公开(公告)号：US20080111996A1

公开(公告)日：2008-05-15

申请号：US11793604

申请日：2005-12-22

申请人： Mitsuo Takeda ,  Michal Emanuel Pawlowski ,  Youhei Sakano

发明人： Mitsuo Takeda ,  Michal Emanuel Pawlowski ,  Youhei Sakano

IPC分类号： G01B11/02

CPC分类号： G01B11/2441 ,  G01B9/02027 ,  G01B9/0207 ,  G01B9/02084 ,  G01B9/0209

摘要： Three-dimensional shape measuring instrument (white interferometer) for measuring the three-dimensional shape of an object to be measured by using white interference fringes, which detects the position where the amplitude of the white interference fringes takes on a maximum value with high accuracy in a short calculation processing time. An envelope distribution of the amplitude of the white interference fringes produced by the interference between the returning light from a reference mirror (6) and the returning light from an object (7) to be measured is determined, and an approximate position where the contrast of the white interference fringes is the highest is determined using this envelope distribution. The interference fringes of two or more different spectrum band components included in the white interference fringes are extracted, and the positions which are near the determined approximate position and at which the phases of the interference fringes of the different spectrum band components take on the same values are determined.

摘要翻译： 用于通过使用白色干涉条纹来测量待测物体的三维形状的三维形状测量仪器（白色干涉仪），其将白色干涉条纹的幅度以高精度检测到最大值的位置 一个很短的计算处理时间。 确定由来自参考反射镜（6）的返回光与来自待测物体（7）的返回光之间的干涉产生的白色干涉条纹的幅度的包络分布，以及近似位置 白色干涉条纹是使用该包络分布确定的最高的。 提取包括在白色干涉条纹中的两个或更多个不同频谱分量的干涉条纹，并且靠近所确定的近似位置的位置和不同频谱分量的干涉条纹的相位处于相同值 确定。

公开(公告)号：US07701589B2

公开(公告)日：2010-04-20

申请号：US11793604

申请日：2005-12-22

申请人： Mitsuo Takeda ,  Michal Emanuel Pawlowski ,  Youhei Sakano

发明人： Mitsuo Takeda ,  Michal Emanuel Pawlowski ,  Youhei Sakano

IPC分类号： G01B11/02

CPC分类号： G01B11/2441 ,  G01B9/02027 ,  G01B9/0207 ,  G01B9/02084 ,  G01B9/0209

摘要： Three-dimensional shape measuring instrument (white interferometer) for measuring the three-dimensional shape of an object to be measured by using white interference fringes, which detects the position where the amplitude of the white interference fringes takes on a maximum value with high accuracy in a short calculation processing time. An envelope distribution of the amplitude of the white interference fringes produced by the interference between the returning light from a reference mirror (6) and the returning light from an object (7) to be measured is determined, and an approximate position where the contrast of the white interference fringes is the highest is determined using this envelope distribution. The interference fringes of two or more different spectrum band components included in the white interference fringes are extracted, and the positions which are near the determined approximate position and at which the phases of the interference fringes of the different spectrum band components take on the same values are determined.

摘要翻译： 用于通过使用白色干涉条纹来测量待测物体的三维形状的三维形状测量仪器（白色干涉仪），其将白色干涉条纹的幅度以高精度检测到最大值的位置 一个很短的计算处理时间。 确定由来自参考反射镜（6）的返回光与来自待测物体（7）的返回光之间的干涉产生的白色干涉条纹的幅度的包络分布，以及近似位置 白色干涉条纹是使用该包络分布确定的最高的。 提取包括在白色干涉条纹中的两个或更多个不同频谱分量的干涉条纹，并且靠近所确定的近似位置的位置和不同频谱分量的干涉条纹的相位处于相同的值 确定。