公开(公告)号：US06772528B2

公开(公告)日：2004-08-10

申请号：US10200497

申请日：2002-07-23

申请人： Ming Fa Tsai ,  Shan Chang Wang ,  Yi-Tung Lin

发明人： Ming Fa Tsai ,  Shan Chang Wang ,  Yi-Tung Lin

IPC分类号： G01B502

CPC分类号： G01B5/0007

摘要： An incremental offset measuring instrument is provided. The incremental offset measuring instrument includes a main base; a specimen seat mounted on the main base for resting a specimen; a measuring tool assembly for measuring the specimen; and a movable assembly mounted on the main base, wherein the movable assembly carries the measuring tool assembly, thereby achieving the goal of measuring the specimen.

公开(公告)号：US06865764B2

公开(公告)日：2005-03-15

申请号：US10124141

申请日：2002-04-16

申请人： Ming Fa Tsai ,  Chia Chi Lin

发明人： Ming Fa Tsai ,  Chia Chi Lin

IPC分类号： B08B1/04 ,  H01L21/00 ,  A47L25/00

CPC分类号： H01L21/67046 ,  B08B1/04 ,  Y10T29/49558 ,  Y10T29/53652 ,  Y10T29/53657

摘要： A fixture for assembling a post-CMP cleaning brush. The post-CMP cleaning brush is provided with a brush core and an outer brush, and the outer brush is provided with a hollow portion. The fixture comprises a base, a plurality of posts and a guiding member. The base is provided with a plurality of holes. The posts insert into the holes of the base through the hollow portion of the outer brush respectively so as to assist the brush core in passing through the hollow portion of the outer brush. The guiding member is connected with the brush core to assist the brush core in passing through the hollow portion of the outer brush.

摘要翻译： 用于组装CMP后清洁刷的夹具。 后CMP清洁刷设置有刷芯和外刷，外刷设有中空部。 固定装置包括基座，多个支柱和引导构件。 底座设有多个孔。 支柱分别通过外刷的中空部分插入基座的孔中，以帮助刷芯通过外刷的中空部分。 引导构件与刷芯连接，以帮助刷芯穿过外刷的中空部分。

公开(公告)号：US06832422B2

公开(公告)日：2004-12-21

申请号：US10153349

申请日：2002-05-21

申请人： Ming Fa Tsai ,  Chia Chi Lin ,  Shih Hsien Hsu ,  Chih-Feng Wang ,  Hong-wei Chen

发明人： Ming Fa Tsai ,  Chia Chi Lin ,  Shih Hsien Hsu ,  Chih-Feng Wang ,  Hong-wei Chen

IPC分类号： B23P1902

CPC分类号： H01L21/67046 ,  B08B1/04 ,  Y10T29/49558 ,  Y10T29/53652 ,  Y10T29/53657

摘要： An apparatus for assembling a post-CMP cleaning brush. The post-CMP cleaning brush is provided with a brush core and an outer brush, and the outer brush is provided with a hollow portion. The apparatus comprises a base, a fixed member, a sliding member, a plurality of posts, and an actuating device. The base holds the brush core and the outer brush, and the fixed member is disposed on the base. The sliding member is disposed on the base in a manner such that it is located at the opposite side of the fixed member relative to the outer brush disposed on the base. The posts, disposed on the sliding member, pass through the fixed member and the hollow portion of the outer brush so as to assist the brush core in passing through the hollow portion of the outer brush. The actuating device connects with the brush core so as to pass the brush core through the hollow portion of the outer brush and separate the posts, inserted into the outer brush, from the outer brush.

摘要翻译： 一种用于组装CMP后清洁刷的装置。 后CMP清洁刷设置有刷芯和外刷，外刷设有中空部。 该装置包括基座，固定构件，滑动构件，多个支柱和致动装置。 基座保持刷芯和外刷，并且固定构件设置在基座上。 滑动构件以相对于设置在基座上的外部刷子位于固定构件的相对侧的方式设置在基座上。 设置在滑动构件上的柱穿过固定构件和外刷的中空部分，以帮助刷芯穿过外刷的中空部分。 致动装置与刷芯连接，以使刷芯通过外刷的中空部分，并将插入外刷中的柱与外刷分开。

公开(公告)号：US06932094B2

公开(公告)日：2005-08-23

申请号：US10313176

申请日：2002-12-06

申请人： Chih-Kun Chen ,  Ming Fa Tsai

发明人： Chih-Kun Chen ,  Ming Fa Tsai

IPC分类号： B08B9/093 ,  B08B3/02

CPC分类号： B08B9/093

摘要： A slurry tank autocleaner for cleaning an empty slurry tank. A first pipe is inserted in the interior of the slurry tank, where the first pipe has an open end located inside the slurry tank. A first nozzle is disposed on the open end of the first pipe. A cover is used to cover the slurry tank, where the cover has a plurality of second nozzles targeting the slurry tank. A second pipe is connected to the second nozzles. A controller is used to control chemical, pure water or dry gas to spurt from the first nozzle and the second nozzles through the first pipe and the second pipe. Thus, the slurry tank can be automatically cleaned.

摘要翻译： 用于清洁空浆箱的浆液罐自动清洗机。 第一管被插入浆料罐的内部，其中第一管具有位于浆料罐内部的开口端。 第一喷嘴设置在第一管的开口端。 覆盖物用于覆盖浆料罐，其中盖具有针对浆料罐的多个第二喷嘴。 第二管连接到第二喷嘴。 控制器用于控制通过第一管和第二管从第一喷嘴和第二喷嘴喷出的化学，纯净水或干燥气体。 因此，可以自动清洗浆料罐。

公开(公告)号：US06886442B2

公开(公告)日：2005-05-03

申请号：US10142374

申请日：2002-05-08

申请人： Wan-Yi Wu ,  Ming Fa Tsai

发明人： Wan-Yi Wu ,  Ming Fa Tsai

IPC分类号： B24B7/22 ,  B24B37/34 ,  B26D1/00 ,  B26F1/02 ,  B26F1/44 ,  C23F1/00 ,  H01L21/306

CPC分类号： B24B37/34 ,  B26F1/02 ,  Y10T83/8831 ,  Y10T83/929 ,  Y10T83/9423 ,  Y10T83/943 ,  Y10T83/944

摘要： An apparatus for punching CMP machine backing film. The apparatus comprises a base, a first plate, and a second plate. The base holds the backing-film. The first plate is disposed on the base in a manner such that it moves between a first position and a second position. The first plate abuts the backing-film when it is located at the second position. The second plate, having a plurality of punches, is disposed on the base in a manner such that it moves between a third position and a fourth position. The first plate is located at the first position when the second plate is located at the third position. The first plate is located at the second position when the second plate is located at the fourth position so that the punches pass through the first plate to punch the backing-film.

摘要翻译： 一种用于冲压CMP机背衬膜的设备。 该装置包括基座，第一板和第二板。 底座上有背胶。 第一板以使其在第一位置和第二位置之间移动的方式设置在基座上。 当第一板位于第二位置时，第一板邻接背胶膜。 具有多个冲头的第二板以使其在第三位置和第四位置之间移动的方式设置在基座上。 当第二板位于第三位置时，第一板位于第一位置。 当第二板位于第四位置时，第一板位于第二位置，使得冲头穿过第一板以冲压背衬膜。