Chemical sensors, in particular silicon-based biosensors
    2.
    发明授权
    Chemical sensors, in particular silicon-based biosensors 失效
    化学传感器,特别是硅基生物传感器

    公开(公告)号:US5874047A

    公开(公告)日:1999-02-23

    申请号:US793030

    申请日:1997-02-05

    摘要: A three-dimensional structure of porous silicon considerably improves the anchorage of sensor-active material such as, for example, enzymes, antibodies, etc., on or in the substrate surface of chemical sensors, in particular silicon-based biosensors. This structure is produced by means of suitable etching which forms pore apertures adapted to the penetrability of the sensor-active material. The pore walls advantageously receive a non-conductive boundary layer which consists of oxides of Si and/or Al or Ta or silicon nitride and are preferably 1-100 nm thick. The porous layer is advantageously between 10 nm and 100 .mu.m thick and the pores are preferably in the form of branched ducts whose average diameter is 1 nm-10 .mu.m and in particular 10-1000 nm. The sensor-active material can optionally be distributed in a glass, solid, plastics or polymer membrane.

    摘要翻译: PCT No.PCT / DE95 / 01056 Sec。 371日期1997年2月5日 102(e)日期1997年2月5日PCT提交1995年8月4日PCT公布。 公开号WO96 / 05512 日期1996年2月22日多孔硅的三维结构显着改善了传感器活性材料(例如酶,抗体等)在化学传感器的基材表面上或其中的锚定,特别是硅基 生物传感器 这种结构是通过合适的蚀刻产生的,其形成适合于传感器活性材料的穿透性的孔隙。 孔壁有利地接收由Si和/或Al或Ta或氮化硅的氧化物组成的非导电边界层,并且优选为1-100nm厚。 多孔层有利地在10nm和100μm之间,并且孔优选地是分支管道的形式,其平均直径为1nm-10μm,特别是10-1000nm。 传感器 - 活性材料可任选地分布在玻璃,固体,塑料或聚合物膜中。