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公开(公告)号：US11592476B2
公开(公告)日：2023-02-28
申请号：US17024532
申请日：2020-09-17
发明人： David Brearley , Gary R. Simpson
摘要： The accuracy of an impedance tuner may be improved and the size may be reduced by using linear actuators instead of rotary motors. The linear actuator may be integrated with position sensors to allow very small size, and implemented with a servo system for best accuracy and speed. Spring loaded arms holding the mismatch probes allow the tuner to operate in any orientation to further fit into small spaces. The small size reduces losses by allowing direct connection to wafer probes for on-wafer measurement systems.
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公开(公告)号：US11199568B2
公开(公告)日：2021-12-14
申请号：US16580553
申请日：2019-09-24
IPC分类号： G01R27/32 , G01R31/3193 , G01R31/317 , G01R31/28
摘要： A load pull system for making measurements on a DUT at millimeter wave frequencies using active tuning. The system uses phase and amplitude control of each signal at low frequency before being upconverted to the millimeter wave measurement frequencies. The measured signals at the DUT plane may be down-converted for measurement with a low frequency analyzer.
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公开(公告)号：US10979016B2
公开(公告)日：2021-04-13
申请号：US16712907
申请日：2019-12-12
摘要： A multi-section probe and a tapered probe for impedance tuners to broaden the band width of the probes and hence the band width of the tuners. The multi-section probe and the tapered probe are configured to transform the characteristic impedance of the tuner transmission line step-by-step or continuously to a target impedance value.
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公开(公告)号：US10651528B2
公开(公告)日：2020-05-12
申请号：US15823463
申请日：2017-11-27
摘要： A directional coupler operable at microwave and RF frequencies. Embodiments of directional coupler includes a main transmission line supporting transverse electromagnetic (TEM) or quasi-TEM wave mode propagation. A coupled transmission line supports TEM or quasi-TEM wave mode propagation. The coupled transmission line is adjacent to and oriented at an angle with respect to the main transmission line. A coupling hole is formed through conductive shielding between the main and coupled lines, the coupling hole formed at an intersection region between the main and coupled lines. The angle is nominally 60 degrees for optimal directivity and isolation.
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公开(公告)号：US20170285085A1
公开(公告)日：2017-10-05
申请号：US15595769
申请日：2017-05-15
发明人： Ali Boudiaf , Roman Meierer , Gary R. Simpson
CPC分类号： G01R31/02 , G01R1/00 , G01R27/28 , G01R35/00 , H01L2221/00 , H03H1/00 , H03H7/38 , H03H7/40 , H03H11/28 , H04B2201/00
摘要： A solid state impedance tuner or impedance tuner system including a housing structure and at least two solid state tuner modules electrically combined and disposed in one package within the housing structure. Each tuner module includes at least one solid state control element.Another embodiment is directed to an impedance tuner module card configured in a standardized system architecture. The card includes a chassis board, and at least one solid state tuner module integrated on the card and supported on or by the chassis board, each module including at least one solid state control element.Methods for calibrating a solid state impedance tuner that includes at least two solid state tuner modules combined in one package are disclosed.
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公开(公告)号：US20130321092A1
公开(公告)日：2013-12-05
申请号：US13903399
申请日：2013-05-28
发明人： Gary R. Simpson
IPC分类号： H03H11/30
CPC分类号： H03H11/30 , G01R27/00 , G01R27/28 , G01R33/00 , H01R13/646
摘要： An impedance tuner system that uses at least one passive tuner and at least one active tuner to control one or more impedances at a reference plane or planes. Each of the at least one active tuners operates at a target frequency at which the impedance is to be controlled. The passive tuner is set to a passive tuner target impedance before active tuners are set to their target impedances.
摘要翻译： 阻抗调谐器系统，其使用至少一个无源调谐器和至少一个有源调谐器来控制参考平面或平面处的一个或多个阻抗。 所述至少一个有源调谐器中的每一个在待控制阻抗的目标频率下工作。 无源调谐器设置为被动调谐器目标阻抗，然后将有源调谐器设置为目标阻抗。
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公开(公告)号：US20220082614A1
公开(公告)日：2022-03-17
申请号：US17024532
申请日：2020-09-17
发明人： David Brearley , Gary R. Simpson
摘要： The accuracy of an impedance tuner may be improved and the size may be reduced by using linear actuators instead of rotary motors. The linear actuator may be integrated with position sensors to allow very small size, and implemented with a servo system for best accuracy and speed. Spring loaded arms holding the mismatch probes allow the tuner to operate in any orientation to further fit into small spaces. The small size reduces losses by allowing direct connection to wafer probes for on-wafer measurement systems.
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公开(公告)号：US11156690B2
公开(公告)日：2021-10-26
申请号：US16129415
申请日：2018-09-12
发明人： Gary R. Simpson
摘要： A tuner system for conducting measurements on a Device Under Test (DUT) includes at least one passive tuner, and calibration data for the at least one passive tuner including a set of s-parameters at a set of calibration frequencies. A measurement on the DUT is done at a measurement frequency at which the at least one passive tuner is not calibrated. The tuner s-parameters at the measurement frequency are determined by interpolation between or extrapolation from the s-parameters at calibration frequencies.
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公开(公告)号：US20190086503A1
公开(公告)日：2019-03-21
申请号：US16129415
申请日：2018-09-12
发明人： Gary R. Simpson
摘要： A tuner system for conducting measurements on a Device Under Test (DUT) includes at least one passive tuner, and calibration data for the at least one passive tuner including a set of s-parameters at a set of calibration frequencies. A measurement on the DUT is done at a measurement frequency at which the at least one passive tuner is not calibrated. The tuner s-parameters at the measurement frequency are determined by interpolation between or extrapolation from the s-parameters at calibration frequencies.
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公开(公告)号：US20190081822A1
公开(公告)日：2019-03-14
申请号：US16115158
申请日：2018-08-28
发明人： Gary R. Simpson , Sathya Padmanabhan , Steven M. Dudkiewicz , M. Tekamül Büber , Giampiero Esposito
IPC分类号： H04L25/02 , G01R31/319
摘要： A load pull system and method for calibrating the system and conducting measurements on a Device Under Test (DUT). The system includes at least one passive tuner; and a modulated signal connected to the DUT input. The passive tuner is calibrated at multiple frequencies within the modulation bandwidth of the modulated signal. The impedance and measured quantities such as power at the DUT reference plane are determined using tuner s-parameters at multiple frequencies within the modulation bandwidth.
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