公开(公告)号：US20070085007A1

公开(公告)日：2007-04-19

申请号：US11582955

申请日：2006-10-19

申请人： Mine Araki ,  Shunya Watanabe ,  Chisato Kamiya ,  Mitsugu Sato ,  Atsushi Takane ,  Akinari Morikawa ,  Atsushi Miyaki ,  Toru Ishitani

发明人： Mine Araki ,  Shunya Watanabe ,  Chisato Kamiya ,  Mitsugu Sato ,  Atsushi Takane ,  Akinari Morikawa ,  Atsushi Miyaki ,  Toru Ishitani

IPC分类号： G21K7/00

CPC分类号： H01J37/265 ,  H01J2237/221

摘要： There is disclosed a charged particle beam device which judges whether or not an image based on a dark-field signal has an appropriate atomic number contrast. Input reference information, a bright-field image or a back-scattered electron image is compared with a dark-field image, and it is judged whether or not a correlation value between them or the dark-field image has a predetermined contrast. According to such a constitution, it is possible to obtain information by which it is judged whether or not the dark-field image has an appropriate atomic number contrast.

摘要翻译： 公开了一种带电粒子束装置，其判断基于暗场信号的图像是否具有适当的原子序数对比度。 将输入参考信息，亮场图像或背散射电子图像与暗视场图像进行比较，并且判断它们之间的相关值或暗视场图像是否具有预定的对比度。 根据这样的结构，可以获得判断暗场图像是否具有适当的原子序数对比度的信息。

公开(公告)号：US07459683B2

公开(公告)日：2008-12-02

申请号：US11582955

申请日：2006-10-19

申请人： Mine Araki ,  Shunya Watanabe ,  Chisato Kamiya ,  Mitsugu Sato ,  Atsushi Takane ,  Akinari Morikawa ,  Atsushi Miyaki ,  Toru Ishitani

发明人： Mine Araki ,  Shunya Watanabe ,  Chisato Kamiya ,  Mitsugu Sato ,  Atsushi Takane ,  Akinari Morikawa ,  Atsushi Miyaki ,  Toru Ishitani

IPC分类号： H01J37/153 ,  H01J37/28

CPC分类号： H01J37/265 ,  H01J2237/221

摘要： There is disclosed a charged particle beam device which judges whether or not an image based on a dark-field signal has an appropriate atomic number contrast. Input reference information, a bright-field image or a back-scattered electron image is compared with a dark-field image, and it is judged whether or not a correlation value between them or the dark-field image has a predetermined contrast. According to such a constitution, it is possible to obtain information by which it is judged whether or not the dark-field image has an appropriate atomic number contrast.

摘要翻译： 公开了一种带电粒子束装置，其判断基于暗场信号的图像是否具有适当的原子序数对比度。 将输入参考信息，亮场图像或背散射电子图像与暗视场图像进行比较，并且判断它们之间的相关值或暗视场图像是否具有预定的对比度。 根据这样的结构，可以获得判断暗场图像是否具有适当的原子序数对比度的信息。

公开(公告)号：US07355177B2

公开(公告)日：2008-04-08

申请号：US11499640

申请日：2006-08-07

申请人： Chisato Kamiya ,  Masahiro Akatsu ,  Mitsugu Sato

发明人： Chisato Kamiya ,  Masahiro Akatsu ,  Mitsugu Sato

IPC分类号： H01J37/29 ,  H01J37/244 ,  G01N23/04

CPC分类号： H01J37/28 ,  H01J37/244

摘要： Disclosed here is a high resolution scanning electron microscope having an in-lens type objective lens. The microscope is structured so as to detect transmission electrons scattering at wide angles to observe high contrast STEM images according to each sample and purpose.A dark-field detector is disposed closely to the objective lens magnetic pole. The microscope is provided with means for moving the dark-field detector along a light axis so as to control the scattering angle of each detected dark-field signal.

