FOUP AND ROBOTIC FLANGE THEREOF
    1.
    发明申请
    FOUP AND ROBOTIC FLANGE THEREOF 有权
    FOUP和机器人法兰

    公开(公告)号:US20110005966A1

    公开(公告)日:2011-01-13

    申请号:US12766103

    申请日:2010-04-23

    IPC分类号: H01L21/673 B23P11/00

    CPC分类号: H01L21/67379 Y10T29/49826

    摘要: A wafer container includes a container body, which comprises a plurality of sidewalls, a bottom, and a top to define a space for containing wafers, an opening being formed on one sidewall, and a door with an outer surface and an inner surface. The top of the container body is disposed with a robotic flange which comprises a foolproof structure and a hemi-circular snap-hook portion that are disposed at the center and its circumference of a lower surface of the robotic flange facing the top. The foolproof structure has a geometric hole for a protruding portion on the top of the container body to be plugged in. After the protruding portion is plugged into the geometric hole, the robotic flange is further rotated along the container body about 180 degrees for the hemi-circular snap-hook portion to be engaged in a hemi-circular supporting portion on the top of the container body.

    摘要翻译: 晶片容器包括容器主体,其包括多个侧壁,底部和顶部,以限定用于容纳晶片的空间,形成在一个侧壁上的开口,以及具有外表面和内表面的门。 容器主体的顶部设置有机器人法兰,其包括防盗结构和半圆形卡扣钩部分,其设置在机器人法兰的下表面的中心并且其周边面向顶部。 防盗结构具有用于插入容器主体顶部上的突出部分的几何孔。在突出部分插入几何孔中之后,机器人凸缘沿着容器主体进一步旋转约180度,用于半 - 圆形卡钩部分,以接合在容器主体的顶部上的半圆形支撑部分中。

    FOUP and robotic flange thereof
    2.
    发明授权
    FOUP and robotic flange thereof 有权
    FOUP及其机器人凸缘

    公开(公告)号:US08474626B2

    公开(公告)日:2013-07-02

    申请号:US12766103

    申请日:2010-04-23

    IPC分类号: B65D85/00

    CPC分类号: H01L21/67379 Y10T29/49826

    摘要: A wafer container includes a container body, which comprises a plurality of sidewalls, a bottom, and a top to define a space for containing wafers, an opening being formed on one sidewall, and a door with an outer surface and an inner surface. The top of the container body is disposed with a robotic flange which comprises a foolproof structure and a hemi-circular snap-hook portion that are disposed at the center and its circumference of a lower surface of the robotic flange facing the top. The foolproof structure has a geometric hole for a protruding portion on the top of the container body to be plugged in. After the protruding portion is plugged into the geometric hole, the robotic flange is further rotated along the container body about 180 degrees for the hemi-circular snap-hook portion to be engaged in a hemi-circular supporting portion on the top of the container body.

    摘要翻译: 晶片容器包括容器主体,其包括多个侧壁,底部和顶部,以限定用于容纳晶片的空间,形成在一个侧壁上的开口,以及具有外表面和内表面的门。 容器主体的顶部设置有机器人法兰,其包括防盗结构和半圆形卡扣钩部分,其设置在机器人法兰的下表面的中心并且其周边面向顶部。 防盗结构具有用于插入容器主体顶部上的突出部分的几何孔。在突出部分插入几何孔中之后,机器人凸缘沿着容器主体进一步旋转约180度,用于半 - 圆形卡钩部分,以接合在容器主体的顶部上的半圆形支撑部分中。

    Wafer container
    3.
    发明申请
    Wafer container 有权
    晶圆容器

    公开(公告)号:US20100282638A1

    公开(公告)日:2010-11-11

    申请号:US12647102

    申请日:2009-12-24

    IPC分类号: H01L21/673

    摘要: A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting a plurality of wafers and an opening is formed on one sidewall of which, and a door, which is joined with opening of the container body for protecting the plurality of wafers in the container body, the characteristic in that: a magnetic member is formed at the inner edge of the opening of the container body and a magnet is disposed at the inner surface of the door corresponding to the magnetic member, the magnet being disposed in a magnetic yoke with recessed cross section, with the design of which the magnet on the door attracts the magnetic member at the opening of the container body for the door and the container body to be lock-fastened to each other.

