公开(公告)号：US20050116187A1

公开(公告)日：2005-06-02

申请号：US10497053

申请日：2002-11-28

申请人： Mitsuru Uda ,  Kazunari Terakawa ,  Akira Suzuki ,  Chiaki Oishi ,  Yasuharu Yamada ,  Teruhiko Hayano

发明人： Mitsuru Uda ,  Kazunari Terakawa ,  Akira Suzuki ,  Chiaki Oishi ,  Yasuharu Yamada ,  Teruhiko Hayano

IPC分类号： G01N21/956 ,  G03F7/20 ,  G01N21/88

CPC分类号： G03F7/70616 ,  G01N21/956 ,  G03F7/70641

摘要： Disclosed is a pattern inspection apparatus which easily and highly accurately detects a profile error (deviation) of at least one pattern having a cross section with projections and recesses. The inspection apparatus for the pattern 32 is for detecting the profile error of the pattern having a cross section with a projection and a recess. This inspection apparatus includes a plate 30 on which a pattern is mounted, light sources 40, 42 and 44 which can change angles of illuminating light emitted onto the pattern, within a range of 15 to 75 degrees with reference to the top surface of the pattern, and photodetectors 52 and 54 which can receive reflected light from the pattern at an angle within a range of 15 to 75 degrees with reference to the top surface of the pattern. The inspection apparatus is characterized by that the profile error of the pattern is detected based on an amount of the reflected light from an edge between the top surface and the side surface of each of the patterns.

摘要翻译： 公开了一种图案检查装置，其容易且高精度地检测至少一个具有突起和凹陷的横截面的图案的轮廓误差（偏差）。 用于图案32的检查装置用于检测具有突起和凹部的横截面的图案的轮廓误差。 该检查装置包括其上安装图案的板30，可以将照射到图案上的照明光的角度相对于图案的顶表面在15至75度的范围内变化的光源40,42和44 以及光电检测器52和54，其可以以相对于图案的顶表面以15至75度的范围内的角度接收来自图案的反射光。 检查装置的特征在于，基于来自每个图案的顶表面和侧表面之间的边缘的反射光的量来检测图案的轮廓误差。

公开(公告)号：US07310141B2

公开(公告)日：2007-12-18

申请号：US10497053

申请日：2002-11-28

申请人： Mitsuru Uda ,  Kazunari Terakawa ,  Akira Suzuki ,  Chiaki Oishi ,  Yasuharu Yamada ,  Teruhiko Hayano

发明人： Mitsuru Uda ,  Kazunari Terakawa ,  Akira Suzuki ,  Chiaki Oishi ,  Yasuharu Yamada ,  Teruhiko Hayano

IPC分类号： G01N21/00

CPC分类号： G03F7/70616 ,  G01N21/956 ,  G03F7/70641

摘要： Disclosed is a pattern inspection apparatus which easily and highly accurately detects a profile error (deviation) of at least one pattern having a cross section with projections and recesses. The inspection apparatus for the pattern 32 is for detecting the profile error of the pattern having a cross section with a projection and a recess. This inspection apparatus includes a plate 30 on which a pattern is mounted, light sources 40, 42 and 44 which can change angles of illuminating light emitted onto the pattern, within a range of 15 to 75 degrees with reference to the top surface of the pattern, and photodetectors 52 and 54 which can receive reflected light from the pattern at an angle within a range of 15 to 75 degrees with reference to the top surface of the pattern. The inspection apparatus is characterized by that the profile error of the pattern is detected based on an amount of the reflected light from an edge between the top surface and the side surface of each of the patterns.

摘要翻译： 公开了一种图案检查装置，其容易且高精度地检测至少一个具有突起和凹陷的横截面的图案的轮廓误差（偏差）。 用于图案32的检查装置用于检测具有突起和凹部的横截面的图案的轮廓误差。 该检查装置包括其上安装图案的板30，可以将照射到图案上的照明光的角度相对于图案的顶表面在15至75度的范围内变化的光源40,42和44 以及光电检测器52和54，其可以以相对于图案的顶表面以15至75度的范围内的角度接收来自图案的反射光。 检查装置的特征在于，基于来自每个图案的顶表面和侧表面之间的边缘的反射光的量来检测图案的轮廓误差。

公开(公告)号：US07525651B2

公开(公告)日：2009-04-28

申请号：US11924126

申请日：2007-10-25

申请人： Mitsuru Uda ,  Kazunari Terakawa ,  Akira Susuki ,  Chiaki Oishi ,  Yasuharu Yamada ,  Teruhiko Havano

