公开(公告)号：US11677042B2

公开(公告)日：2023-06-13

申请号：US16833614

申请日：2020-03-29

Applicant: Meta Platforms Technologies, LLC

Inventor： Markus Broell ,  Michael Grundmann ,  David Hwang ,  Stephan Lutgen ,  Brian Matthew Mcskimming ,  Anurag Tyagi

IPC: H01L33/32 ,  H01L33/00 ,  H01L27/15

CPC classification number: H01L33/0095 ,  H01L27/156 ,  H01L33/0075 ,  H01L33/32

Abstract: Disclosed herein are methods, systems, and apparatuses for an light emitting diode (LED) array apparatus. In some embodiments, the LED array apparatus may include a plurality of mesas etched from a layered epitaxial structure. The layered epitaxial structure may include a P-type doped semiconductor layer, a active layer, and an N-type doped semiconductor layer. The LED array apparatus may also include one or more regrowth semiconductor layers, including a first regrowth semiconductor layer, which may be grown epitaxially over etched facets of the plurality of mesas. In some cases, for each mesa, the first regrowth semiconductor layer may overlay etched facets of the P-type doped semiconductor layer, the active layer, and the N-type doped semiconductor layer, around an entire perimeter of the mesa.