    摘要翻译: 晶片容器包括容器主体,其内部设置有多个用于支撑多个晶片的槽,并且在其一个侧壁上形成开口,并且与该容器主体的开口连接的门, 保护容器主体中的多个晶片,其特征在于,在容器主体的开口的内边缘处形成磁性部件,并且磁体设置在对应于磁性部件的门的内表面处, 磁体设置在具有凹入横截面的磁轭中,门的磁体的设计在门的容器主体的开口处吸引磁性构件,并且容器主体被锁定固定。

    Wafer container
    4.
    发明授权
    Wafer container 有权
    晶圆容器

    公开(公告)号:US07909167B2

    公开(公告)日:2011-03-22

    申请号:US12647102

    申请日:2009-12-24

    IPC分类号: H01L21/673

    摘要: A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting a plurality of wafers and an opening is formed on one sidewall of which, and a door, which is joined with opening of the container body for protecting the plurality of wafers in the container body, the characteristic in that: a magnetic member is formed at the inner edge of the opening of the container body and a magnet is disposed at the inner surface of the door corresponding to the magnetic member, the magnet being disposed in a magnetic yoke with recessed cross section, with the design of which the magnet on the door attracts the magnetic member at the opening of the container body for the door and the container body to be lock-fastened to each other.

    摘要翻译: 晶片容器包括容器主体,其内部设置有多个用于支撑多个晶片的槽,并且在其一个侧壁上形成开口,并且与该容器主体的开口连接的门, 保护容器主体中的多个晶片,其特征在于,在容器主体的开口的内边缘处形成磁性部件,并且磁体设置在对应于磁性部件的门的内表面处, 磁体设置在具有凹入横截面的磁轭中,门的磁体的设计在门的容器主体的开口处吸引磁性构件,并且容器主体被锁定固定。

    Reticle storing container
    5.
    发明授权
    Reticle storing container 有权
    标线贮存容器

    公开(公告)号:US08403143B2

    公开(公告)日:2013-03-26

    申请号:US12915274

    申请日:2010-10-29

    IPC分类号: B65D85/48

    摘要: A reticle storing container is disclosed to include an outer container, an inner container, and a purging valve. The outer container comprises a container body and a container base on which at least a first through-hole is disposed, and a first inner space is formed between the container body and the container base for storing the inner container. The inner container comprises a top cover and a bottom base on which at least a second through-hole connected to the first through-hole is disposed, and a second inner space is formed between the top cover and the bottom base for storing a reticle. The purging valve is disposed in the first through-hole on the outer container base and connected to the second through-hole of said inner container, wherein the purging valve comprises a spring and a valve part. Thus, when the valve part is propped up by a purging head, the valve part compresses the spring for the purging valve to be connected to the purging head. And a filter material is disposed on the joint portion between the container body and the container base to prevent the interior of the reticle from being contaminated.

    摘要翻译: 公开了一种掩模版存储容器,其包括外部容器,内部容器和清洗阀。 外容器包括容器主体和容器基部,至少在其上设置有第一通孔,并且在容器主体和用于容纳内容器的容器基座之间形成有第一内部空间。 所述内部容器包括顶盖和底部基座,至少第二通孔与所述第一通孔相连接,所述第一内部空间形成在所述顶盖和所述底部基座之间,用于存储掩模版。 清洗阀设置在外容器基座上的第一通孔中并连接到所述内容器的第二通孔,其中清洗阀包括弹簧和阀部件。 因此,当阀部分被清洗头支撑时,阀部分压缩用于清洗阀的弹簧以连接到清洗头。 并且过滤材料设置在容器主体和容器基座之间的接合部分上,以防止掩模版的内部被污染。

    Container and liner thereof
    6.
    发明授权
    Container and liner thereof 有权
    集装箱及其内衬

    公开(公告)号:US07975848B2

    公开(公告)日:2011-07-12

    申请号:US12187491

    申请日:2008-08-07

    IPC分类号: B65D85/48

    摘要: A container having a top cover and a bottom cover is provided, which includes a canopy disposed on the bottom cover to form therewith a space to accommodate an article. A plurality of locators is disposed on a surface of the bottom cover so that when the bottom cover is tightly combined with the top cover, the locators are clipped between the bottom cover and the top cover to orient the canopy in a fixed position.

