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8 条记录 (耗时 0.022 秒)

    Transport Device, Especially for Transporting Flat Substrates Through a Coating Installation
    6.
    发明申请
    Transport Device, Especially for Transporting Flat Substrates Through a Coating Installation 有权
    运输装置，特别是通过涂层安装运输平板基板

    公开(公告)号：US20090188776A1

    公开(公告)日：2009-07-30

    申请号：US11918010

    申请日：2006-04-07

    申请人： Michael Hentschel ,  Steffen Lessmann ,  Michael Huhn ,  Reinhard Jaeger ,  Ricky C. Powell

    发明人： Michael Hentschel ,  Steffen Lessmann ,  Michael Huhn ,  Reinhard Jaeger ,  Ricky C. Powell

    IPC分类号： B65G13/06

    CPC分类号： B05B13/0221 ,  B05B14/00

    摘要： The invention relates to a transport device, especially for transporting flat substrates through a coating installation. Said transport device comprises a plurality of transport rolls (4) disposed at an angle to the direction of transport (2) and received on both sides in a rotational manner. The upper surface lines of the transport rolls (4) define the plane of transport (3) and at least a part of the transport rolls (4) can be driven. The invention is characterized in that at least a plurality of backup rolls (5) is disposed at an angle to the direction of transport (2) and are received on both sides in a rotational manner in a parallel plane (6) which lies below the plane of transport (3). In an embodiment of the invention, at least one bridging roll (8) is provided. Said bridging roll lies in parallel on the two backup rolls (5) and has a diameter selected in such a manner that the upper surface line of the roll lies in the plane of transport (3).

    摘要翻译： 本发明涉及一种输送装置，特别是用于通过涂布装置输送平板基板。 所述输送装置包括多个输送辊（4），该输送辊（4）以与转运方向（2）成一定角度设置并以旋转的方式在两侧接收。 输送辊（4）的上表面线限定输送平面（3），并且可以驱动至少一部分输送辊（4）。 本发明的特征在于，至少多个支承辊（5）以与输送方向（2）成一定角度的方式设置，并且在旋转方向上以平行平面（6）的方式被容纳在两侧 交通工具（3）。 在本发明的一个实施例中，提供至少一个桥接辊（8）。 所述桥接辊平行于两个支承辊（5）并且具有以使辊的上表面线位于输送平面（3）中的方式选择的直径。

    Vacuum Coating System for Coating Elongate Substrates
    8.
    发明申请
    Vacuum Coating System for Coating Elongate Substrates 审中-公开
    涂层细长基材真空镀膜系统

    公开(公告)号：US20080035477A1

    公开(公告)日：2008-02-14

    申请号：US10577600

    申请日：2004-11-04

    申请人： Olaf Gawer ,  Jens Melcher ,  Steffen Lessmann ,  Erwin Zschieschang

    发明人： Olaf Gawer ,  Jens Melcher ,  Steffen Lessmann ,  Erwin Zschieschang

    IPC分类号： C23C14/56 ,  C23C14/35 ,  H01J37/34

    CPC分类号： C23C14/568 ,  C23C14/35

    摘要： A vacuum coating system for coating elongate substrates includes one or several coating sections and one or several pump sections, at lease one magnetron in an arrangement as a sputter-down-variant above the substrate which has a target surface opposite the upper side of the substrate and/or in an arrangement as a sputter-up-variant below the substrate which has a target surface opposite the lower side of the substrate, and a transport device. The aim is to form an inline coating system for the two lateral coatings of elongate substrates, wherein construction costs and space required are reduced. The aim is achieved by use of a transport device arranged in a divided manner on a drive plane and on a transport plane. In sputter-up-variants, the underside of a magnetron body containing the magnetron lies above the drive plane.

    摘要翻译： 用于涂覆细长衬底的真空涂覆系统包括一个或多个涂覆部分和一个或多个泵部分，至少一个磁控管在布置中作为在衬底上方的溅射变形，其具有与衬底的上侧相对的目标表面 和/或以具有与基板的下侧相对的目标表面的基板下方的溅射上变型的布置和输送装置。 目的是形成用于细长基板的两个侧向涂层的在线涂覆系统，其中减少了所需的结构成本和空间。 目的是通过使用在驱动平面上和传送平面上以分割方式布置的传送装置来实现的。 在溅射式变型中，包含磁控管的磁控管体的下侧位于驱动平面的上方。