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1.发明授权Achromatic optical system including diffractive optical element, and method of forming same 失效包括衍射光学元件的消色差光学系统及其形成方法
公开(公告)号：US5774239A
公开(公告)日：1998-06-30
申请号：US771710
申请日：1996-12-20
CPC分类号： G02B27/0037 , G02B27/4272 , G02B27/4288 , G02B27/4294 , G02B5/1876 , G02B5/188 , G02B5/189 , G02B5/32 , G02B6/262 , G02B6/4206
摘要： An achromatic optical system that preferably includes a light source for emitting light therefrom, an achromatic optical element positioned to receive light emitted from the light source, and an optical detector positioned to receive and detect light passing through the optical element. The achromatic optical element preferably includes a substrate having opposing sides, a first computer generated hologram positioned on one side of the substrate and adapted to receive light emitted from the light source, and a second computer generated hologram positionally aligned on the opposite side of the substrate and adapted to receive light passing through the substrate from the first hologram at a predetermined location thereon. A method of forming an achromatic diffractive optical element is also provided which includes the steps of determining a first data set comprising a plurality of discrete phase values and discrete transition values and selecting from the first data set phase values and transition values to form a second data set for defining first and second holograms. A discrete value of the second data set is then replaced by another discrete value from the first data set. A change of an optical system error function is then determined responsive to the replacement in the second data set. If the error function is reduced, the new data set is retained.
摘要翻译： 优选地包括用于从其发射光的光源的消色差光学系统，定位成接收从光源发射的光的消色差光学元件，以及定位成接收和检测通过光学元件的光的光学检测器。 消色差光学元件优选地包括具有相对侧面的基板，第一计算机产生的全息图位于基板的一侧上并且适于接收从光源发射的光，以及第二计算机产生的全息图，位于对准在基板的相对侧 并且适于在其上的预定位置处接收从第一全息图穿过基板的光。 还提供了一种形成消色差衍射光学元件的方法，其包括以下步骤：确定包括多个离散相位值和离散转变值的第一数据集，并从第一数据集相位值和转换值中选择形成第二数据 用于定义第一和第二全息图。 然后，第二数据集的离散值被来自第一数据集的另一个离散值替换。 然后响应于第二数据组中的替换来确定光学系统误差函数的改变。 如果误差函数减少，则保留新的数据集。
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公开(公告)号：US5606434A
公开(公告)日：1997-02-25
申请号：US269919
申请日：1994-06-30
CPC分类号： G02B27/0037 , G02B27/4272 , G02B27/4288 , G02B27/4294 , G02B5/1876 , G02B5/188 , G02B5/189 , G02B5/32 , G02B6/262 , G02B6/4206
摘要： An aromatic optical system that preferably includes a light source for emitting light therefrom, an achromatic optical element positioned to receive light emitted from the light source, and an optical detector positioned to receive and detect light passing through the optical element. The achromatic optical element preferably includes a substrate having opposing sides, a first computer generated hologram positioned on one side of the substrate and adapted to receive light emitted from the light source, and a second computer generated hologram positionally aligned on the opposite side of the substrate and adapted to receive light passing through the substrate from the first hologram at a predetermined location thereon. A method of forming an achromatic diffractive optical element is also provided which includes the steps of determining a first data set comprising a plurality of discrete phase values and discrete transition values and selecting from the first data set phase values and transition values to form a second data set for defining first and second holograms. A discrete value of the second data set is then replaced by another discrete value from the first data set. A change of an optical system error function is then determined responsive to the replacement in the second data set. If the error function is reduced, the new data set is retained.
摘要翻译： 优选地包括用于从其发射光的光源的芳族光学系统，定位成接收从光源发射的光的消色差光学元件，以及定位成接收和检测通过光学元件的光的光学检测器。 消色差光学元件优选地包括具有相对侧面的基板，第一计算机产生的全息图位于基板的一侧上并且适于接收从光源发射的光，以及第二计算机产生的全息图，位于对准在基板的相对侧 并且适于在其上的预定位置处接收从第一全息图穿过基板的光。 还提供了一种形成消色差衍射光学元件的方法，其包括以下步骤：确定包括多个离散相位值和离散转变值的第一数据集，并从第一数据集相位值和转换值中选择形成第二数据 用于定义第一和第二全息图。 然后，第二数据集的离散值被来自第一数据集的另一个离散值替换。 然后响应于第二数据组中的替换来确定光学系统误差函数的改变。 如果误差函数减少，则保留新的数据集。
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公开(公告)号：US07423269B1
公开(公告)日：2008-09-09
申请号：US11360325
申请日：2006-02-22
CPC分类号： H01J37/222 , G03F7/70625 , H01J37/1478 , H01J37/28 , H01J2237/24578 , H01J2237/2809 , H01J2237/2817
摘要： One embodiment relates to a method of automated microalignment using off-axis beam tilting. Image data is collected from a region of interest on a substrate at multiple beam tilts. Potential edges of a feature to be identified in the region are determined, and computational analysis of edge-related data is performed to positively identify the feature(s). Another embodiment relates to a method of automated detection of undercut on a feature using off-axis beam tilting. For each beam tilt, a determination is made of difference data between the edge measurement of one side and the edge measurement of the other side. An undercut on the feature is detected from the difference data. Other embodiments are also disclosed.
