Chemical vapor deposition devices and methods
    1.
    发明申请
    Chemical vapor deposition devices and methods 审中-公开
    化学气相沉积装置及方法

    公开(公告)号:US20060289675A1

    公开(公告)日:2006-12-28

    申请号:US10467139

    申请日:2001-12-27

    IPC分类号: B05B1/24

    摘要: Apparatus is described for rapidly coating a large area, or for rapidly producing a powder. In one embodiment, a liquid having a coating chemical is pumped from a liquid reservoir to a distribution manifold. From the distribution manifold, the liquid is carried under pressure to a geometric array, e.g., linear, of atomization nozzles. Flow equalization means are provided for equalizing the flow of the liquid delivered to each nozzle, and, preferably, means are provided for equalizing the temperature of the liquid delivered to each nozzle. The liquid, upon exiting the nozzles with the attendant pressure drop atomizes. The atomized liquid coats a substrate either in non-reacted or reacted form, or forms a powder. In a preferred embodiment, a solution of precursor chemical is reacted in a geometric array of flames produced at the nozzles, and a coating material produced in the flame coats the substrate, or a powder is formed. In another embodiment, vaporized precursor and vaporized are fed to a burner chamber having a linear exit slit. The vapor exiting the slit is burned, and material produced in a flame reaction are deposited on a substrate, or the powder formed is collected.

    摘要翻译: 描述了用于快速涂覆大面积或用于快速生产粉末的装置。 在一个实施例中,具有涂料化学品的液体从液体储存器泵送到分配歧管。 从分配歧管中,将液体在压力下承载到几何阵列,例如线性的雾化喷嘴。 提供流量均衡装置用于均衡输送到每个喷嘴的液体的流动,并且优选地,提供用于均衡输送到每个喷嘴的液体的温度的装置。 液体在离开喷嘴时伴随着压力降雾化。 雾化液体以未反应或反应形式涂覆基材,或形成粉末。 在优选的实施方案中,前体化学品的溶液在喷嘴处产生的几何阵列的火焰中反应,并且在火焰中产生的涂层材料涂覆基底,或形成粉末。 在另一个实施方案中,蒸发的前驱体并蒸发,被送入具有线性出口狭缝的燃烧室。 离开狭缝的蒸汽被燃烧,并且在火焰反应中产生的材料沉积在基底上,或者收集所形成的粉末。

    Liquid atomization methods and devices
    2.
    发明授权
    Liquid atomization methods and devices 有权
    液体雾化方法和装置

    公开(公告)号:US06601776B1

    公开(公告)日:2003-08-05

    申请号:US10070958

    申请日:2002-06-06

    IPC分类号: F02D700

    摘要: The present invention involves controlled atomization of liquids for various applications such as part/droplet seeding for laser-based measurements of flow velocity, temperature, and concentration; flame and a plasma based elemental analysis; nano-powder production; spray drying for generation of small-sized particles; nebulizers in the production of sub-micron size droplets and for atomizing fuel for use in combustion chambers. In these and other atomizer applications the control of droplet and/or particle size is very critical In some applications extremely small droplets are preferred (less than a micron), while in others, droplet diameters on the scale of several microns are required. The present invention has the flexibility of forming droplets within a particular range of diameters, wherein not only the size of the average droplet can be adjusted, but the range of sizes may be adjusted as well. The atomizer (4) itself is in the form of a heated tube (44) having an inlet end (48) and an outlet end (50). As liquid travels through the tube it is heated and upon exiting the tube and entering a reduced pressure area the liquid atomizes to form very fine droplets. By electrically heating the tube by passing a current therethrough, the heating adjustment can be performed on-the-fly allowing size adjustment during operation of the atomizer. Several different embodiments of the atomization device are disclosed.

    摘要翻译: 本发明涉及用于各种应用的液体的受控雾化,例如用于基于激光的流速,温度和浓度的测量的部分/液滴接种; 火焰和基于等离子体的元素分析; 纳米粉生产; 喷雾干燥产生小尺寸颗粒; 喷雾器在生产亚微米级的液滴和雾化用于燃烧室的燃料。 在这些和其他雾化器应用中,液滴和/或粒度的控制是非常关键的。在一些应用中,极小的液滴是优选的(小于一微米),而在其它应用中,需要几微米尺度的液滴直径。 本发明具有在特定的直径范围内形成液滴的灵活性,其中不仅可以调节平均液滴的尺寸,而且可以调整尺寸范围。 雾化器(4)本身是具有入口端(48)和出口端(50)的加热管(44)的形式。 当液体通过管道时,其被加热并且在离开管并进入减压区域时,液体雾化以形成非常细小的液滴。 通过使电流通过电流进行电加热,可以在雾化器的操作期间进行加热调节,允许尺寸调节。 公开了雾化装置的几个不同实施例。