发明人： Mitsuru Uda ,  Kazunari Terakawa ,  Akira Susuki ,  Chiaki Oishi ,  Yasuharu Yamada ,  Teruhiko Havano

IPC分类号： G01N21/00

CPC分类号： G03F7/70616 ,  G01N21/956 ,  G03F7/70641

摘要： Disclosed is a pattern inspection apparatus which easily and highly accurately detects a profile error (deviation) of at least one pattern having a cross section with projections and recesses. The inspection apparatus for the pattern 32 is for detecting the profile error of the pattern having a cross section with a projection and a recess. This inspection apparatus includes a plate 30 on which a pattern is mounted, light sources 40, 42 and 44 which can change angles of illuminating light emitted onto the pattern, within a range of 15 to 75 degrees with reference to the top surface of the pattern, and photodetectors 52 and 54 which can receive reflected light from the pattern at an angle within a range of 15 to 75 degrees with reference to the top surface of the pattern. The inspection apparatus is characterized by that the profile error of the pattern is detected based on an amount of the reflected light from an edge between the top surface and the side surface of each of the patterns.

摘要翻译： 公开了一种图案检查装置，其容易且高精度地检测至少一个具有突起和凹陷的横截面的图案的轮廓误差（偏差）。 用于图案32的检查装置用于检测具有突起和凹部的横截面的图案的轮廓误差。 该检查装置包括其上安装图案的板30，可以将照射到图案上的照明光的角度相对于图案的顶表面在15至75度的范围内变化的光源40,42和44 以及光电检测器52和54，其可以以相对于图案的顶表面以15至75度的范围内的角度接收来自图案的反射光。 检查装置的特征在于，基于来自每个图案的顶表面和侧表面之间的边缘的反射光的量来检测图案的轮廓误差。

公开(公告)号：US20080192257A1

公开(公告)日：2008-08-14

申请号：US11924126

申请日：2007-10-25

申请人： Mitsuru Uda ,  Kazunari Terakawa ,  Akira Susuki ,  Chiaki Oishi ,  Yasuharu Yamada ,  Teruhiko Havano

发明人： Mitsuru Uda ,  Kazunari Terakawa ,  Akira Susuki ,  Chiaki Oishi ,  Yasuharu Yamada ,  Teruhiko Havano

IPC分类号： G01N21/55

CPC分类号： G03F7/70616 ,  G01N21/956 ,  G03F7/70641

摘要： Disclosed is a pattern inspection apparatus which easily and highly accurately detects a profile error (deviation) of at least one pattern having a cross section with projections and recesses. The inspection apparatus for the pattern 32 is for detecting the profile error of the pattern having a cross section with a projection and a recess. This inspection apparatus includes a plate 30 on which a pattern is mounted, light sources 40, 42 and 44 which can change angles of illuminating light emitted onto the pattern, within a range of 15 to 75 degrees with reference to the top surface of the pattern, and photodetectors 52 and 54 which can receive reflected light from the pattern at an angle within a range of 15 to 75 degrees with reference to the top surface of the pattern. The inspection apparatus is characterized by that the profile error of the pattern is detected based on an amount of the reflected light from an edge between the top surface and the side surface of each of the patterns.

摘要翻译： 公开了一种图案检查装置，其容易且高精度地检测至少一个具有突起和凹陷的横截面的图案的轮廓误差（偏差）。 用于图案32的检查装置用于检测具有突起和凹部的横截面的图案的轮廓误差。 该检查装置包括其上安装图案的板30，可以将照射到图案上的照明光的角度相对于图案的顶表面在15至75度的范围内变化的光源40,42和44 以及光电检测器52和54，其可以以相对于图案的顶表面以15至75度的范围内的角度接收来自图案的反射光。 检查装置的特征在于，基于来自每个图案的顶表面和侧表面之间的边缘的反射光的量来检测图案的轮廓误差。

公开(公告)号：US07719672B2

公开(公告)日：2010-05-18

申请号：US12327222

申请日：2008-12-03

申请人： Atsushi Kohayase ,  Mitsuru Uda

发明人： Atsushi Kohayase ,  Mitsuru Uda

IPC分类号： G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/8422 ,  G01N21/9501

摘要： The invention provides a macro inspection apparatus including: a stage on which an inspection object is placed; a light source that irradiates light on an upper surface of the inspection object from an angular direction arbitrarily selected relative to the upper surface of the inspection object; and a line sensor which is placed in an angular direction selected relative to the upper surface of the inspection object so that an optical axis thereof corresponds with an edge of the upper surface area irradiated by the light source and which receives reflected light from the edge of the upper surface area of the inspection object.