摘要翻译： 一个实施例涉及使用离轴光束倾斜的自动微距对准方法。 在多个光束倾斜的基底上从感兴趣的区域收集图像数据。 确定要在该区域中识别的特征的潜在边缘，并且执行边缘相关数据的计算分析以肯定地识别特征。 另一实施例涉及使用离轴光束倾斜在特征上自动检测底切的方法。 对于每个光束倾斜，确定一侧的边缘测量与另一侧的边缘测量之间的差数据。 根据差异数据检测该特征的底切。 还公开了其他实施例。
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4.发明授权Methods and apparatus for classification of defects using surface height attributes 有权使用表面高度属性分类缺陷的方法和装置公开(公告)号：US08502146B2
公开(公告)日：2013-08-06
申请号：US13252042
申请日：2011-10-03
申请人： Chien-Huei Chen , Hedong Yang , Cho H. Teh
发明人： Chien-Huei Chen , Hedong Yang , Cho H. Teh
IPC分类号： G01N23/00
CPC分类号： H01L22/12 , G06T7/0006 , G06T2207/10012 , G06T2207/10028 , G06T2207/10061 , G06T2207/30148 , H01L21/67288
摘要： One embodiment relates to a method of classifying a defect on a substrate surface. The method includes scanning a primary electron beam over a target region of the substrate surface causing secondary electrons to be emitted therefrom, wherein the target region includes the defect. The secondary electrons are detected from the target region using a plurality of at least two off-axis sensors so as to generate a plurality of image frames of the target region, each image frame of the target region including data from a different off-axis sensor. The plurality of image data frames are processed to generate a surface height map of the target region, and surface height attributes are determined for the defect. The surface height attributes for the defect are input into a defect classifier. Other embodiments, aspects and features are also disclosed.
摘要翻译： 一个实施例涉及对衬底表面上的缺陷进行分类的方法。 该方法包括在衬底表面的目标区域上扫描一次电子束，导致二次电子从其发射，其中目标区域包括缺陷。 使用多个至少两个离轴传感器从目标区域检测二次电子，以便产生目标区域的多个图像帧，目标区域的每个图像帧包括来自不同离轴传感器的数据 。 处理多个图像数据帧以生成目标区域的表面高度图，并且为缺陷确定表面高度属性。 缺陷的表面高度属性被输入到缺陷分类器中。 还公开了其它实施例，方面和特征。
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公开(公告)号：US08669523B2
公开(公告)日：2014-03-11
申请号：US13410506
申请日：2012-03-02
申请人： Chien-Huei Chen , Peter White , Michael J. Van Riet , Sankar Venkataraman , Hai Jiang , Hedong Yang , Ajay Gupta
发明人： Chien-Huei Chen , Peter White , Michael J. Van Riet , Sankar Venkataraman , Hai Jiang , Hedong Yang , Ajay Gupta
CPC分类号： H01J37/28 , G01N23/04 , G06T5/50 , G06T7/001 , G06T2207/30148 , H01J37/05 , H01J37/222 , H01J37/244
摘要： One embodiment relates to a method of inspecting a site location on a target substrate. Contours are obtained, the contours having been generated from a reference image using a design clip. A target image of the site location is acquired. The contours are aligned to the target image, and contrast values are computed for pixels on the contours. A threshold is applied to the contrast values to determine contour-based defect blobs. Another embodiment relates to a method of generating contours for use in inspecting a site location for defects. Other embodiments, aspects and features are also disclosed.
摘要翻译： 一个实施例涉及一种检查目标基板上的位置位置的方法。 获得轮廓，使用设计剪辑从参考图像生成轮廓。 获取站点位置的目标图像。 轮廓与目标图像对齐，并且对轮廓线上的像素计算对比度值。 将阈值应用于对比度值以确定基于轮廓的缺陷斑点。 另一个实施例涉及一种产生用于检查位置缺陷的轮廓的方法。 还公开了其它实施例，方面和特征。
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6.发明授权公开(公告)号：US06995369B1
公开(公告)日：2006-02-07
申请号：US10876833
申请日：2004-06-24
申请人： Matthew Lent , Amir Azordegan , Hedong Yang
发明人： Matthew Lent , Amir Azordegan , Hedong Yang
IPC分类号： H01J37/28
CPC分类号： H01J37/28 , G06T5/002 , G06T5/50 , G06T2207/10061 , H01J37/222
摘要： One embodiment disclosed relates to a scanning electron beam apparatus. The apparatus includes an electron beam column, a scanning system, and a detection system. Circuitry in the apparatus is configured to store detected pixel data from each scan into one of the multiple frame buffers. A multi-frame data processor is configured to analyze the pixel data available in the multiple frame buffers. Another embodiment disclosed relates to a scanning electron beam apparatus having a data processor is configured to process the image data with a filter function having a filter strength, store results of the processing, and repeat the processing and the storing using various filter strengths. The results of the processing may comprise a critical dimension measurement at each filter strength.
