公开(公告)号：US20070085007A1

公开(公告)日：2007-04-19

申请号：US11582955

申请日：2006-10-19

申请人： Mine Araki ,  Shunya Watanabe ,  Chisato Kamiya ,  Mitsugu Sato ,  Atsushi Takane ,  Akinari Morikawa ,  Atsushi Miyaki ,  Toru Ishitani

发明人： Mine Araki ,  Shunya Watanabe ,  Chisato Kamiya ,  Mitsugu Sato ,  Atsushi Takane ,  Akinari Morikawa ,  Atsushi Miyaki ,  Toru Ishitani

IPC分类号： G21K7/00

CPC分类号： H01J37/265 ,  H01J2237/221

摘要： There is disclosed a charged particle beam device which judges whether or not an image based on a dark-field signal has an appropriate atomic number contrast. Input reference information, a bright-field image or a back-scattered electron image is compared with a dark-field image, and it is judged whether or not a correlation value between them or the dark-field image has a predetermined contrast. According to such a constitution, it is possible to obtain information by which it is judged whether or not the dark-field image has an appropriate atomic number contrast.

摘要翻译： 公开了一种带电粒子束装置，其判断基于暗场信号的图像是否具有适当的原子序数对比度。 将输入参考信息，亮场图像或背散射电子图像与暗视场图像进行比较，并且判断它们之间的相关值或暗视场图像是否具有预定的对比度。 根据这样的结构，可以获得判断暗场图像是否具有适当的原子序数对比度的信息。

公开(公告)号：US07459683B2

公开(公告)日：2008-12-02

申请号：US11582955

申请日：2006-10-19

申请人： Mine Araki ,  Shunya Watanabe ,  Chisato Kamiya ,  Mitsugu Sato ,  Atsushi Takane ,  Akinari Morikawa ,  Atsushi Miyaki ,  Toru Ishitani

发明人： Mine Araki ,  Shunya Watanabe ,  Chisato Kamiya ,  Mitsugu Sato ,  Atsushi Takane ,  Akinari Morikawa ,  Atsushi Miyaki ,  Toru Ishitani

IPC分类号： H01J37/153 ,  H01J37/28

CPC分类号： H01J37/265 ,  H01J2237/221

摘要： There is disclosed a charged particle beam device which judges whether or not an image based on a dark-field signal has an appropriate atomic number contrast. Input reference information, a bright-field image or a back-scattered electron image is compared with a dark-field image, and it is judged whether or not a correlation value between them or the dark-field image has a predetermined contrast. According to such a constitution, it is possible to obtain information by which it is judged whether or not the dark-field image has an appropriate atomic number contrast.

摘要翻译： 公开了一种带电粒子束装置，其判断基于暗场信号的图像是否具有适当的原子序数对比度。 将输入参考信息，亮场图像或背散射电子图像与暗视场图像进行比较，并且判断它们之间的相关值或暗视场图像是否具有预定的对比度。 根据这样的结构，可以获得判断暗场图像是否具有适当的原子序数对比度的信息。