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    Cooling device and construction machine or working machine equipped with the same
    3.
    发明授权
    Cooling device and construction machine or working machine equipped with the same 有权
    冷却装置和施工机械或工作机器配备相同

    公开(公告)号：US09228320B2

    公开(公告)日：2016-01-05

    申请号：US12675145

    申请日：2008-08-29

    申请人： Mitsuo Yabe ,  Hiroki Shinoda ,  Masahiro Ikeda ,  Tomoya Watanabe ,  Atsushi Kawano ,  Seiichi Fuchita ,  Yasuhiro Kusuyama ,  Teruyuki Matsuki

    发明人： Mitsuo Yabe ,  Hiroki Shinoda ,  Masahiro Ikeda ,  Tomoya Watanabe ,  Atsushi Kawano ,  Seiichi Fuchita ,  Yasuhiro Kusuyama ,  Teruyuki Matsuki

    IPC分类号： B60H1/00 ,  E02F9/00 ,  E02F9/08 ,  F01P11/10 ,  F04D29/16

    CPC分类号： E02F9/00 ,  B60K11/04 ,  E02F9/0866 ,  F01P11/10 ,  F04D29/164

    摘要： A cooling device includes: a cooling fan; a shroud provided at an outer circumferential side of the cooling fan; an inner circumferential wall provided on the shroud and adjacent to the outer circumference of the cooling fan; and an outer circumferential wall provided to surround the inner circumferential wall. An air-flow-direction downstream side end of an outer circumferential edge of the cooling fan is positioned at a further downstream position in an air flow direction than an air-flow-direction downstream side end of the inner circumferential wall. An angle between: an line connecting the air-flow-direction downstream side end of the inner circumferential wall to the air-flow-direction downstream side end of the outer circumferential wall in cross section along the air flow direction of the inner circumferential wall and the outer circumferential wall; and a line orthogonal to the air flow direction, is 9 degrees or more and 45 degrees or less.

    摘要翻译： 冷却装置包括：冷却风扇; 设置在所述冷却风扇的外周侧的护罩; 设置在所述护罩上且与所述冷却风扇的外周相邻的内周壁; 以及设置成围绕内周壁的外周壁。 冷却风扇的外周缘的气流方向下游侧端部位于比内周壁的空气流动方向下游侧端部的空气流动方向更下游的位置。 将内周壁的空气流动方向下游侧端部与外周壁的空气流动方向下游侧端部沿着内周壁的空气流动方向的横截面形成为一定的角度，以及 外周壁; 与空气流动方向正交的线为9度以上且45度以下。

    COOLING DEVICE AND CONSTRUCTION MACHINE OR WORKING MACHINE EQUIPPED WITH THE SAME
    4.
    发明申请
    COOLING DEVICE AND CONSTRUCTION MACHINE OR WORKING MACHINE EQUIPPED WITH THE SAME 有权
    冷却装置及其配套机器或配套机器

    公开(公告)号：US20100206526A1

    公开(公告)日：2010-08-19

    申请号：US12675145

    申请日：2008-08-29

    申请人： Mitsuo Yabe ,  Hiroki Shinoda ,  Masahiro Ikeda ,  Tomoya Watanabe ,  Atsushi Kawano ,  Seiichi Fuchita ,  Yasuhiro Kusuyama ,  Teruyuki Matsuki

    发明人： Mitsuo Yabe ,  Hiroki Shinoda ,  Masahiro Ikeda ,  Tomoya Watanabe ,  Atsushi Kawano ,  Seiichi Fuchita ,  Yasuhiro Kusuyama ,  Teruyuki Matsuki

    IPC分类号： F28F13/00

    CPC分类号： E02F9/00 ,  B60K11/04 ,  E02F9/0866 ,  F01P11/10 ,  F04D29/164

    摘要： A cooling device includes: a cooling fan; a shroud provided at an outer circumferential side of the cooling fan; an inner circumferential wall provided on the shroud and adjacent to the outer circumference of the cooling fan; and an outer circumferential wall provided to surround the inner circumferential wall. An air-flow-direction downstream side end of an outer circumferential edge of the cooling fan is positioned at a further downstream position in an air flow direction than an air-flow-direction downstream side end of the inner circumferential wall. An angle between: an line connecting the air-flow-direction downstream side end of the inner circumferential wall to the air-flow-direction downstream side end of the outer circumferential wall in cross section along the air flow direction of the inner circumferential wall and the outer circumferential wall; and a line orthogonal to the air flow direction, is 9 degrees or more and 45 degrees or less.

