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公开(公告)号：US09063354B1
公开(公告)日：2015-06-23
申请号：US13368127
申请日：2012-02-07
CPC分类号： G02F1/01 , G02B6/29389 , G02B6/35 , G02B6/3576 , G02B6/3582 , G02F1/0147 , G02F1/025 , G02F2203/15
摘要： Thermal control devices, photonic systems and methods of stabilizing a temperature of a photonic system are provided. A thermal control device thermally coupled to a substrate includes a waveguide for receiving light, an absorption element optically coupled to the waveguide for converting the received light to heat and an optical filter. The optical filter is optically coupled to the waveguide and thermally coupled to the absorption element. An operating point of the optical filter is tuned responsive to the heat from the absorption element. When the operating point is less than a predetermined temperature, the received light is passed to the absorption element via the optical filter. When the operating point is greater than or equal to the predetermined temperature, the received light is transmitted out of the thermal control device via the optical filter, without being passed to the absorption element.
摘要翻译： 提供了热控制装置，光子系统和稳定光子系统的温度的方法。 热耦合到基板的热控制装置包括用于接收光的波导，光耦合到波导的用于将接收的光转换成热的吸收元件和滤光器。 光学滤波器光耦合到波导并且热耦合到吸收元件。 响应于来自吸收元件的热来调节滤光器的工作点。 当操作点小于预定温度时，所接收的光经由滤光器传递到吸收元件。 当工作点大于或等于预定温度时，接收到的光通过光学滤波器从热控制装置传出，而不被传递到吸收元件。
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公开(公告)号：US09130092B1
公开(公告)日：2015-09-08
申请号：US12882976
申请日：2010-09-15
CPC分类号： H01L31/0543 , G02B7/023 , G02B7/08 , H01L31/022441 , H01L31/0504 , H01L31/061 , H01L31/0745 , H01L31/1804 , H01L31/1892 , H02S20/32 , Y02E10/52 , Y02E10/547 , Y02P70/521
摘要： A photovoltaic solar concentrator is disclosed with one or more transverse-junction solar cells (also termed point contact solar cells) and a lens located above each solar cell to concentrate sunlight onto the solar cell to generate electricity. Piezoelectric actuators tilt or translate each lens to track the sun using a feedback-control circuit which senses the electricity generated by one or more of the solar cells. The piezoelectric actuators can be coupled through a displacement-multiplier linkage to provide an increased range of movement of each lens. Each lens in the solar concentrator can be supported on a frame (also termed a tilt plate) having three legs, with the movement of the legs being controlled by the piezoelectric actuators.
摘要翻译： 公开了具有一个或多个横向结太阳能电池（也称为点接触太阳能电池）的光伏太阳能集中器和位于每个太阳能电池上方的透镜，以将太阳光集中到太阳能电池上以发电。 压电执行器使用反馈控制电路倾斜或平移每个透镜来跟踪太阳，所述反馈控制电路感测由一个或多个太阳能电池产生的电力。 压电致动器可以通过位移 - 倍增器联动来耦合，以提供每个透镜的增加的运动范围。 太阳能集中器中的每个透镜可以被支撑在具有三个腿的框架（也称为倾斜板）上，腿的移动由压电致动器控制。
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公开(公告)号：US07983517B1
公开(公告)日：2011-07-19
申请号：US12248679
申请日：2008-10-09
IPC分类号： G02B6/26
CPC分类号： G02B6/29335 , G02F1/0147 , G02F1/225 , G02F1/2257 , G02F2203/15 , G02F2203/20
摘要： Optical ring resonator devices are disclosed that can be used for optical filtering, modulation or switching, or for use as photodetectors or sensors. These devices can be formed as microdisk ring resonators, or as open-ring resonators with an optical waveguide having a width that varies adiabatically. Electrical and mechanical connections to the open-ring resonators are made near a maximum width of the optical waveguide to minimize losses and thereby provide a high resonator Q. The ring resonators can be tuned using an integral electrical heater, or an integral semiconductor junction.
摘要翻译： 公开了可用于光学滤波，调制或切换或用作光电检测器或传感器的光环谐振器装置。 这些器件可以形成为微型磁盘环形谐振器，或者形成为具有光波导的开环谐振器，光波导具有绝热变化的宽度。 与开环谐振器的电气和机械连接在光波导的最大宽度附近进行，以使损耗最小化，从而提供高谐振器Q.环形谐振器可以使用整体电加热器或整体半导体结进行调谐。
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公开(公告)号：US07820970B1
公开(公告)日：2010-10-26
申请号：US12491596
申请日：2009-06-25
IPC分类号： G01J5/00
CPC分类号： G01J5/08 , G01J5/0821 , G01J5/44 , G01N21/7746
摘要： A thermal microphotonic sensor is fabricated on a silicon substrate by etching an opening and a trench into the substrate, and then filling in the opening and trench with silicon oxide which can be deposited or formed by thermally oxidizing a portion of the silicon substrate surrounding the opening and trench. The silicon oxide forms a support post for an optical resonator which is subsequently formed from a layer of silicon nitride, and also forms a base for an optical waveguide formed from the silicon nitride layer. Part of the silicon substrate can be selectively etched away to elevate the waveguide and resonator. The thermal microphotonic sensor, which is useful to detect infrared radiation via a change in the evanescent coupling of light between the waveguide and resonator, can be formed as a single device or as an array.
