Optical imaging device, particularly an objective, with at least one optical element
    1.
    发明授权
    Optical imaging device, particularly an objective, with at least one optical element 有权
    具有至少一个光学元件的光学成像装置,特别是物镜

    公开(公告)号:US06191898B1

    公开(公告)日:2001-02-20

    申请号:US09483320

    申请日:2000-01-14

    IPC分类号: G02B702

    CPC分类号: G02B7/026

    摘要: An optical imaging device, particularly an objective, is provided with at least one optical element, which is mounted in an inner ring, the inner ring being connected to an outer mount. A manipulator device serves for the displacement of the optical element in at least one direction that is perpendicular to the optical axis. By a system of peripheral slots between the inner ring and the outer mount with connecting members situated therebetween, a rotary joint between the inner ring and the outer mount, and at least one displacing rotary joint with an adjusting member between the inner ring and the outer mount as the manipulator device, a displacement of the optical element is attained with low deformation or controlled deformation of the optical element. The inner ring and the outer mount are preferably constituted monolithically.

    摘要翻译: 光学成像装置,特别是物镜,具有安装在内圈中的至少一个光学元件,内环连接到外部安装件。 操纵器装置用于在垂直于光轴的至少一个方向上移动光学元件。 通过内环和外部安装件之间的外围槽的系统,其中连接构件位于它们之间,内环和外部安装件之间的旋转接头以及至少一个带有调节构件的位移旋转接头,位于内圈和外圈之间 作为机械手装置安装,通过光学元件的低变形或受控制的变形来获得光学元件的位移。 内环和外部安装件优选地是整体构成的。

    Assembly comprising an optical element and a mount
    2.
    发明授权
    Assembly comprising an optical element and a mount 有权
    组件包括光学元件和安装座

    公开(公告)号:US06392825B1

    公开(公告)日:2002-05-21

    申请号:US09491666

    申请日:2000-01-27

    IPC分类号: G02B702

    CPC分类号: G03F7/70825 G02B7/026

    摘要: An assembly is provided with a mount (1)and an optical element (7). The optical element (7) is connected via elastic connecting elements directly or via one or more intermediate elements to the mount (1). The connecting elements have at least one membrane-like joining element (4), which is connected in the outer region to the mount (1) or to the intermediate element and in the inner region is connected via a rigid, moment-transferring connection (12) to the optical element (7).

    摘要翻译: 组件设置有安装件(1)和光学元件(7)。 光学元件(7)通过直接或经由一个或多个中间元件的弹性连接元件连接到安装座(1)。 连接元件具有至少一个膜状接合元件(4),其在外部区域中连接到安装件(1)或中间元件,并且在内部区域中通过刚性的力矩传递连接 12)到光学元件(7)。

    OPTICAL ARRANGEMENT AND PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH PASSIVE THERMAL COMPENSATION
    3.
    发明申请
    OPTICAL ARRANGEMENT AND PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH PASSIVE THERMAL COMPENSATION 审中-公开
    具有被动热补偿的微电脑的光学布置和投影曝光系统

    公开(公告)号:US20080212052A1

    公开(公告)日:2008-09-04

    申请号:US12119693

    申请日:2008-05-13

    IPC分类号: G03B27/52

    摘要: An optical arrangement with a light source includes an optical element that is fastened in a mount. The light source emits radiation and the optical element is acted on thereby such that the heat that results lacks symmetry corresponding to the shape of the optical element. A connecting structure is provided between the optical element and the mount and has a symmetry that does not correspond to the shape of the optical element and effects an at least partial homogenization of the temperature distribution in the optical element.

    摘要翻译: 具有光源的光学装置包括紧固在安装座中的光学元件。 光源发射辐射,并且光学元件被作用在其上,使得导致对应于光学元件的形状的对称性的热量。 在光学元件和安装座之间提供了连接结构,并且具有与光学元件的形状不对应的对称性,并且使光学元件中的温度分布至少部分均匀化。

    Optical arrangement and projection exposure system for microlithography with passive thermal compensation
    4.
    发明授权
    Optical arrangement and projection exposure system for microlithography with passive thermal compensation 有权
    具有被动热补偿的微光刻的光学布置和投影曝光系统

    公开(公告)号:US07274430B2

    公开(公告)日:2007-09-25

    申请号:US09934817

    申请日:2001-08-21

    IPC分类号: G03B27/30

    摘要: An optical arrangement with a light source includes an optical element that is fastened in a mount. The light source emits radiation and the optical element is acted on thereby such that the heat that results lacks symmetry corresponding to the shape of the optical element. A connecting structure is provided between the optical element and the mount and has a symmetry that does not correspond to the shape of the optical element and effects an at least partial homogenization of the temperature distribution in the optical element.

    摘要翻译: 具有光源的光学装置包括紧固在安装座中的光学元件。 光源发射辐射,并且光学元件被作用在其上,使得导致对应于光学元件的形状的对称性的热量。 在光学元件和安装座之间提供了连接结构,并且具有与光学元件的形状不对应的对称性,并且使光学元件中的温度分布至少部分均匀化。