    摘要翻译: 提供了具有顶盖和底盖的容器,其包括设置在底盖上的盖子,以形成容纳物品的空间。 多个定位器设置在底盖的表面上,使得当底盖与顶盖紧密结合时,定位器被夹在底盖和顶盖之间,以将罩盖定位在固定位置。

    [PHOTOMASK POSITIONING APPARATUS]

    公开(公告)号:US20050200829A1

    公开(公告)日:2005-09-15

    申请号:US10710542

    申请日:2004-07-20

    申请人: Ming-Chien Chiu

    发明人: Ming-Chien Chiu

    IPC分类号: G03B27/60

    CPC分类号: G03F1/66

    摘要: A photomask positioning apparatus comprises a positioning device having a base, one end of which comprises a bended fixed portion connected to a bottom of the containing space and the other of which is away from the fixed portion comprises a bended positioning portion such that a photomask can be positioned between the positioning portion set at the two sides of the containing space.

    摘要翻译: 光掩模定位装置包括一个定位装置,该定位装置具有底座,其一端包括连接到容纳空间的底部的弯曲固定部分,另一端远离固定部分包括弯曲的定位部分,使得光掩模可以 定位在设置在容纳空间两侧的定位部分之间。

    CONTAINER AND FOOLPROOF DEVICE THEREOF
    8.
    发明申请
    CONTAINER AND FOOLPROOF DEVICE THEREOF 审中-公开
    集装箱及其保护装置

    公开(公告)号:US20090038976A1

    公开(公告)日:2009-02-12

    申请号:US12187437

    申请日:2008-08-07

    IPC分类号: B65D85/48 B65D85/00

    CPC分类号: H01L21/67359

    摘要: A container comprises a first cover and a second cover, in which the first cover comprises an internal space. The container further comprises a plate disposed on the second cover. The second cover is provided with at least one first foolproof device, while the plate is provided with at least one second foolproof device. When the second foolproof device is engaged with the first foolproof device, the plate and the second cover are generally fixedly positioned with respect to each other.

    摘要翻译: 容器包括第一盖和第二盖,其中第一盖包括内部空间。 容器还包括设置在第二盖上的板。 第二盖设置有至少一个第一笨蛋装置,而板上设置有至少一个第二笨蛋装置。 当第二笨蛋装置与第一笨蛋装置接合时,板和第二盖通常相对于彼此固定地定位。

    Holder of photomask
    9.
    发明授权
    Holder of photomask 有权
    光罩持有人

    公开(公告)号:US07009689B2

    公开(公告)日:2006-03-07

    申请号:US10709761

    申请日:2004-05-26

    申请人: Ming-Chien Chiu

    发明人: Ming-Chien Chiu

    IPC分类号: G03B27/62 B65D85/30

    CPC分类号: G03F1/66 G03B27/62

    摘要: An apparatus suitable for holding a photomask comprises a photomask holder having a plurality of through holes and a plurality of protrusions detachably connected to the photmask holder via the through holes. The photomask is positioned on supporting ridges of the protrusions so that the friction between the protrusions and the photomask is prevented, and the generation of particulates can be effectively reduced.

    摘要翻译: 适用于保持光掩模的装置包括具有多个通孔的光掩模保持器和经由通孔可拆卸地连接到光罩保持件的多个突起。 光掩模被定位在突起的支撑脊上,从而防止突起和光掩模之间的摩擦,并且可以有效地减少微粒的产生。

    Method of manufacturing aluminum frames for photomask protective films
    10.
    发明授权
    Method of manufacturing aluminum frames for photomask protective films 失效
    制造光掩模保护膜铝框的方法

    公开(公告)号:US06632125B2

    公开(公告)日:2003-10-14

    申请号:US09956150

    申请日:2001-09-20

    申请人: Ming-Chien Chiu

    发明人: Ming-Chien Chiu

    IPC分类号: B24B100

    摘要: A method of manufacturing aluminum frames for photomask protective films comprises the step of: providing a square-shaped hollow or solid strut aluminum material, fastening the bottom end of the aluminum material to a base of a machine tool, using a milling cutter to fabricate and form a hollow trough for a selected depth in the aluminum material from the top surface thereof, and using a cutting tool to cut off the aluminum material at the periphery of the hollow trough to form individual aluminum frames for the photomask protective films. The method of the invention uses fewer chucks and screw bolts during machining, and can reduce chuck setup time and simplify machining processes.

    摘要翻译: 制造用于光掩模保护膜的铝框架的方法包括以下步骤:提供方形中空或固体支柱铝材料,使用铣刀将铝材料的底端紧固到机床的基座上以制造和 在铝材料的上表面形成用于铝材料的选定深度的中空槽,并且使用切割工具在中空槽的周边切断铝材料,以形成用于光掩模保护膜的单独的铝框架。 本发明的方法在加工过程中使用较少的卡盘和螺栓,并且可以减少卡盘建立时间并简化加工过程。