state tuner modules combined in one package are disclosed.
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公开(公告)号：US20130321092A1
公开(公告)日：2013-12-05
申请号：US13903399
申请日：2013-05-28
Applicant: Maury Microwave, Inc.
Inventor： Gary R. Simpson
IPC: H03H11/30
CPC classification number: H03H11/30 , G01R27/00 , G01R27/28 , G01R33/00 , H01R13/646
Abstract: An impedance tuner system that uses at least one passive tuner and at least one active tuner to control one or more impedances at a reference plane or planes. Each of the at least one active tuners operates at a target frequency at which the impedance is to be controlled. The passive tuner is set to a passive tuner target impedance before active tuners are set to their target impedances.
Abstract translation: 阻抗调谐器系统，其使用至少一个无源调谐器和至少一个有源调谐器来控制参考平面或平面处的一个或多个阻抗。 所述至少一个有源调谐器中的每一个在待控制阻抗的目标频率下工作。 无源调谐器设置为被动调谐器目标阻抗，然后将有源调谐器设置为目标阻抗。
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公开(公告)号：US10652051B2
公开(公告)日：2020-05-12
申请号：US16115158
申请日：2018-08-28
Applicant: Maury Microwave, Inc.
Inventor： Gary R. Simpson , Sathya Padmanabhan , Steven M. Dudkiewicz , M. Tekamül Büber , Giampiero Esposito
IPC: H04L25/02 , G01R31/319 , G01R27/32 , G01R31/28
Abstract: A load pull system and method for calibrating the system and conducting measurements on a Device Under Test (DUT). The system includes at least one passive tuner; and a modulated signal connected to the DUT input. The passive tuner is calibrated at multiple frequencies within the modulation bandwidth of the modulated signal. The impedance and measured quantities such as power at the DUT reference plane are determined using tuner s-parameters at multiple frequencies within the modulation bandwidth.
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Patent Agency Ranking
公开(公告)号：US09709654B2
公开(公告)日：2017-07-18
申请号：US14461668
申请日：2014-08-18
Applicant: Maury Microwave, Inc.
Inventor： Gary R. Simpson
CPC classification number: G01R35/005 , G01R27/04 , G01R27/28 , G01R31/2822 , G01R31/2837 , G01R31/2839
Abstract: A measurement system and method for conducting measurements on a device-under-test (DUT). The system includes, in one embodiment, a passive impedance controlling tuner, and a signal transmission line, the tuner including a signal transmission line segment as at least part of the signal transmission line. A signal coupling device is coupled in a non-contacting relationship to the signal transmission line between a signal port of the DUT and the tuner for sampling signals propagating between the passive impedance controlling tuner and the DUT to allow measurement of an actual impedance presented to the DUT with the DUT in place in the measurement system during measurement of DUT characteristics. Measurement system equipment receives response signals from the signal coupler. The measurement system is configured to conduct measurement of DUT characteristics without pre-characterizing the impedance controlling tuner.
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公开(公告)号：US09660607B2
公开(公告)日：2017-05-23
申请号：US14284862
申请日：2014-05-22
Applicant: Maury Microwave, Inc.
Inventor： Ali Boudiaf , Roman Meierer , Gary R. Simpson
CPC classification number: G01R31/02 , G01R1/00 , G01R27/28 , G01R35/00 , H01L2221/00 , H03H1/00 , H03H7/38 , H03H7/40 , H03H11/28 , H04B2201/00
Abstract: A solid state impedance tuner or impedance tuner system includes a control element array with a plurality of solid state control elements configured to be turned on simultaneously to achieve a desired impedance state. The control element array comprises N solid state control elements arranged along an RF transmission line. A controller selectively turns on or off each control element by application of a control signal to vary an impedance presented by the control element array, Another aspect is an impedance tuner module card configured in a standardized system architecture, with a chassis board, and at least one solid state tuner module integrated on the card A chassis electrical connector connected to the tuner module is configured for connection to a corresponding backplane connector. Methods for calibrating a solid state impedance tuner that includes at least two solid state tuner modules combined in one package are disclosed.
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公开(公告)号：US20150035613A1
公开(公告)日：2015-02-05
申请号：US14446855
申请日：2014-07-30
Applicant: Maury Microwave, Inc.
Inventor： Steven M. Dudkiewicz , Gary R. Simpson
IPC: H03H7/40
Abstract: A mechanical impedance tuner has at least two probe carriages mounted for movement along an axis parallel to the center conductor. The at least two probe carriages including a first probe carriage and a second probe carriage. Each probe carriage has at least N probes where N is an integer equal to or greater than one, and at least one of the N probes is mechanically different or of different nominal geometry from the probes on at least one of the other carriages so that each such probe has an non-identical frequency response.
Abstract translation: 机械阻抗调谐器具有安装用于沿着平行于中心导体的轴线移动的至少两个探针支架。 所述至少两个探针支架包括第一探针托架和第二探针托架。 每个探针托架具有至少N个探针，其中N是等于或大于1的整数，并且N个探针中的至少一个在至少一个其它托架上与探针在机械上不同或具有不同的标称几何形状，使得每个 这种探针具有不相同的频率响应。
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公开(公告)号：US20220082614A1
公开(公告)日：2022-03-17
申请号：US17024532
申请日：2020-09-17
Applicant: Maury Microwave, Inc.
Inventor： David Brearley , Gary R. Simpson
Abstract: The accuracy of an impedance tuner may be improved and the size may be reduced by using linear actuators instead of rotary motors. The linear actuator may be integrated with position sensors to allow very small size, and implemented with a servo system for best accuracy and speed. Spring loaded arms holding the mismatch probes allow the tuner to operate in any orientation to further fit into small spaces. The small size reduces losses by allowing direct connection to wafer probes for on-wafer measurement systems.
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公开(公告)号：US11156690B2
公开(公告)日：2021-10-26
申请号：US16129415
申请日：2018-09-12
Applicant: Maury Microwave, Inc.
Inventor： Gary R. Simpson
Abstract: A tuner system for conducting measurements on a Device Under Test (DUT) includes at least one passive tuner, and calibration data for the at least one passive tuner including a set of s-parameters at a set of calibration frequencies. A measurement on the DUT is done at a measurement frequency at which the at least one passive tuner is not calibrated. The tuner s-parameters at the measurement frequency are determined by interpolation between or extrapolation from the s-parameters at calibration frequencies.
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