摘要翻译： 通过将开口和沟槽蚀刻到衬底中，然后用氧化硅填充开口和沟槽，在硅衬底上制造热微微孔传感器，氧化硅可以通过热氧化围绕开口的硅衬底的一部分来沉积或形成 和沟槽。 氧化硅形成用于光学谐振器的支撑柱，后者由氮化硅层形成，并且还形成由氮化硅层形成的光波导的基极。 硅衬底的一部分可以被选择性地蚀刻掉以提升波导和谐振器。 用于通过波导和谐振器之间的光的消逝耦合的变化来检测红外辐射的热微微孔传感器可以形成为单个器件或阵列。
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公开(公告)号：US07616850B1
公开(公告)日：2009-11-10
申请号：US12100004
申请日：2008-04-09
CPC分类号： G02B6/29335 , G02F1/0147 , G02F1/225 , G02F1/2257 , G02F2203/15 , G02F2203/20
摘要： Optical ring resonator devices are disclosed that can be used for optical filtering, modulation or switching, or for use as photodetectors or sensors. These devices can be formed as microdisk ring resonators, or as open-ring resonators with an optical waveguide having a width that varies adiabatically. Electrical and mechanical connections to the open-ring resonators are made near a maximum width of the optical waveguide to minimize losses and thereby provide a high resonator Q. The ring resonators can be tuned using an integral electrical heater, or an integral semiconductor junction.
摘要翻译： 公开了可用于光学滤波，调制或切换或用作光电检测器或传感器的光环谐振器装置。 这些器件可以形成为微型磁盘环形谐振器，或者形成为具有光波导的开环谐振器，光波导具有绝热变化的宽度。 与开环谐振器的电气和机械连接在光波导的最大宽度附近进行，以使损耗最小化，从而提供高谐振器Q.环形谐振器可以使用整体电加热器或整体半导体结进行调谐。
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公开(公告)号：US09287430B1
公开(公告)日：2016-03-15
申请号：US11933458
申请日：2007-11-01
IPC分类号： H01L31/042 , H01L31/054
CPC分类号： H01L31/0543 , G02B7/023 , G02B7/08 , H01L31/022441 , H01L31/0504 , H01L31/061 , H01L31/0745 , H01L31/1804 , H01L31/1892 , H02S20/32 , Y02E10/52 , Y02E10/547 , Y02P70/521
摘要： A photovoltaic solar concentrator is disclosed with one or more transverse-junction solar cells (also termed point contact solar cells) and a lens located above each solar cell to concentrate sunlight onto the solar cell to generate electricity. Piezoelectric actuators tilt or translate each lens to track the sun using a feedback-control circuit which senses the electricity generated by one or more of the solar cells. The piezoelectric actuators can be coupled through a displacement-multiplier linkage to provide an increased range of movement of each lens. Each lens in the solar concentrator can be supported on a frame (also termed a tilt plate) having three legs, with the movement of the legs being controlled by the piezoelectric actuators.
摘要翻译： 公开了具有一个或多个横向结太阳能电池（也称为点接触太阳能电池）的光伏太阳能集中器和位于每个太阳能电池上方的透镜，以将太阳光集中到太阳能电池上以发电。 压电执行器使用反馈控制电路倾斜或平移每个透镜来跟踪太阳，所述反馈控制电路感测由一个或多个太阳能电池产生的电力。 压电致动器可以通过位移 - 倍增器联动来耦合，以提供每个透镜的增加的运动范围。 太阳能集中器中的每个透镜可以被支撑在具有三个腿的框架（也称为倾斜板）上，腿的移动由压电致动器控制。
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公开(公告)号：US07941014B1
公开(公告)日：2011-05-10
申请号：US12146965
申请日：2008-06-26
CPC分类号： G02F1/225 , G02B6/12007 , G02B6/1223 , G02B6/1228 , G02B6/125 , G02B6/29335 , G02B2006/12061 , G02B2006/12142 , G02B2006/12145 , G02F1/0147 , G02F1/2257 , G02F1/3132 , G02F2001/0151 , G02F2001/212 , G02F2201/063 , G02F2202/06 , G02F2202/104 , G02F2202/105 , G02F2203/15 , G02F2203/20
摘要： Optical waveguide devices are disclosed which utilize an optical waveguide having a waveguide bend therein with a width that varies adiabatically between a minimum value and a maximum value of the width. One or more connecting members can be attached to the waveguide bend near the maximum value of the width thereof to support the waveguide bend or to supply electrical power to an impurity-doped region located within the waveguide bend near the maximum value of the width. The impurity-doped region can form an electrical heater or a semiconductor junction which can be activated with a voltage to provide a variable optical path length in the optical waveguide. The optical waveguide devices can be used to form a tunable interferometer (e.g. a Mach-Zehnder interferometer) which can be used for optical modulation or switching. The optical waveguide devices can also be used to form an optical delay line.