摘要翻译： 公开的一个实施例涉及一种扫描电子束装置。 该装置包括电子束柱，扫描系统和检测系统。 设备中的电路被配置为将来自每个扫描的检测到的像素数据存储到多个帧缓冲器之一中。 多帧数据处理器被配置为分析在多帧缓冲器中可用的像素数据。 所公开的另一实施例涉及一种具有数据处理器的扫描电子束装置，其配置为利用具有滤波强度的滤波器功能处理图像数据，存储处理结果，并且使用各种滤波器强度重复处理和存储。 处理的结果可以包括在每个过滤器强度下的临界尺寸测量。
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公开(公告)号：US07173243B1
公开(公告)日：2007-02-06
申请号：US11020586
申请日：2004-12-22
申请人： Hedong Yang , Amir Azordegan
发明人： Hedong Yang , Amir Azordegan
IPC分类号： G01R31/305
CPC分类号： H01J37/21 , G01R31/305 , H01J37/28 , H01J2237/216
摘要： One embodiment disclosed relates to an automated process for focusing a charged-particle beam in an apparatus onto an area of a substrate. A focusing parameter of the apparatus is set to a value, and intensity data is acquired from the area. The foregoing setting and acquiring steps are repeated for a range of values for the focusing parameter. A focusing sharpness measure is computed for each value of the focusing parameter based on noise in the acquired intensity data, and an in-focus value is determined for the focusing parameter based on the computed focusing sharpness measures. The focusing parameter of the apparatus may be, for example, an objective lens current, or a substrate bias voltage. The computation of the noise-based focusing sharpness measure may involve generating shifted or interleaved signals and calculating correlations between these signals. The focusing may be advantageously performed on an area lacking substantial edge information.
摘要翻译： 公开的一个实施例涉及用于将装置中的带电粒子束聚焦到基板的区域上的自动化方法。 将该装置的聚焦参数设置为一个值，并从该区域获取强度数据。 对于聚焦参数的值的范围重复上述设置和获取步骤。 基于所获取的强度数据中的噪声，针对聚焦参数的每个值计算聚焦锐度度量，并且基于所计算的聚焦锐度度量确定聚焦参数的聚焦值。 该装置的聚焦参数可以是例如物镜电流或衬底偏置电压。 基于噪声的聚焦清晰度测量的计算可以涉及产生移位或交织的信号并且计算这些信号之间的相关性。 可以有利地在缺少实质边缘信息的区域上进行聚焦。
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8.发明授权Method and apparatus for confirming the identity of an individual presenting an identification card 失效用于确认呈现身份证件的个人身份的方法和装置
公开(公告)号：US5509083A
公开(公告)日：1996-04-16
申请号：US259879
申请日：1994-06-15
CPC分类号： G07F7/1008 , G06K7/10831 , G06K9/00013 , G06Q20/341 , G06Q20/40145 , G07C9/00087
摘要： A system for confirming the identity of an individual presenting an identification card includes a card reader, an associated central processing unit, a preselected feature template library associated with the central processing unit, a scanner for scanning preselected portions of an epidermis, such as a fingerprint, RAM storage means operatively associated with the central processing unit and the scanner, a communication interface such as a modem communicating with a remote site, and an output display indicating the identifier correlation. This invention provides an improved method of verifying that a card holder is the card owner by matching the image of the card holder's fingerprint to the unique code which has been assigned to the card owner and encoded on the card's magnetic strip, which requires only a relatively small amount of data to perform identification, making it possible to use low cost, low density encoding methods including bar code and magnetic strip. Fingerprint verification apparatus is also disclosed.
摘要翻译： 用于确认呈现身份证件的个体的身份的系统包括读卡器，相关联的中央处理单元，与中央处理单元相关联的预选特征模板库，用于扫描表皮的预选部分的扫描器，诸如指纹 ，与中央处理单元和扫描器可操作地相关联的RAM存储装置，诸如与远程站点通信的调制解调器之类的通信接口以及指示标识符相关性的输出显示器。 本发明提供了一种改进的方法，其通过将卡持有者的指纹的图像与分配给卡所有者并编码在卡的磁条上的唯一代码进行匹配来验证卡持有者是卡所有者，其仅需要相对 少量的数据进行识别，使得可以使用低成本，低密度编码方法，包括条形码和磁条。 还公开了指纹验证装置。
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