-
公开(公告)号:US20240357809A1
公开(公告)日:2024-10-24
申请号:US18637129
申请日:2024-04-16
Applicant: Micron Technology, Inc.
Inventor: Zeyar Lin Aung , Kaiming Luo , Saurabh Jagdishbhai Kasodariya , Sumeet C. Pandey , Brittany L. Kohoutek , Yuwei Ma , Kyle A. Ritter
IPC: H10B43/20
CPC classification number: H10B43/20
Abstract: Methods, systems, and devices for support structures for tier deflection in a memory system are described. The memory system may include a word line contact that extends through a stack of materials and lands on a tier of a word line. The word line contact may be between four support structures that form a diamond around the word line contact. Two support structures that form opposite vertices of the diamond may align centrally with the word line contact in a lateral direction and two other support structures that form opposite vertices of the diamond may align centrally with the word line contact in a longitudinal direction.