摘要翻译： 本发明提供了一种宏观检查装置，包括：放置检查对象的阶段; 从相对于检查对象的上表面任意选择的角度方向对检查对象的上表面照射光的光源; 以及线传感器，其以相对于检查对象的上表面选择的角度方向放置，使得其光轴对应于由光源照射的上表面区域的边缘，并且接收来自 检查对象的上表面积。

公开(公告)号：US06452671B1

公开(公告)日：2002-09-17

申请号：US09698423

申请日：2000-10-27

申请人： Mitsuru Uda ,  Tsuyoshi Yamaguchi ,  Masami Shinohara

发明人： Mitsuru Uda ,  Tsuyoshi Yamaguchi ,  Masami Shinohara

IPC分类号： G01N2100

CPC分类号： G01N21/956

摘要： The inspecting apparatus according to the present invention includes an illuminator for emitting radiation onto a substrate having a surface on which a fine feature pattern is formed. Inspection for defects in the pattern is performed by visually inspecting radiation diffracted by the surface. The illuminator provides radiation including two different complementary colors.

摘要翻译： 根据本发明的检查装置包括用于将辐射发射到具有形成有精细特征图案的表面的基板上的照明器。 通过视觉检查由表面衍射的辐射来进行图案中的缺陷的检查。 照明器提供包括两种不同补色的辐射。

公开(公告)号：US07440118B2

公开(公告)日：2008-10-21

申请号：US11419030

申请日：2006-05-18

申请人： Mitsuru Uda ,  Atsushi Kohayase ,  Hiroshi Yamashita

发明人： Mitsuru Uda ,  Atsushi Kohayase ,  Hiroshi Yamashita

IPC分类号： G01B11/30

CPC分类号： G01N21/95 ,  G01N21/86 ,  G01N2021/9511

摘要： The present invention provides an apparatus and method for detecting flatness and/or unevenness of a surface of an overcoat layer on a colored pixel layer of a color filter with a high degree of accuracy. The apparatus includes: a light source 34, placed almost directly above the surface of a plate 30, for emitting an emission-line spectrum corresponding to at least one color of coloring particles in a color filter 32; a photo-receiver 36, placed obliquely upward with respect to the surface of the plate 30 and having a spectral sensitivity corresponding to the emission-line spectrum of the light source, for receiving reflected light from the color filter 32 on the plate 30 during inspection; and a detection means 42 for creating a brightness distribution for a color using a color signal output from the photo-receiver 36 as corresponding to its spectral sensitivity to detect the flatness (unevenness) of the surface of an overcoat layer 16.

摘要翻译： 本发明提供了一种用于以高精度检测滤色器的着色像素层上的外涂层的表面的平坦度和/或不均匀性的装置和方法。 该装置包括：几乎位于板30表面上方的光源34，用于发射与滤色器32中的至少一种着色颗粒颜色相对应的发射线光谱; 相对于板30的表面倾斜向上放置并具有与光源的发射线光谱相对应的光谱灵敏度的光电接收器36，用于在检查期间接收来自板30上的滤色器32的反射光 ; 以及检测装置42，用于根据其光谱灵敏度，使用从光接收器36输出的颜色信号产生颜色的亮度分布，以检测外涂层16的表面的平坦度（不均匀性）。

公开(公告)号：US06040888A

公开(公告)日：2000-03-21

申请号：US973734

申请日：1997-11-14

申请人： Shinohara Masami ,  Mitsuru Uda ,  Kunio Enami

发明人： Shinohara Masami ,  Mitsuru Uda ,  Kunio Enami

IPC分类号： G02F1/1339 ,  H04N9/31 ,  G02F1/1335

CPC分类号： H04N9/3105 ,  G02F1/13394

摘要： A liquid crystal display device having pillar-shaped spacers formed in pixel array regions is provided with improved display quality by preventing the degradation of contrast and the occurrence of residual images. A plurality of pillar-shape spacers formed in their pixel array regions are provided at locations which do not overlap with each other when images are projected on the screen using three different liquid crystal light valves to project the red (R), green (G) and blue (B), constituents of images.

