公开(公告)号：US07339304B2

公开(公告)日：2008-03-04

申请号：US10595237

申请日：2004-08-06

申请人： Michio Kadota ,  Takeshi Nakao ,  Takuo Hada

发明人： Michio Kadota ,  Takeshi Nakao ,  Takuo Hada

IPC分类号： H01L41/08

CPC分类号： H03H9/02559 ,  H03H3/08

摘要： A surface acoustic wave device includes a piezoelectric substrate made of LiNbO3 having an electromechanical coupling coefficient k whose square is at least about 0.025, at least one electrode that is made of a metal whose density is greater than that of Al or an alloy primarily including the metal or that is composed of laminated films made of a metal whose density is greater than that of Al or an alloy primarily including the metal and another metal, the electrode being disposed on the piezoelectric substrate, a first insulating layer disposed in a region other than a region where the at least one electrode is disposed, the thickness of the first insulating layer being substantially equal to that of the electrode, and a second insulating layer covering the electrode and the first insulating layer. The density of the electrode is at least about 1.5 times greater than that of the first insulating layer.

摘要翻译： 表面声波装置包括由LiNbO 3 3制成的压电基片，其具有至少约0.025的方形的机电耦合系数k，至少一个由密度高于其的金属制成的电极。 的Al或主要包含金属的合金，或由密度大于Al的金属或主要包含金属的合金的金属和其它金属构成的层压膜构成，所述电极设置在压电基板上，第一 绝缘层，其设置在除设置所述至少一个电极的区域以外的区域中，所述第一绝缘层的厚度与所述电极的厚度基本相等;以及覆盖所述电极和所述第一绝缘层的第二绝缘层。 密度

公开(公告)号：US20060158069A1

公开(公告)日：2006-07-20

申请号：US11374784

申请日：2006-03-14

申请人： Takuo Hada ,  Takeshi Nakao ,  Michio Kadota ,  Osamu Nakagawara

发明人： Takuo Hada ,  Takeshi Nakao ,  Michio Kadota ,  Osamu Nakagawara

IPC分类号： H03H9/25

CPC分类号： H03H9/14538 ,  H03H9/009 ,  H03H9/02094 ,  H03H9/02897 ,  H03H9/02929 ,  H03H9/02944 ,  H03H9/25 ,  H03H9/6483

摘要： A surface acoustic wave device includes a piezoelectric substrate and interdigital electrodes disposed on the piezoelectric substrate, wherein each of the interdigital electrodes includes a main electrode layer made of Cu or an alloy that has Cu as its main component. The surface acoustic wave device also includes a tightly adhering layer which is disposed between the main electrode layer and the piezoelectric substrate and whose main component is NiCr, or a tightly adhering layer whose main component is Ti and whose film thickness is within a range of about 18 nm to about 60 nm.

公开(公告)号：US07218039B2

公开(公告)日：2007-05-15

申请号：US11374784

申请日：2006-03-14

申请人： Takuo Hada ,  Takeshi Nakao ,  Michio Kadota ,  Osamu Nakagawara

发明人： Takuo Hada ,  Takeshi Nakao ,  Michio Kadota ,  Osamu Nakagawara

IPC分类号： H01L41/047 ,  H03H9/145

CPC分类号： H03H9/14538 ,  H03H9/009 ,  H03H9/02094 ,  H03H9/02897 ,  H03H9/02929 ,  H03H9/02944 ,  H03H9/25 ,  H03H9/6483

摘要： A surface acoustic wave device includes a piezoelectric substrate and interdigital electrodes disposed on the piezoelectric substrate, wherein each of the interdigital electrodes includes a main electrode layer made of Cu or an alloy that has Cu as its main component. The surface acoustic wave device also includes a tightly adhering layer which is disposed between the main electrode layer and the piezoelectric substrate and whose main component is NiCr, or a tightly adhering layer whose main component is Ti and whose film thickness is within a range of about 18 nm to about 60 nm.

摘要翻译： 表面声波装置包括压电基板和设置在压电基板上的叉指电极，其中每个叉指电极包括由Cu制成的主电极层或以Cu为主要成分的合金。 表面声波装置还包括紧密粘合层，其设置在主电极层和压电基板之间，其主要成分为NiCr，或者主要成分为Ti并且膜厚度在约 18nm至约60nm。