    摘要翻译： 冷却装置包括：冷却风扇; 设置在所述冷却风扇的外周侧的护罩; 设置在所述护罩上且与所述冷却风扇的外周相邻的内周壁; 以及设置成围绕内周壁的外周壁。 冷却风扇的外周缘的气流方向下游侧端部位于比内周壁的空气流动方向下游侧端部的空气流动方向更下游的位置。 将内周壁的空气流动方向下游侧端部与外周壁的空气流动方向下游侧端部沿着内周壁的空气流动方向的横截面形成为一定的角度，以及 外周壁; 与空气流动方向正交的线为9度以上且45度以下。

    COOLING DEVICE AND CONSTRUCTION MACHINE OR WORKING MACHINE EQUIPPED WITH THE SAME
    5.
    发明申请
    COOLING DEVICE AND CONSTRUCTION MACHINE OR WORKING MACHINE EQUIPPED WITH THE SAME 有权
    冷却装置及其配套机器或配套机器

    公开(公告)号：US20100206525A1

    公开(公告)日：2010-08-19

    申请号：US12675127

    申请日：2008-08-29

    申请人： Mitsuo Yabe ,  Hiroki Shinoda ,  Masahiro Ikeda ,  Tomoya Watanabe ,  Atsushi Kawano ,  Seiichi Fuchita ,  Yasuhiro Kusuyama ,  Teruyuki Matsuki

    发明人： Mitsuo Yabe ,  Hiroki Shinoda ,  Masahiro Ikeda ,  Tomoya Watanabe ,  Atsushi Kawano ,  Seiichi Fuchita ,  Yasuhiro Kusuyama ,  Teruyuki Matsuki

    IPC分类号： F28F13/00

    CPC分类号： E02F9/00 ,  B60K11/02 ,  B60Y2200/412 ,  E02F9/0866 ,  F01P5/06 ,  F01P11/10 ,  F04D29/164

    摘要： A cooling device includes: a cooling fan; a shroud provided at an outer circumferential side of the cooling fan; an inner circumferential wall provided on the shroud and adjacent to the outer circumference of the cooling fan so as to surround the cooling fan; an outer circumferential wall provided to surround the inner circumferential wall. An air-flow-direction downstream side end of the outer circumferential wall is positioned at a further downstream position in an air flow direction than an air-flow-direction downstream side end of the inner circumferential wall. The cooling fan is rotatable within a space provided on a radially inner side of the inner circumferential wall. The air-flow-direction downstream side end of the outer circumferential wall is provided at a further upstream position in the air flow direction than an air-flow-direction downstream side end of the cooling fan.

    摘要翻译： 冷却装置包括：冷却风扇; 设置在所述冷却风扇的外周侧的护罩; 设置在所述护罩上并与所述冷却风扇的外周相邻的内周壁，以围绕所述冷却风扇; 设置成围绕内周壁的外周壁。 外周壁的气流方向下游侧端部位于比内周壁的气流方向下游侧端部的空气流动方向更下游的位置。 冷却风扇可以在设置在内周壁的径向内侧的空间内旋转。 外周壁的空气流动方向下游侧端部设置在空气流动方向上比冷却风扇的空气流动方向下游侧端部更上游的位置。

    COOLING DEVICE AND CONSTRUCTION MACHINE OR WORKING MACHINE EQUIPPED WITH THE SAME
    6.
    发明申请
    COOLING DEVICE AND CONSTRUCTION MACHINE OR WORKING MACHINE EQUIPPED WITH THE SAME 有权
    冷却装置及其配套机器或配套机器

    公开(公告)号：US20100200194A1

    公开(公告)日：2010-08-12

    申请号：US12675140

    申请日：2008-08-29

    申请人： Mitsuo Yabe ,  Hiroki Shinoda ,  Masahiro Ikeda ,  Tomoya Watanabe ,  Atsushi Kawano ,  Seiichi Fuchita ,  Yasuhiro Kusuyama ,  Teruyuki Matsuki

    发明人： Mitsuo Yabe ,  Hiroki Shinoda ,  Masahiro Ikeda ,  Tomoya Watanabe ,  Atsushi Kawano ,  Seiichi Fuchita ,  Yasuhiro Kusuyama ,  Teruyuki Matsuki