摘要翻译： 这里公开了具有透镜式物镜的高分辨率扫描电子显微镜。 显微镜被构造成检测以广角散射的透射电子，以根据每个样品和目的观察高对比度STEM图像。 暗场检测器靠近物镜磁极设置。 显微镜具有用于沿着光轴移动暗视场检测器的装置，以便控制每个检测到的暗场信号的散射角。

公开(公告)号：US07745787B2

公开(公告)日：2010-06-29

申请号：US12071152

申请日：2008-02-15

申请人： Chisato Kamiya ,  Masahiro Akatsu ,  Mitsugu Sato

发明人： Chisato Kamiya ,  Masahiro Akatsu ,  Mitsugu Sato

IPC分类号： H01J37/28 ,  H01J37/244

CPC分类号： H01J37/28 ,  H01J37/244

摘要： Disclosed here is a high resolution scanning electron microscope having an in-lens type objective lens. The microscope is structured so as to detect transmission electrons scattering at wide angles to observe high contrast STEM images according to each sample and purpose.A dark-field detector is disposed closely to the objective lens magnetic pole. The microscope is provided with means for moving the dark-field detector along a light axis so as to control the scattering angle of each detected dark-field signal.

摘要翻译： 这里公开了具有透镜式物镜的高分辨率扫描电子显微镜。 显微镜被构造成检测以广角散射的透射电子，以根据每个样品和目的观察高对比度STEM图像。 暗场检测器靠近物镜磁极设置。 显微镜具有用于沿着光轴移动暗视场检测器的装置，以便控制每个检测到的暗场信号的散射角。

公开(公告)号：US20060284093A1

公开(公告)日：2006-12-21

申请号：US11499640

申请日：2006-08-07

申请人： Chisato Kamiya ,  Masahiro Akatsu ,  Mitsugu Sato

发明人： Chisato Kamiya ,  Masahiro Akatsu ,  Mitsugu Sato

IPC分类号： G21K7/00

CPC分类号： H01J37/28 ,  H01J37/244

摘要： Disclosed here is a high resolution scanning electron microscope having an in-lens type objective lens. The microscope is structured so as to detect transmission electrons scattering at wide angles to observe high contrast STEM images according to each sample and purpose. A dark-field detector is disposed closely to the objective lens magnetic pole. The microscope is provided with means for moving the dark-field detector along a light axis so as to control the scattering angle of each detected dark-field signal.

公开(公告)号：US20080290275A1

公开(公告)日：2008-11-27

申请号：US12071152

申请日：2008-02-15

申请人： Chisato Kamiya ,  Masahiro Akatsu ,  Mitsugu Sato

发明人： Chisato Kamiya ,  Masahiro Akatsu ,  Mitsugu Sato

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  H01J37/244

摘要： Disclosed here is a high resolution scanning electron microscope having an in-lens type objective lens. The microscope is structured so as to detect transmission electrons scattering at wide angles to observe high contrast STEM images according to each sample and purpose.A dark-field detector is disposed closely to the objective lens magnetic pole. The microscope is provided with means for moving the dark-field detector along a light axis so as to control the scattering angle of each detected dark-field signal.

公开(公告)号：US07105816B2

公开(公告)日：2006-09-12

申请号：US10751987

申请日：2004-01-07

申请人： Chisato Kamiya ,  Masahiro Akatsu ,  Mitsugu Sato

发明人： Chisato Kamiya ,  Masahiro Akatsu ,  Mitsugu Sato

IPC分类号： H01J37/29 ,  H01J37/244 ,  G01N23/04

CPC分类号： H01J37/28 ,  H01J37/244

摘要： Disclosed here is a high resolution scanning electron microscope having an in-lens type objective lens. The microscope is structured so as to detect transmission electrons scattering at wide angles to observe high contrast STEM images according to each sample and purpose.A dark-field detector is disposed closely to the objective lens magnetic pole. The microscope is provided with means for moving the dark-field detector along a light axis so as to control the scattering angle of each detected dark-field signal.

摘要翻译： 这里公开了具有透镜式物镜的高分辨率扫描电子显微镜。 显微镜被构造成检测以广角散射的透射电子，以根据每个样品和目的观察高对比度STEM图像。 暗场检测器靠近物镜磁极设置。 显微镜具有用于沿着光轴移动暗视场检测器的装置，以便控制每个检测到的暗场信号的散射角。