摘要翻译： PCT No.PCT / JP95 / 01031 Sec。 371日期：1997年11月14日 102（e）日期1997年11月14日PCT提交1995年5月29日PCT公布。 出版物WO96 / 38755 日期：1996年12月5日具有形成在像素阵列区域中的柱状间隔物的液晶显示装置通过防止对比度的劣化和残留图像的发生而具有改进的显示质量。 当使用三个不同的液晶光阀将图像投射到屏幕上以投影红色（R），绿色（G））时，在其像素阵列区域中形成的多个柱状间隔物设置在彼此不重叠的位置处， 和蓝色（B），图像的成分。

公开(公告)号：US20060290922A1

公开(公告)日：2006-12-28

申请号：US11419030

申请日：2006-05-18

申请人： Mitsuru Uda ,  Atsushi Kohayase ,  Hiroshi Yamashita

发明人： Mitsuru Uda ,  Atsushi Kohayase ,  Hiroshi Yamashita

IPC分类号： G01N21/88

CPC分类号： G01N21/95 ,  G01N21/86 ,  G01N2021/9511

摘要： The present invention provides an apparatus and method for detecting flatness and/or unevenness of a surface of an overcoat layer on a colored pixel layer of a color filter with a high degree of accuracy. The apparatus includes: a light source 34, placed almost directly above the surface of a plate 30, for emitting an emission-line spectrum corresponding to at least one color of coloring particles in a color filter 32; a photo-receiver 36, placed obliquely upward with respect to the surface of the plate 30 and having a spectral sensitivity corresponding to the emission-line spectrum of the light source, for receiving reflected light from the color filter 32 on the plate 30 during inspection; and a detection means 42 for creating a brightness distribution for a color using a color signal output from the photo-receiver 36 as corresponding to its spectral sensitivity to detect the flatness (unevenness) of the surface of an overcoat layer 16.

摘要翻译： 本发明提供了一种用于以高精度检测滤色器的着色像素层上的外涂层的表面的平坦度和/或不均匀性的装置和方法。 该装置包括：几乎位于板30表面上方的光源34，用于发射与滤色器32中的至少一种着色颗粒颜色相对应的发射线光谱; 相对于板30的表面倾斜向上放置并具有与光源的发射线光谱相对应的光谱灵敏度的光电接收器36，用于在检查期间接收来自板30上的滤色器32的反射光 ; 以及检测装置42，用于根据其光谱灵敏度，使用从光接收器36输出的颜色信号产生颜色的亮度分布，以检测外涂层16的表面的平坦度（不均匀性）。

公开(公告)号：US06614502B2

公开(公告)日：2003-09-02

申请号：US09824674

申请日：2001-04-04

申请人： Masami Shinohara ,  Mitsuru Uda

发明人： Masami Shinohara ,  Mitsuru Uda

IPC分类号： G02F11335

CPC分类号： G02F1/13439 ,  G02F1/133553 ,  G02F1/136 ,  G02F2001/133357

摘要： An active matrix reflective liquid crystal device includes an array substrate which includes switching elements corresponding to pixels and an array of pixel electrodes connected to the switching elements; and an opposing substrate which has a transparent electrode opposite the array of pixel electrodes with a liquid crystal layer inserted therebetween. Each of the pixel electrodes includes an array of electrode studs, (e.g., divided electrode elements). The regions between the electrodes are filled with an insulating material, and the surface of the stud array is planarized by chemical-mechanical polishing (CMP). A dielectric light reflective film is formed on the planarized surface of the stud array, and a liquid crystal molecule alignment film is deposited thereon. Thus, a reflection type liquid crystal device is provided having a planarized light reflective face for a reduced reflection loss, along with a method for manufacturing the same, and a projection display system using such a reflection type liquid crystal device.

摘要翻译： 有源矩阵反射型液晶装置包括阵列基板，其包括与像素相对应的开关元件和连接到开关元件的像素电极阵列; 以及对置基板，其具有与像素电极阵列相对的透明电极，液晶层插入其间。 每个像素电极包括电极柱的阵列（例如分开的电极元件）。 电极之间的区域填充有绝缘材料，并且通过化学机械抛光（CMP）将螺柱阵列的表面平坦化。 在螺柱阵列的平坦化表面上形成电介质光反射膜，并在其上沉积液晶分子取向膜。 因此，提供一种反射型液晶装置，其具有用于降低反射损耗的平坦化的光反射面及其制造方法，以及使用这种反射型液晶装置的投影显示系统。