公开(公告)号：US07141909B2

公开(公告)日：2006-11-28

申请号：US10834596

申请日：2004-04-29

申请人： Takuo Hada ,  Takeshi Nakao ,  Michio Kadota ,  Osamu Nakagawara

发明人： Takuo Hada ,  Takeshi Nakao ,  Michio Kadota ,  Osamu Nakagawara

IPC分类号： H01L41/047 ,  H01L41/16 ,  H03H9/145 ,  H03H9/25 ,  H03H9/15

CPC分类号： H03H9/14538 ,  H03H9/009 ,  H03H9/02094 ,  H03H9/02897 ,  H03H9/02929 ,  H03H9/02944 ,  H03H9/25 ,  H03H9/6483

摘要： A surface acoustic wave device includes a piezoelectric substrate and interdigital electrodes disposed on the piezoelectric substrate, wherein each of the interdigital electrodes includes a main electrode layer made of Cu or an alloy that has Cu as its main component. The surface acoustic wave device also includes a tightly adhering layer which is disposed between the main electrode layer and the piezoelectric substrate and whose main component is NiCr, or a tightly adhering layer whose main component is Ti and whose film thickness is within a range of about 18 nm to about 60 nm.

摘要翻译： 表面声波装置包括压电基板和设置在压电基板上的叉指电极，其中每个叉指电极包括由Cu制成的主电极层或以Cu为主要成分的合金。 表面声波装置还包括紧密粘合层，其设置在主电极层和压电基板之间，其主要成分为NiCr，或者主要成分为Ti并且膜厚度在约 18nm至约60nm。

公开(公告)号：US07762124B2

公开(公告)日：2010-07-27

申请号：US12273657

申请日：2008-11-19

申请人： Kenjiro Okaguchi ,  Takuo Hada ,  Michio Kadota

发明人： Kenjiro Okaguchi ,  Takuo Hada ,  Michio Kadota

IPC分类号： G01N29/02

CPC分类号： G01N29/022 ,  G01N2291/014 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423 ,  G01N2291/0425

摘要： A sensor for detecting a substance in liquid includes a sensing oscillation circuit and a reference oscillation circuit. The sensing oscillation circuit includes a sensing SAW element in which a reaction film arranged so as to cover at least one IDT and to react with a substance in liquid is disposed and a first amplifier circuit. The reference oscillation circuit includes a reference SAW element and a second amplifier circuit. The reference SAW element includes at least one IDT and no reaction film. The oscillation frequency of the sensing oscillation circuit and the oscillation frequency of the reference oscillation circuit are separated by at least about 200×k2 (ppm), where k2(%) is the electromechanical coupling coefficient of a piezoelectric substrate used in each of the sensing SAW element and the reference SAW element.

摘要翻译： 用于检测液体中的物质的传感器包括感测振荡电路和参考振荡电路。 感测振荡电路包括感测SAW元件，其中布置成覆盖至少一个IDT并与液体中的物质反应的反应膜和第一放大器电路。 参考振荡电路包括参考SAW元件和第二放大器电路。 参考SAW元件包括至少一个IDT并且没有反应膜。 感测振荡电路的振荡频率和参考振荡电路的振荡频率分开至少约200×k2（ppm），其中k2（％）是在每个感测中使用的压电基板的机电耦合系数 SAW元件和参考SAW元件。

公开(公告)号：US08658097B2

公开(公告)日：2014-02-25

申请号：US12273569

申请日：2008-11-19

申请人： Kenjiro Okaguchi ,  Takuo Hada ,  Michio Kadota

发明人： Kenjiro Okaguchi ,  Takuo Hada ,  Michio Kadota

IPC分类号： G01N15/06 ,  G01N21/75

CPC分类号： G01N29/022 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423

摘要： A sensor for detecting a substance in liquid includes a sensing circuit including a sensing surface acoustic wave (SAW) element in which a reaction film to react with a substance in liquid, a reference circuit including a reference SAW element including an IDT and not including a reaction film, a first signal source driving the sensing circuit, a second signal source driving the reference circuit and being independent of the first signal source, and a differential circuit arranged to output a differential output between an output of the sensing circuit and an output of the reference circuit. The frequency of a first frequency signal output from the first signal source is different from the frequency of a second frequency signal output from the second signal source, thereby making a driving frequency for the sensing SAW element and a driving frequency for the reference SAW element substantially the same as or different from one another.

摘要翻译： 用于检测液体中的物质的传感器包括感测电路，其包括感测声表面波（SAW）元件，其中反应膜与液体中的物质反应，参考电路包括包括IDT的参考SAW元件，并且不包括 反应膜，驱动感测电路的第一信号源，驱动参考电路并独立于第一信号源的第二信号源，以及差分电路，布置成在感测电路的输出和输出之间输出差分输出 参考电路。 从第一信号源输出的第一频率信号的频率与从第二信号源输出的第二频率信号的频率不同，从而使感测用SAW元件的驱动频率和基准SAW元件的驱动频率基本上 彼此相同或不同。