    IPC分类号： F01P1/00 ,  G06F1/20

    CPC分类号： E02F9/00 ,  B60K11/04 ,  E02F9/0866 ,  F01P11/10 ,  F04D29/164

    摘要： A cooling device includes: a cooling fan; a shroud provided at an outer circumferential side of the cooling fan; an inner circumferential wall provided on the shroud and adjacent to the outer circumference of the cooling fan; and an outer circumferential wall provided to surround the inner circumferential wall. An air-flow-direction downstream side end of the outer circumferential wall is positioned at a further downstream position in an air flow direction than an air-flow-direction downstream side end of the inner circumferential wall. An air-flow-direction downstream side end of the cooling fan is positioned at a further downstream position than the air-flow-direction downstream side end of the inner circumferential wall. A ratio between a length of the outer circumferential wall and a length of the inner circumferential wall in the air flow direction is 1.07 or more and 1.81 or less, and a width between the outer circumferential wall and the inner circumferential wall is 15 mm or more and 55 mm or less.

    摘要翻译： 冷却装置包括：冷却风扇; 设置在所述冷却风扇的外周侧的护罩; 设置在所述护罩上且与所述冷却风扇的外周相邻的内周壁; 以及设置成围绕内周壁的外周壁。 外周壁的气流方向下游侧端部位于比内周壁的气流方向下游侧端部的空气流动方向更下游的位置。 冷却风扇的空气流动方向下游侧端部位于比内周壁的空气流动方向下游侧端部更靠下游的位置。 外周壁的长度与内周壁的空气流动方向的长度之比为1.07以上且1.81以下，外周壁与内周壁的宽度为15mm以上 和55mm以下。

    Cooling device and construction machine or working machine equipped with the same
    7.
    发明授权
    Cooling device and construction machine or working machine equipped with the same 有权
    冷却装置和施工机械或工作机器配备相同

    公开(公告)号：US09228319B2

    公开(公告)日：2016-01-05

    申请号：US12675140

    申请日：2008-08-29

    申请人： Mitsuo Yabe ,  Hiroki Shinoda ,  Masahiro Ikeda ,  Tomoya Watanabe ,  Atsushi Kawano ,  Seiichi Fuchita ,  Yasuhiro Kusuyama ,  Teruyuki Matsuki

    发明人： Mitsuo Yabe ,  Hiroki Shinoda ,  Masahiro Ikeda ,  Tomoya Watanabe ,  Atsushi Kawano ,  Seiichi Fuchita ,  Yasuhiro Kusuyama ,  Teruyuki Matsuki

    IPC分类号： B60H1/00 ,  E02F9/00 ,  E02F9/08 ,  F01P11/10 ,  F04D29/16

    CPC分类号： E02F9/00 ,  B60K11/04 ,  E02F9/0866 ,  F01P11/10 ,  F04D29/164

    摘要： A cooling device includes: a cooling fan; a shroud provided at an outer circumferential side of the cooling fan; an inner circumferential wall provided on the shroud and adjacent to the outer circumference of the cooling fan; and an outer circumferential wall provided to surround the inner circumferential wall. An air-flow-direction downstream side end of the outer circumferential wall is positioned at a further downstream position in an air flow direction than an air-flow-direction downstream side end of the inner circumferential wall. An air-flow-direction downstream side end of the cooling fan is positioned at a further downstream position than the air-flow-direction downstream side end of the inner circumferential wall. A ratio between a length of the outer circumferential wall and a length of the inner circumferential wall in the air flow direction is 1.07 or more and 1.81 or less, and a width between the outer circumferential wall and the inner circumferential wall is 15 mm or more and 55 mm or less.