摘要翻译： 公开了光波导器件，其利用其中具有波导弯曲的光波导，其宽度在宽度的最小值和最大值之间绝热地变化。 一个或多个连接构件可以在其最大宽度附近附接到波导管弯曲部，以支撑波导管弯曲，或者在位于波导弯管内的杂质掺杂区域的最大值附近提供电力。 杂质掺杂区域可以形成电加热器或半导体结，其可以用电压来激活，以在光波导中提供可变的光程长度。 光波导器件可用于形成可用于光调制或切换的可调谐干涉仪（例如马赫 - 曾德干涉仪）。 光波导器件也可用于形成光延迟线。
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公开(公告)号：US07667200B1
公开(公告)日：2010-02-23
申请号：US11950821
申请日：2007-12-05
IPC分类号： G01J5/00
CPC分类号： G01J5/44 , G01J5/08 , G01J5/0821
摘要： A thermal microphotonic sensor is disclosed for detecting infrared radiation using heat generated by the infrared radiation to shift the resonant frequency of an optical resonator (e.g. a ring resonator) to which the heat is coupled. The shift in the resonant frequency can be determined from light in an optical waveguide which is evanescently coupled to the optical resonator. An infrared absorber can be provided on the optical waveguide either as a coating or as a plate to aid in absorption of the infrared radiation. In some cases, a vertical resonant cavity can be formed about the infrared absorber to further increase the absorption of the infrared radiation. The sensor can be formed as a single device, or as an array for imaging the infrared radiation.
摘要翻译： 公开了一种用于利用由红外线辐射产生的热量来检测红外辐射的热微振子传感器，以移动热耦合到的光谐振器（例如，环形谐振器）的谐振频率。 谐振频率的偏移可以通过ev逝耦合到光学谐振器的光波导中的光来确定。 可以在光波导上设置红外线吸收器作为涂层或板，以帮助吸收红外辐射。 在一些情况下，可以围绕红外线吸收体形成垂直谐振腔，以进一步增加红外辐射的吸收。 传感器可以形成为单个装置，或者形成用于对红外线辐射进行成像的阵列。
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公开(公告)号：US08729673B1
公开(公告)日：2014-05-20
申请号：US13239181
申请日：2011-09-21
申请人： Murat Okandan , Gregory N. Nielson
发明人： Murat Okandan , Gregory N. Nielson
IPC分类号： H01L29/06
CPC分类号： H01L21/78 , H01L21/02035 , H01L21/6835 , H01L21/76251 , H01L2221/68318 , H01L2221/6835 , H01L2221/68363 , H01L2221/68381
摘要： A structured wafer that includes through passages is used for device processing. Each of the through passages extends from or along one surface of the structured wafer and forms a pattern on a top surface area of the structured wafer. The top surface of the structured wafer is bonded to a device layer via a release layer. Devices are processed on the device layer, and are released from the structured wafer using etchant. The through passages within the structured wafer allow the etchant to access the release layer to thereby remove the release layer.
摘要翻译： 包括贯穿通道的结构晶片用于器件处理。 每个贯穿通道从结构晶片的一个表面延伸或沿着结构晶片的一个表面延伸，并在结构化晶片的顶表面区域上形成图案。 结构晶片的顶表面通过释放层结合到器件层。 器件在器件层上进行处理，并使用蚀刻剂从结晶晶片释放。 结构化晶片内的通道允许蚀刻剂进入释放层，从而去除释放层。
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公开(公告)号：US07486163B2
公开(公告)日：2009-02-03
申请号：US10979350
申请日：2004-11-02
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H47/00 , H01H2059/0054
摘要： An electro-mechanical switch structure includes at least one fixed electrode and a free electrode which is movable in the structure with a voltage potential applied between each fixed electrode and the free, movable electrode. The voltage potentials applied between each fixed electrode and the movable electrode are modulated to actuate the electro-mechanical switch structure.
摘要翻译： 机电开关结构包括至少一个固定电极和自由电极，其可在结构中移动，其中施加有电压电位在每个固定电极和自由的可动电极之间。 施加在每个固定电极和可动电极之间的电压被调制以致动机电开关结构。
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