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公开(公告)号：US07459683B2
公开(公告)日：2008-12-02
申请号：US11582955
申请日：2006-10-19
申请人： Mine Araki , Shunya Watanabe , Chisato Kamiya , Mitsugu Sato , Atsushi Takane , Akinari Morikawa , Atsushi Miyaki , Toru Ishitani
发明人： Mine Araki , Shunya Watanabe , Chisato Kamiya , Mitsugu Sato , Atsushi Takane , Akinari Morikawa , Atsushi Miyaki , Toru Ishitani
IPC分类号： H01J37/153 , H01J37/28
CPC分类号： H01J37/265 , H01J2237/221
摘要： There is disclosed a charged particle beam device which judges whether or not an image based on a dark-field signal has an appropriate atomic number contrast. Input reference information, a bright-field image or a back-scattered electron image is compared with a dark-field image, and it is judged whether or not a correlation value between them or the dark-field image has a predetermined contrast. According to such a constitution, it is possible to obtain information by which it is judged whether or not the dark-field image has an appropriate atomic number contrast.
摘要翻译： 公开了一种带电粒子束装置，其判断基于暗场信号的图像是否具有适当的原子序数对比度。 将输入参考信息，亮场图像或背散射电子图像与暗视场图像进行比较，并且判断它们之间的相关值或暗视场图像是否具有预定的对比度。 根据这样的结构，可以获得判断暗场图像是否具有适当的原子序数对比度的信息。
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公开(公告)号：US4687930A
公开(公告)日：1987-08-18
申请号：US736123
申请日：1985-05-20
IPC分类号： H01J37/08 , G01Q30/10 , G01Q30/12 , H01J37/02 , H01J37/20 , H01J37/252 , H01J37/30 , H01J49/14 , G01N23/00
CPC分类号： H01J37/3002 , H01J37/02 , H01J49/142
摘要： The surface of a specimen such as a semiconductor wafer is processed and analyzed by the irradiator of the surface with an ion beam. The zone of the specimen to be processed and analyzed is kept by heating at a temperature higher than the melting point of an element or compound forming the ion species used for the irradiation. The means used for this heating may be an electron beam source, a light source, a resistance heating source, or a high-frequency heating source.
摘要翻译： 通过离子束的表面的照射器对诸如半导体晶片的样品的表面进行处理和分析。 通过在高于形成用于照射的离子种的元素或化合物的熔点的温度下加热来保持待处理和分析的样品的区域。 用于该加热的装置可以是电子束源，光源，电阻加热源或高频加热源。
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公开(公告)号：US4631448A
公开(公告)日：1986-12-23
申请号：US578206
申请日：1984-02-08
申请人： Hifumi Tamura , Clay Shepherd , Toru Ishitani , Kaoru Umemura
发明人： Hifumi Tamura , Clay Shepherd , Toru Ishitani , Kaoru Umemura
摘要： An ion source is disclosed in which a crucible for holding an ion source material is provided with an aperture in its bottom wall, an emitter chip is disposed within the crucible in a coaxial manner so that the edge of the emitter chip passes through the aperture, a semi-closed crucible made of a conductive material and having the form of a circular cone is disposed in the vicinity of the tip of the emitter chip so as to be coaxial with the emitter chip and to have the same electric potential as the emitter chip, a filament for emitting an electron beam is disposed in the vicinity of the emitter chip, an ion extracting electrode is disposed at a place which is a little spaced apart from the tip of the emitter chip, and a lid is inserted into the ion source material holding part so as to be placed on the above-mentioned semi-closed crucible, thereby preventing the ion source material from being scattered by evaporation.
摘要翻译： 公开了一种离子源，其中用于保持离子源材料的坩埚在其底壁中设置有孔，发射器芯片以同轴方式设置在坩埚内，使得发射器芯片的边缘通过孔径， 由导电材料制成并具有圆锥形形式的半封闭坩埚设置在发射极芯片的尖端附近，以与发射极芯片同轴并具有与发射极芯片相同的电位 ，发射电子束的灯丝设置在发射极芯片的附近，离子引出电极设置在与发射极芯片的前端稍微间隔的位置，并且将盖子插入离子源 材料保持部件以便放置在上述半封闭坩埚上，从而防止离子源材料通过蒸发而被散射。
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公开(公告)号：US20070085007A1
公开(公告)日：2007-04-19
申请号：US11582955
申请日：2006-10-19
申请人： Mine Araki , Shunya Watanabe , Chisato Kamiya , Mitsugu Sato , Atsushi Takane , Akinari Morikawa , Atsushi Miyaki , Toru Ishitani
发明人： Mine Araki , Shunya Watanabe , Chisato Kamiya , Mitsugu Sato , Atsushi Takane , Akinari Morikawa , Atsushi Miyaki , Toru Ishitani
IPC分类号： G21K7/00
CPC分类号： H01J37/265 , H01J2237/221
摘要： There is disclosed a charged particle beam device which judges whether or not an image based on a dark-field signal has an appropriate atomic number contrast. Input reference information, a bright-field image or a back-scattered electron image is compared with a dark-field image, and it is judged whether or not a correlation value between them or the dark-field image has a predetermined contrast. According to such a constitution, it is possible to obtain information by which it is judged whether or not the dark-field image has an appropriate atomic number contrast.
摘要翻译： 公开了一种带电粒子束装置，其判断基于暗场信号的图像是否具有适当的原子序数对比度。 将输入参考信息，亮场图像或背散射电子图像与暗视场图像进行比较，并且判断它们之间的相关值或暗视场图像是否具有预定的对比度。 根据这样的结构，可以获得判断暗场图像是否具有适当的原子序数对比度的信息。
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