    摘要翻译： 冷却装置包括：冷却风扇; 设置在所述冷却风扇的外周侧的护罩; 设置在所述护罩上且与所述冷却风扇的外周相邻的内周壁; 以及设置成围绕内周壁的外周壁。 外周壁的气流方向下游侧端部位于比内周壁的气流方向下游侧端部的空气流动方向更下游的位置。 冷却风扇的空气流动方向下游侧端部位于比内周壁的空气流动方向下游侧端部更靠下游的位置。 外周壁的长度与内周壁的空气流动方向的长度之比为1.07以上且1.81以下，外周壁与内周壁的宽度为15mm以上 和55mm以下。

    Static electricity chuck apparatus and semiconductor producing apparatus provided with the static electricity chuck apparatus
    9.
    发明授权
    Static electricity chuck apparatus and semiconductor producing apparatus provided with the static electricity chuck apparatus 失效
    具有静电卡盘装置的静电卡盘装置和半导体制造装置

    公开(公告)号：US06693790B2

    公开(公告)日：2004-02-17

    申请号：US10121557

    申请日：2002-04-12

    申请人： Teruyuki Matsuki ,  Motohide Sugihara ,  Kanichi Kadotani

    发明人： Teruyuki Matsuki ,  Motohide Sugihara ,  Kanichi Kadotani

    IPC分类号： H01L2168

    CPC分类号： H01L21/67017

    摘要： Insulative viscous fluid or gel material having low hardness is used for at least a first electricity insulating layer as an insulating layer of a static electricity chuck. Since a holding surface of the first electricity insulating layer is deformed in accordance with a back surface shape of a wafer, a substantially entire surface of the holding surface comes into intimate contact with the wafer uniformly. An exposing surface of the electricity insulating layer may be coated with a second electricity insulating layer having corrosion resistance. With this structure, adhesion between the back surface of the wafer and the static electricity chuck apparatus is enhanced, which reduces the contact thermal resistance, and it is possible to obtain a static electricity chuck apparatus which is capable of controlling temperature of a surface of the wafer with high precision and has high plasma resistance and durability.

    摘要翻译： 作为静电卡盘的绝缘层的至少第一电绝缘层使用具有低硬度的绝缘粘性流体或凝胶材料。 由于第一电绝缘层的保持表面根据晶片的背面形状而变形，所以保持表面的大致整个表面均匀地与晶片紧密接触。 电绝缘层的暴露表面可以涂覆有具有耐腐蚀性的第二电绝缘层。 利用这种结构，提高了晶片的背面与静电卡盘装置之间的粘附性，这降低了接触热阻，并且可以获得能够控制表面的温度的静电卡盘装置 晶圆精度高，等离子电阻和耐久性好。

    Heating apparatus in cabin
    10.
    发明授权
    Heating apparatus in cabin 失效
    机舱加热装置

    公开(公告)号：US5351884A

    公开(公告)日：1994-10-04

    申请号：US30198

    申请日：1993-03-24

    申请人： Kanichi Kadotani ,  Teruyuki Matsuki ,  Hiroki Nakanishi

    发明人： Kanichi Kadotani ,  Teruyuki Matsuki ,  Hiroki Nakanishi

    IPC分类号： B60H1/00 ,  B60H1/12 ,  B60H1/24 ,  F24F11/04 ,  B60H1/02

    CPC分类号： B60H1/247

    摘要： A cabin heating apparatus in accordance with the present invention is provided with a central duct (3) extended to one side of an operator's seat through a front-to-rear changeover damper (2) connected to an air conditioner unit (1), a rear duct (4) extended to the rear of the operator's seat through the front-to-rear changeover damper 2 and outlets (9) formed at an extreme end part of the rear duct (4). The cabin heating apparatus is further provided with a lower outlet (6) for supplying an air flow along a floor through an above-to-below changeover damper (5) connected to an extreme end part of the central duct (3), a front duct (7) rising from the above-to-below changeover damper 6 and a front outlet (8) provided at an extreme end part of the front duct (7). An appropriate air flow distribution ratio is set by these changeover dampers (2, 5).

    摘要翻译： PCT No.PCT / JP91 / 01252 Sec。 371日期1993年3月24日 102（e）1993年3月24日PCT PCT 1991年9月20日PCT公布。 公开号WO92 / 05971 日本公开于1992年4月16日。根据本发明的客舱加热装置设置有通过连接到空气的前后转换阻尼器（2）延伸到操作员座位的一侧的中心管道（3） 调节器单元（1），通过前后转换风门2延伸到操作员座椅后部的后管道（4）和形成在后管道（4）的末端部分处的出口（9）。 机舱加热装置还设置有下部出口（6），用于通过连接到中心导管（3）的末端部分的上下转换风阀（5）沿着地板供应空气流，前端 从上到下切换风门6上升的管道（7）和设置在前管道（7）的前端部的前出口（8）。 这些转换阻尼器（2,5）设定适当的气流分配比。