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13 条记录 (耗时 0.039 秒)

    CHARGED PARTICLE BEAM APPLICATION APPARATUS
    9.
    发明申请
    CHARGED PARTICLE BEAM APPLICATION APPARATUS 失效
    充电颗粒光束应用设备

    公开(公告)号：US20080308743A1

    公开(公告)日：2008-12-18

    申请号：US12137128

    申请日：2008-06-11

    申请人： Masaki Mizuochi ,  Shoji Tomida

    发明人： Masaki Mizuochi ,  Shoji Tomida

    IPC分类号： G21K5/08 ,  H01L21/683

    CPC分类号： H01L21/6831 ,  H01J37/20 ,  H01J2237/2008 ,  H01J2237/28 ,  H01J2237/2811 ,  H01J2237/3174 ,  H01J2237/31749

    摘要： An apparatus capable of improving image quality by making it possible to suck specimens of different sizes electrostatically, and uniformalizing an electric field of a specimen edge portion, while suppressing increase in prime cost is provided. Specimen holding means is an electrostatic chuck, a master flat plane part surrounding a specimen of the largest size of specimen sizes, and an opening surrounding a specimen size except for the largest specimen size are included at an outer peripheral portion of the electrostatic chuck, a dummy specimen attachable to and detachable from the electrostatic chuck is included, and at a time of switching the specimen size, a dummy specimen is selected (or may be prevented from being used).

    摘要翻译： 提供了一种能够通过静电吸取不同尺寸的试样来提高图像质量并且同时抑制原始成本增加的同时使试样边缘部分的电场均匀化的装置。 样本保持装置是静电卡盘，围绕最大尺寸样本尺寸的样本的主平面部分和围绕最大样本尺寸的样本尺寸的开口包括在静电卡盘的外周部分， 包含可静电卡盘可拆卸的虚拟试样，在切换试样尺寸的情况下，选择虚拟试样（或者可以防止使用）。

    Charged particle beam application apparatus
    10.
    发明授权
    Charged particle beam application apparatus 失效
    带电粒子束施加装置

    公开(公告)号：US08158955B2

    公开(公告)日：2012-04-17

    申请号：US12828781

    申请日：2010-07-01

    申请人： Masaki Mizuochi ,  Shoji Tomida

    发明人： Masaki Mizuochi ,  Shoji Tomida

    IPC分类号： H02N13/00

    CPC分类号： H01L21/6831 ,  H01J37/20 ,  H01J2237/2008 ,  H01J2237/28 ,  H01J2237/2811 ,  H01J2237/3174 ,  H01J2237/31749

    摘要： An apparatus capable of improving image quality by making it possible to suck specimens of different sizes electrostatically, and uniformalizing an electric field of a specimen edge portion, while suppressing increase in prime cost is provided. Specimen holding means is an electrostatic chuck, a master flat plane part surrounding a specimen of the largest size of specimen sizes, and an opening surrounding a specimen size except for the largest specimen size are included at an outer peripheral portion of the electrostatic chuck, a dummy specimen attachable to and detachable from the electrostatic chuck is included, and at a time of switching the specimen size, a dummy specimen is selected (or may be prevented from being used).

    摘要翻译： 提供了一种能够通过静电吸取不同尺寸的试样来提高图像质量并且同时抑制原始成本增加的同时使试样边缘部分的电场均匀化的装置。 样本保持装置是静电卡盘，围绕最大尺寸样本尺寸的样本的主平面部分和围绕最大样本尺寸的样本尺寸的开口包括在静电卡盘的外周部分， 包含可静电卡盘可拆卸的虚拟试样，在切换试样尺寸的情况下，选择虚拟试样（或者可以防止使用）。